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1. 发明申请

US20070020082A1 Unequal link SCARA arm 有权
标题翻译：不平等的链接SCARA手臂
公开(公告)号：US20070020082A1
公开(公告)日：2007-01-25
申请号：US11179762
申请日：2005-07-11
申请人： Robert Caveney , David Martin , Ulysses Gilchrist
发明人： Robert Caveney , David Martin , Ulysses Gilchrist
IPC分类号： B66C23/00
CPC分类号： B25J9/042 , H01L21/67766
摘要： A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
摘要翻译：一种基板输送装置，包括驱动部，控制器，上臂，前臂和基板支架。上臂的近端在肩关节处可旋转地安装到驱动部。前臂的近端以肘关节可旋转地安装在上臂的远端。基体保持器可旋转地安装在腕关节前端的前端。上臂和前臂从关节中心到关节中心的长度不等。基板输送臂适于将基板输送至至少两个基板保持区域，并且与传送装置的驱动部分相对于保持区域保持固定位置。上臂，前臂和基底保持架中的每一个可独立地相对于彼此旋转。

2. 发明申请

US20070071581A1 Process apparatus with on-the-fly workpiece centering 有权
标题翻译：具有工件中心的加工装置
公开(公告)号：US20070071581A1
公开(公告)日：2007-03-29
申请号：US11485144
申请日：2006-07-11
申请人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
发明人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
IPC分类号： H01L21/677
CPC分类号： H01L21/67265
摘要： A substrate processing apparatus having a transport apparatus, at least one sensor connected to the transport apparatus and a controller. The transport apparatus is adapted for transporting the substrate between processing stations of the processing apparatus. The sensor is capable of sensing the substrate transported by the transporting apparatus. The sensor is arranged for sending at least one signal in response to sensing the substrate. The controller is communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, angled relative to each other, relative to a predetermined location. The controller is capable of determining alignment from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.
摘要翻译：一种具有输送装置的基板处理装置，连接到输送装置的至少一个传感器和控制器。输送装置适于在处理装置的处理站之间传送基板。传感器能够感测由输送装置输送的基板。传感器布置成响应于感测基板而发送至少一个信号。控制器可通信地连接到传感器并被布置成确定基板相对于预定位置在至少两个方向上相对于彼此成角度的对准。控制器能够根据识别基板上不超过两个点的至少一个信号确定对准，而与基板之间的径向方差无关。

3. 发明授权

US07925378B2 Process apparatus with on-the-fly workpiece centering 有权
标题翻译：具有工件中心的加工装置
公开(公告)号：US07925378B2
公开(公告)日：2011-04-12
申请号：US11485144
申请日：2006-07-11
申请人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
发明人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
IPC分类号： G06F7/00
CPC分类号： H01L21/67265
摘要： A substrate processing apparatus having a transport apparatus, at least one sensor connected to the transport apparatus and a controller. The transport apparatus is adapted for transporting the substrate between processing stations of the processing apparatus. The sensor is capable of sensing the substrate transported by the transporting apparatus. The sensor is arranged for sending at least one signal in response to sensing the substrate. The controller is communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, angled relative to each other, relative to a predetermined location. The controller is capable of determining alignment from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.
摘要翻译：一种具有输送装置的基板处理装置，连接到输送装置的至少一个传感器和控制器。输送装置适于在处理装置的处理站之间传送基板。传感器能够感测由输送装置输送的基板。传感器布置成响应于感测基板而发送至少一个信号。控制器可通信地连接到传感器并被布置成确定基板相对于预定位置在至少两个方向上相对于彼此成角度的对准。控制器能够根据识别基板上不超过两个点的至少一个信号确定对准，而与基板之间的径向方差无关。

