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    • 2. 发明授权
    • Apparatus and method for holding a green sheet and system and method for inspecting a green sheet
    • 用于保持生片的装置和方法以及用于检查生片的方法
    • US06310685B1
    • 2001-10-30
    • US09357506
    • 1999-07-20
    • Robert L. BaanJames O. GoringDavid Scott GraboskiJohn R. Lankard, Jr.Kurt R. MullerRaymond H. Turcotte
    • Robert L. BaanJames O. GoringDavid Scott GraboskiJohn R. Lankard, Jr.Kurt R. MullerRaymond H. Turcotte
    • G01N2101
    • H01L21/67028
    • A green sheet holding apparatus includes a first member secured to a first edge of the green sheet and a second member moveable relative to the first member, the second member being secured to a second edge of the green sheet. A forcing mechanism, connected to the second member and to the first member, forces the second member away from the first member such that the first edge and the second edge of the green sheet are forced away from each other and the green sheet is flattened. The holding apparatus may be included in a green sheet inspection system, wherein the inspection system further includes a light source directing a light onto the green sheet and a camera detecting light from the green sheet. The invention also includes a method of holding a green sheet, which includes securing the first edge of the green sheet to a first member, securing the second edge of the green sheet to a second member, and forcing the second member away from the first member. This method pulls the first edge and the second edge of the green sheet outwardly, thereby flattening the green sheet. The method may be part of a method of inspecting a screened pattern on a green sheet, which further includes directing a light onto a the green sheet and detecting the light as it emerges from the green sheet.
    • 生片保持装置包括固定到生片的第一边缘的第一构件和可相对于第一构件移动的第二构件,第二构件固定到生片的第二边缘。 连接到第二构件和第一构件的强制机构迫使第二构件远离第一构件,使得生片的第一边缘和第二边缘彼此远离并且生片被压平。 保持装置可以包括在生片检查系统中,其中检查系统还包括将光引导到生片上的光源和检测来自生片的光的照相机。 本发明还包括一种保持生片的方法,包括将生片的第一边缘固定到第一构件上,将生片的第二边缘固定到第二构件,并迫使第二构件远离第一构件 。 该方法向外拉动生片的第一边缘和第二边缘,从而使生片平坦化。 该方法可以是检查生片上的筛选图案的方法的一部分,其还包括将光引导到生片上并在从生片出来时检测光。
    • 7. 发明授权
    • High speed laser/air slide dimensional measurement tool
    • 高速激光/空气滑块尺寸测量工具
    • US5627647A
    • 1997-05-06
    • US668292
    • 1996-06-21
    • Robert L. BaanPaul J. Damore
    • Robert L. BaanPaul J. Damore
    • G01B11/04G01B11/06
    • G01B11/0691G01B11/04
    • A method and apparatus for measuring the x-y-z dimensions of an article such as a ceramic chip carrier are provided. The measuring apparatus and method utilize scanning laser beams to measure the dimensions of the article without physically contacting the article as the article is moved through the measuring device at a controlled speed preferably on a cushion of air. A separate laser beam scanning device is used to measure each dimension of the article and the laser beams are positioned to scan back and forth along the dimension to be measured. As the article moves through the preferred L-shaped apparatus, the direction of the article automatically changes in a transverse direction so that all three dimensions are conveniently and accurately measured.
    • 提供了用于测量诸如陶瓷芯片载体的物品的x-y-z尺寸的方法和装置。 测量装置和方法利用扫描激光束来测量物品的尺寸,而不会物理接触物品,因为物品以优选地在空气衬垫上的控制速度移动通过测量装置。 使用单独的激光束扫描装置来测量物品的每个尺寸,并且激光束被定位成沿着待测量的尺寸来回扫描。 当制品移动通过优选的L形装置时,制品的方向在横向方向上自动变化,使得所有三维方便且准确地测量。