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1. 发明授权

US09102209B2 Anti-causal vehicle suspension 有权
标题翻译：反车辆停车
公开(公告)号：US09102209B2
公开(公告)日：2015-08-11
申请号：US13534800
申请日：2012-06-27
申请人： Marco Giovanardi , David J. Warkentin
发明人： Marco Giovanardi , David J. Warkentin
IPC分类号： B60G17/0165
CPC分类号： B60G17/0165 , B60G2400/821 , B60G2600/182 , B60G2800/164
摘要： A vehicle suspension and wheel damper using anti-causal filtering. Information from in front of a wheel or information about an operating condition of a vehicle is used to anti-causally determine a response of an active suspension associated with the wheel.
摘要翻译：一种使用反因果过滤的车辆悬架和车轮阻尼器。使用来自车轮前方的信息或关于车辆的操作状况的信息来反向地确定与车轮相关联的主动悬架的响应。

2. 发明授权

US08938333B2 Active wheel damping 有权
标题翻译：主动轮阻尼
公开(公告)号：US08938333B2
公开(公告)日：2015-01-20
申请号：US13534808
申请日：2012-06-27
申请人： Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
发明人： Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
IPC分类号： B60G17/0165
CPC分类号： B60G17/0165 , B60G2400/821 , B60G2400/91 , B60G2600/182 , B60G2800/162
摘要： An active wheel damper. An active suspension damps vertical displacement of an unsprung mass in a frequency range and reduces vertical displacement of a sprung mass in another frequency range.
摘要翻译：主动轮阻尼器。一个主动悬架可以抑制簧下质量在频率范围内的垂直位移，并减少弹簧质量在另一个频率范围内的垂直位移。

3. 发明申请

US20140001717A1 Anti-causal vehicle suspension 有权
标题翻译：反车辆停车
公开(公告)号：US20140001717A1
公开(公告)日：2014-01-02
申请号：US13534800
申请日：2012-06-27
申请人： Marco Giovanardi , David J. Warkentin
发明人： Marco Giovanardi , David J. Warkentin
IPC分类号： B60G17/0165
CPC分类号： B60G17/0165 , B60G2400/821 , B60G2600/182 , B60G2800/164
摘要： A vehicle suspension and wheel damper using anti-causal filtering. Information from in front of a wheel or information about an operating condition of a vehicle is used to anti-causally determine a response of an active suspension associated with the wheel.
摘要翻译：一种使用反因果过滤的车辆悬架和车轮阻尼器。使用来自车轮前方的信息或关于车辆的操作状况的信息来反向地确定与车轮相关联的主动悬架的响应。

4. 发明授权

US06704339B2 Lithography laser with beam delivery and beam pointing control 有权
标题翻译：光束激光器具有光束传递和光束指向控制
公开(公告)号：US06704339B2
公开(公告)日：2004-03-09
申请号：US10233253
申请日：2002-08-30
申请人： Leonard Lublin , David J. Warkentin , Palash P. Das , Brian C. Klene , R. Kyle Webb , Herve A. Besaucele , Ronald L. Spangler , Richard L. Sandstrom , Alexander I. Ershov , Shahryar Rokni
发明人： Leonard Lublin , David J. Warkentin , Palash P. Das , Brian C. Klene , R. Kyle Webb , Herve A. Besaucele , Ronald L. Spangler , Richard L. Sandstrom , Alexander I. Ershov , Shahryar Rokni
IPC分类号： H01S3101
CPC分类号： H01S3/005 , G03F7/70025 , G03F7/70041 , G03F7/7055 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source for a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam to a desired location such as the entrance port of the production line machine. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.
摘要翻译：本发明提供一种用于生产线机器的模块化高重复率紫外线气体放电激光源。该系统包括具有光束指向控制的封闭和清除的光束路径，用于将激光束传送到期望的位置，例如生产线机器的入口。在优选实施例中，生产线机器是光刻机，并且提供两个单独的放电室，其中之一是主振荡器的一部分，其产生在第二放电室中放大的非常窄的带状晶体束。该MOPA系统能够以大大提高的光束质量将输出脉冲能量大约增加到相当的单室激光器系统的两倍。与现有技术的激光系统相比，脉冲放大器使输出脉冲长度加倍，导致脉冲功率（mJ / ns）的降低。该优选实施例能够在光刻系统晶片平面处提供照明，其在光刻系统的整个使用寿命期间大致恒定，尽管光学部件的实质性劣化。