4. 发明申请

US20060045665A1 Subtrate processing apparatus with removable component module 有权
标题翻译：具有可移动组件模块的分箱处理设备
公开(公告)号：US20060045665A1
公开(公告)日：2006-03-02
申请号：US11154787
申请日：2005-06-15
申请人： Daniel Hall , Christopher Hofmeister , William Fosnight , Robert Caveney , Ulysses Gilchrist , Jeff Araujo
发明人： Daniel Hall , Christopher Hofmeister , William Fosnight , Robert Caveney , Ulysses Gilchrist , Jeff Araujo
IPC分类号： H01L21/677
CPC分类号： H01L21/67196 , Y10S414/135
摘要： A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.
摘要翻译：一种具有框架，壳体，存取系统和至少基板输送装置或基板处理装置的基板处理装置。外壳连接到框架。存取系统连接到框架并形成一个通路，通过该通道使基板移入和移出外壳。基板输送装置或基板处理装置连接到框架并且至少部分地定位在壳体中。框架包括可移动部分。可移动部分可相对于框架移动，使得可移动部分的运动导致进入系统和基板输送装置或基板处理装置中的至少一个与安装位置的分离。基板输送装置可从许多不同的可互换的基板输送装置中选择。每个不同的可互换的基板输送装置具有预定的参考基准和用于相对于框架定位基板输送装置的定位特征。每个基板输送装置的定位特征可相对于其预定参考基准可控地定位成处于可重复的预定位置，在不同的可互换的基板输送装置之间基本上没有变化。

5. 发明授权

US09248568B2 Unequal link SCARA arm 有权
标题翻译：不平等的链接SCARA手臂
公开(公告)号：US09248568B2
公开(公告)日：2016-02-02
申请号：US11179762
申请日：2005-07-11
申请人： Robert T. Caveney , David Martin , Ulysses Gilchrist
发明人： Robert T. Caveney , David Martin , Ulysses Gilchrist
IPC分类号： B66C23/00 , B25J9/04 , H01L21/677
CPC分类号： B25J9/042 , H01L21/67766
摘要： A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.
摘要翻译：一种基板输送装置，包括驱动部，控制器，上臂，前臂和基板支架。上臂的近端在肩关节处可旋转地安装到驱动部。前臂的近端以肘关节可旋转地安装在上臂的远端。基体保持器可旋转地安装在腕关节前端的前端。上臂和前臂从关节中心到关节中心的长度不等。基板输送臂适于将基板输送至至少两个基板保持区域，并且与传送装置的驱动部分相对于保持区域保持固定位置。上臂，前臂和基底保持架中的每一个可独立地相对于彼此旋转。

6. 发明授权

US08678734B2 Elevator-based tool loading and buffering system 有权
标题翻译：电梯工具装载和缓冲系统
公开(公告)号：US08678734B2
公开(公告)日：2014-03-25
申请号：US12897440
申请日：2010-10-04
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： B65G54/02 , B65G54/00 , H01L21/67 , H01L21/677
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
摘要翻译：提供了一种基板处理装置。该装置具有壳体，低端口接口和载体保持站。壳体具有用于处理基板的处理装置。负载端口接口连接到外壳，用于将基板装载到处理设备中。托架保持站连接到外壳。载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

7. 发明授权

US07806643B2 Elevator-based tool loading and buffering system 有权
标题翻译：电梯工具装载和缓冲系统
公开(公告)号：US07806643B2
公开(公告)日：2010-10-05
申请号：US11210918
申请日：2005-08-23
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： B65H1/00 , B65G65/00
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.
摘要翻译：提供了一种基板处理装置。该装置具有壳体，低端口接口和载体保持站。壳体具有用于处理基板的处理装置。负载端口接口连接到外壳，用于将基板装载到处理设备中。托架保持站连接到外壳。载体保持站用于在负载端口接口处保持至少一个基板传输载体。载体保持站布置成提供用于从载体保持站更换基板传输载体的快速互换部分。

