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1. 发明申请

US20070071581A1 Process apparatus with on-the-fly workpiece centering 有权
标题翻译：具有工件中心的加工装置
公开(公告)号：US20070071581A1
公开(公告)日：2007-03-29
申请号：US11485144
申请日：2006-07-11
申请人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
发明人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
IPC分类号： H01L21/677
CPC分类号： H01L21/67265
摘要： A substrate processing apparatus having a transport apparatus, at least one sensor connected to the transport apparatus and a controller. The transport apparatus is adapted for transporting the substrate between processing stations of the processing apparatus. The sensor is capable of sensing the substrate transported by the transporting apparatus. The sensor is arranged for sending at least one signal in response to sensing the substrate. The controller is communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, angled relative to each other, relative to a predetermined location. The controller is capable of determining alignment from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.
摘要翻译：一种具有输送装置的基板处理装置，连接到输送装置的至少一个传感器和控制器。输送装置适于在处理装置的处理站之间传送基板。传感器能够感测由输送装置输送的基板。传感器布置成响应于感测基板而发送至少一个信号。控制器可通信地连接到传感器并被布置成确定基板相对于预定位置在至少两个方向上相对于彼此成角度的对准。控制器能够根据识别基板上不超过两个点的至少一个信号确定对准，而与基板之间的径向方差无关。

2. 发明授权

US07925378B2 Process apparatus with on-the-fly workpiece centering 有权
标题翻译：具有工件中心的加工装置
公开(公告)号：US07925378B2
公开(公告)日：2011-04-12
申请号：US11485144
申请日：2006-07-11
申请人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
发明人： Ulysses Gilchrist , Haniel Olivera , William Fosnight , Richard Pickreign , Robert Caveney
IPC分类号： G06F7/00
CPC分类号： H01L21/67265
摘要： A substrate processing apparatus having a transport apparatus, at least one sensor connected to the transport apparatus and a controller. The transport apparatus is adapted for transporting the substrate between processing stations of the processing apparatus. The sensor is capable of sensing the substrate transported by the transporting apparatus. The sensor is arranged for sending at least one signal in response to sensing the substrate. The controller is communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, angled relative to each other, relative to a predetermined location. The controller is capable of determining alignment from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.
摘要翻译：一种具有输送装置的基板处理装置，连接到输送装置的至少一个传感器和控制器。输送装置适于在处理装置的处理站之间传送基板。传感器能够感测由输送装置输送的基板。传感器布置成响应于感测基板而发送至少一个信号。控制器可通信地连接到传感器并被布置成确定基板相对于预定位置在至少两个方向上相对于彼此成角度的对准。控制器能够根据识别基板上不超过两个点的至少一个信号确定对准，而与基板之间的径向方差无关。

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