5. 发明授权

US06563128B2 Base stabilization system 有权
标题翻译：基地稳定系统
公开(公告)号：US06563128B2
公开(公告)日：2003-05-13
申请号：US10074059
申请日：2002-02-11
申请人： Leonard Lublin , David J. Warkentin , Baruch Pletner , John A. Rule
发明人： Leonard Lublin , David J. Warkentin , Baruch Pletner , John A. Rule
IPC分类号： G01N2186
CPC分类号： F16F15/02 , F16F15/005 , F16F15/0275 , F16F2230/08 , G03F7/70725 , G03F7/70825 , G03F7/70833 , G03F7/709
摘要： A system that provides a base stabilization system for controlling motion of a controlled structure. The system includes a ground structure such as the floor of a fabrication facility and the controlled structure includes a base on which equipment is mounted. The system also includes at least three air mounts and a plurality of actuators all attached to the ground structure and to the base to isolate the base from the ground structure and to stabilize the base. The system includes a plurality of position and acceleration sensors each of which are co-located with a corresponding actuator. The system also includes a multi-input, multi output feedback control system comprising a computer processor programmed with a feedback control algorithm for controlling each of the actuators based on feedback signals from each of the sensors. The co-location of the sensors with the actuators avoids serious problems resulting from higher order vibration modes.
摘要翻译：提供用于控制受控结构的运动的基本稳定系统的系统。该系统包括诸如制造设备的底板的接地结构，并且受控结构包括安装设备的基座。该系统还包括至少三个空气支架和多个致动器，所述致动器全部附接到地面结构和底座以将基座与地面结构隔离并稳定基座。该系统包括多个位置和加速度传感器，每个位置和加速度传感器与相应的致动器共同定位。该系统还包括多输入多输出反馈控制系统，其包括用基于来自每个传感器的反馈信号控制每个致动器的反馈控制算法编程的计算机处理器。传感器与执行器的共同位置避免了由较高阶振动模式引起的严重问题。

6. 发明申请

US20140136048A1 ACCELEROMETER LEVELING 有权
标题翻译：加速度调节
公开(公告)号：US20140136048A1
公开(公告)日：2014-05-15
申请号：US13676582
申请日：2012-11-14
申请人： Upendra Ummethala , David J. Warkentin
发明人： Upendra Ummethala , David J. Warkentin
IPC分类号： G01P21/00
CPC分类号： G01P21/00
摘要： In an aspect, in general, a system and method compensate for a misalignment characteristic of one or more acceleration sensors fixed to a sprung mass of a vehicle, each acceleration sensor having a location on the vehicle and a desired orientation relative to the vehicle.
摘要翻译：在一方面，一般来说，系统和方法补偿固定在车辆弹簧质量上的一个或多个加速度传感器的不对准特性，每个加速度传感器具有车辆上的位置和相对于车辆的期望取向。

7. 发明授权

US06872961B2 Vibration control utilizing signal detrending 有权
标题翻译：振动控制利用信号衰减
公开(公告)号：US06872961B2
公开(公告)日：2005-03-29
申请号：US10112443
申请日：2002-03-29
申请人： Robert N. Jacques , David J. Warkentin
发明人： Robert N. Jacques , David J. Warkentin
IPC分类号： B23P19/033 , F16F15/00 , F16F15/02 , F16F15/027 , G03F7/20 , G05D19/02 , G01N21/86 , F16M13/00
CPC分类号： G03F7/709 , F16F15/005 , F16F15/02 , F16F15/0275 , F16F2230/08 , G03F7/70725 , G03F7/70833 , G05D19/02 , Y10T29/5313 , Y10T29/53174
摘要： A motion control system for reducing vibration in moving components. The system includes a position control drive and a vibration control drive. At least one position sensor is used to provide feedback signals which are in turn used to provide control signals for both the position control drive and the vibration control drive. In a preferred embodiment the motion control system is applied to a stage of an integrated circuit lithography step and scan machine. The position control drives are linear magnetic actuators and the vibration control drives are electroceramic actuators. A laser interferometer position monitoring system is used to measure the position, speed, and acceleration of the stage system. Actuators apply controlled forces (based on measurements from the position monitoring system) to each stage to control the motion of the stage. Signals from the interferometer position system are also used to control vibration. A recursive least squares (RLS) method is used to identify the commanded motion from the laser interferometer signals. Vibration measurements are derived from the laser interferometer signals by removing the commanded motion portion of the signal.
摘要翻译：一种用于减少运动部件振动的运动控制系统。该系统包括位置控制驱动和振动控制驱动。使用至少一个位置传感器来提供反馈信号，反馈信号又用于为位置控制驱动器和振动控制驱动器提供控制信号。在优选实施例中，运动控制系统被应用于集成电路光刻步骤和扫描机的阶段。位置控制驱动器是线性磁致动器，振动控制驱动器是电陶瓷致动器。激光干涉仪位置监测系统用于测量舞台系统的位置，速度和加速度。执行器将受控力（基于位置监控系统的测量）施加到每个阶段以控制舞台的运动。来自干涉仪位置系统的信号也用于控制振动。使用递归最小二乘法（RLS）方法来识别来自激光干涉仪信号的命令运动。通过去除信号的指令运动部分，从激光干涉仪信号得到振动测量值。