8. 发明申请

US20090243413A1 ROBOT DRIVE WITH MAGNETIC SPINDLE BEARINGS 有权
标题翻译：带有磁性主轴的机架式驱动装置
公开(公告)号：US20090243413A1
公开(公告)日：2009-10-01
申请号：US12163996
申请日：2008-06-27
申请人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
发明人： Ulysses Gilchrist , Martin Hosek , Jairo Terra Moura , Jay Krishnasamy , Christopher Hofmeister
IPC分类号： H02K7/09 , B25J17/00
CPC分类号： H02K7/09 , H02K29/03 , Y10S901/15 , Y10S901/23 , Y10T74/20305 , Y10T74/20317 , Y10T74/20329
摘要： A drive section for a substrate transport arm including a frame, at least one stator mounted within the frame, the stator including a first motor section and at least one stator bearing section and a coaxial spindle magnetically supported substantially without contact by the at least one stator bearing section, where each drive shaft of the coaxial spindle includes a rotor, the rotor including a second motor section and at least one rotor bearing section configured to interface with the at least one stator bearing section, wherein the first motor section is configured to interface with the second motor section to effect rotation of the spindle about a predetermined axis and the at least one stator bearing section is configured to effect at least leveling of a substrate transport arm end effector connected to the coaxial spindle through an interaction with the at least one rotor bearing section.
摘要翻译：一种用于基板输送臂的驱动部分，包括框架，至少一个定子，其安装在框架内，该定子包括第一马达部分和至少一个定子轴承部分和同轴主轴，所述至少一个定子轴承部分和基本上不被所述至少一个定子其中所述同轴心轴的每个驱动轴包括转子，所述转子包括第二电动机部分和至少一个转子轴承部分，所述至少一个转子轴承部分构造成与所述至少一个定子轴承部分相接合，其中所述第一电动机部分被配置为接合所述第二马达部分绕所述心轴绕预定轴线进行旋转，并且所述至少一个定子支承部分构造成通过与所述至少一个相互作用的至少一个相互作用来实现连接到所述同轴心轴的基底输送臂端部执行器的至少调平转子轴承部分。

9. 发明申请

US20090003976A1 COMPACT SUBSTRATE TRANSPORT SYSTEM 有权
标题翻译：紧凑的基板运输系统
公开(公告)号：US20090003976A1
公开(公告)日：2009-01-01
申请号：US12123329
申请日：2008-05-19
申请人： Christopher Hofmeister , Alexander Krupyshev , Ulysses Gilchrist
发明人： Christopher Hofmeister , Alexander Krupyshev , Ulysses Gilchrist
IPC分类号： B65G69/00 , B66C23/00 , B65H1/00
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
摘要翻译：一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆和至少一个末端执行器，所述至少一个末端执行器彼此串联地枢转地联接，其中第一和第二臂连杆具有不相等的长度。

10. 发明申请

US20080063496A1 Reduced capacity carrier, transport, load port, buffer system 有权
标题翻译：减少承载能力，运输负载端口，缓冲系统
公开(公告)号：US20080063496A1
公开(公告)日：2008-03-13
申请号：US11891835
申请日：2007-08-13
申请人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
发明人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
IPC分类号： B65G1/00
CPC分类号： H01L21/67733 , H01L21/67017 , H01L21/67126 , H01L21/67201 , H01L21/67276 , H01L21/67376 , H01L21/67379 , H01L21/67386 , H01L21/677 , H01L21/67706 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67736 , H01L21/67757 , H01L21/67766 , H01L21/67769 , H01L21/67772 , H01L21/67775
摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
摘要翻译：根据示例性实施例，半导体工件处理系统具有至少一个用于处理半导体工件的处理工具，用于将至少一个半导体工件保持在其中以用于传送至至少一个处理工具和从该至少一个处理工具传送的容器和第一传送部分定义旅行方向。第一运输部分具有与集装箱接合的部件，沿着行进方向将容器支撑和运输到至少一个加工工具和从该至少一个加工工具运送。当由第一输送部支撑时，容器以行进方向以基本上恒定的速度基本上连续输送。第二传送部分连接到至少一个处理工具，用于将容器运送到至少一个处理工具和从该至少一个处理工具传送。

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