8. 发明申请

US20140005888A1 ACTIVE WHEEL DAMPING 有权
标题翻译：主动轮阻尼
公开(公告)号：US20140005888A1
公开(公告)日：2014-01-02
申请号：US13534808
申请日：2012-06-27
申请人： Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
发明人： Amar G. Bose , Paul Bender , Marco Giovanardi , Lawrence D. Knox , Neal M. Lackritz , William R. Short , Wade P. Torres , Upendra V. Ummethala , David J. Warkentin
IPC分类号： B60G17/0165
CPC分类号： B60G17/0165 , B60G2400/821 , B60G2400/91 , B60G2600/182 , B60G2800/162
摘要： An active wheel damper. An active suspension damps vertical displacement of an unsprung mass in a frequency range and reduces vertical displacement of a sprung mass in another frequency range.
摘要翻译：主动轮阻尼器。一个主动悬架可以抑制簧下质量在频率范围内的垂直位移，并减少弹簧质量在另一个频率范围内的垂直位移。

9. 发明授权

US06904073B2 High power deep ultraviolet laser with long life optics 有权
标题翻译：大功率深紫外线激光器，寿命长
公开(公告)号：US06904073B2
公开(公告)日：2005-06-07
申请号：US10384967
申请日：2003-03-08
申请人： Thomas A. Yager , William N. Partio , Richard L. Sandstrom , Xiaojiang Pan , John T. Melchior , John Martin Algots , Matthew Ball , Alexander I. Ershov , Vladimir Fleurov , Walter D. Gillespie , Holger K. Glatzel , Leonard Lublin , Elizabeth Marsh , Richard G. Morton , Richard C. Ujazdowski , David J. Warkentin , R. Kyle Webb
发明人： Thomas A. Yager , William N. Partio , Richard L. Sandstrom , Xiaojiang Pan , John T. Melchior , John Martin Algots , Matthew Ball , Alexander I. Ershov , Vladimir Fleurov , Walter D. Gillespie , Holger K. Glatzel , Leonard Lublin , Elizabeth Marsh , Richard G. Morton , Richard C. Ujazdowski , David J. Warkentin , R. Kyle Webb
IPC分类号： G03F7/20 , H01S3/00 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/0943 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： H01S3/2333 , G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2366
摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics located in high pulse intensity sections of the output beam of prototype laser systems. Embodiments include an enclosed and purged beam path with beam pointing control for beam delivery of billions of output laser pulses. Optical components and modules described herein are capable of controlling ultraviolet laser output pulses with wavelength less than 200 nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses as compared to prior art components and modules which failed after only a few minutes in these pulse intensities. Techniques and components are disclosed for minimizing the potential for optical damage and for reducing the pulse energy density to less than 100×10−6 J/cm3. Important improvements described in this specification have been grouped into the following subject matter categories: (1) Solution to CaF2 surface damage discovered by Applicants, (2) description of a high power ArF MOPA laser system, (3) description of beam delivery units, (4) polarization considerations (5) a high speed water-cooled auto shutter energy detector module and (6) other improvements.
摘要翻译：本发明提供了用于产生高重复率高功率输出光束的模块化高重复率紫外线气体放电激光器系统的长寿命光学器件。本发明包括由申请人发现的位于原型激光系统的输出光束的高脉冲强度部分中的CaF 2光学器件的表面损伤问题的解决方案。实施例包括用于束传送数十亿个输出激光脉冲的光束指向控制的封闭和清除的光束路径。本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲，平均输出脉冲强度大于1.75×6 /瓦/ cm 2，并且与与在这些脉冲强度中仅仅几分钟之后失效的现有技术部件和模块相比，数十亿个脉冲的峰值强度或更大的3.5×10 6 / cm 2 / SUP。公开了用于最小化光学损伤的可能性和将脉冲能量密度降低到小于100×10 -6 / cm 3的技术和部件。本说明书中描述的重要改进已分为以下主题类别：（1）由申请人发现的CaF 2 2表面损伤的解决方案，（2）高功率ArF MOPA激光系统的描述（ 3）光束传输单元的描述，（4）偏振考虑（5）高速水冷自动快门能量检测器模块和（6）其他改进。

10. 发明授权

US4942767A Pressure transducer apparatus 失效
标题翻译：压力传感器装置
公开(公告)号：US4942767A
公开(公告)日：1990-07-24
申请号：US360325
申请日：1989-06-02
申请人： Joseph H. Haritonidis , Stephen D. Senturia , David J. Warkentin , Mehran Mehregany
发明人： Joseph H. Haritonidis , Stephen D. Senturia , David J. Warkentin , Mehran Mehregany
IPC分类号： H04R23/00
CPC分类号： H04R23/008
摘要： A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.
摘要翻译：微加工膜片位于与光纤端部的间隙上。光纤和隔膜一体安装。光纤的端部提供了一个局部参考平面，它将穿过光纤的光分成隔膜。光被分割成随后从光阑反射的透射部分和与随后的光阑反射部分干涉的局部反射部分。两个反射部件的干涉形成通过光纤带回光检测器的干涉光图案。干涉图形提供了膜片偏转的指示，作为横跨隔膜的暴露侧的施加压力的函数。通过使用位于隔膜间隙的第二纤维来提供膜片偏转的幅度和方向的检测。第二光纤以与第一光纤相同的方式提供干涉图案，但是具有相移。允许环境和间隙之间的通信的开口使得能够使用干涉仪传感器作为剪切应力测量装置。

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