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    • 4. 发明授权
    • Interconnection interface for flexible online/offline deployment of an n-layered software application
    • 互联接口,用于灵活的在线/离线部署n层软件应用程序
    • US08719778B2
    • 2014-05-06
    • US11878093
    • 2007-07-20
    • Karlheinz DornRalf Hofmann
    • Karlheinz DornRalf Hofmann
    • G06F9/44G06F9/445
    • G06F8/00
    • A method is disclosed for producing a software application with at least two layers, including a processing layer and a process layer, wherein each layer is encapsulated and hence platform-independent in its execution, the encapsulated layers communicating via an application programming interface. A system is also disclosed for producing an application including a flexible interconnection interface between encapsulated layers. By virtue of the implementation of an additional configurable interconnection interface in the application programming interface between two encapsulated application layers, the architecture layering can be retained regardless of the respective deployment, and only the communication profiles of the interconnection interfaces need be adapted to the deployment. This has the advantage, in at least one embodiment, that it is not necessary to produce and update different source code masters for the different deployments, and instead only one single architecture layering of the application need be created and maintained.
    • 公开了一种用于生产具有至少两层的软件应用的方法,包括处理层和处理层,其中每个层被封装,因此在其执行中因此与平台无关,所述封装层经由应用编程接口进行通信。 还公开了一种用于生产包括在封装层之间的柔性互连接口的应用的系统。 通过在两个封装的应用层之间的应用程序编程接口中实现附加的可配置互连接口,可以保留架构分层,而不管相应的部署如何,并且只有互连接口的通信配置需要适应于部署。 这在至少一个实施例中具有以下优点:不需要为不同部署生成和更新不同的源代码主机,而是需要创建和维护应用程序的一个单一架构分层。
    • 7. 发明申请
    • DIELECTRIC DEPOSITION USING A REMOTE PLASMA SOURCE
    • 使用远程等离子体源进行介电沉积
    • US20110226617A1
    • 2011-09-22
    • US13069205
    • 2011-03-22
    • Ralf HofmannMajeed A. Foad
    • Ralf HofmannMajeed A. Foad
    • C23C14/34C23C14/35C23C14/06C23C14/46
    • C23C14/3407C23C14/0036C23C14/06C23C14/354H01J37/32357H01J37/34H05H1/46H05H2001/4667
    • A sputter deposition system comprises a vacuum chamber including a vacuum pump for maintaining a vacuum in the vacuum chamber, a gas inlet for supplying process gases to the vacuum chamber, a sputter target and a substrate holder within the vacuum chamber, and a plasma source attached to the vacuum chamber and positioned remotely from the sputter target, the plasma source being configured to form a high density plasma beam extending into the vacuum chamber. The plasma source may include a rectangular cross-section source chamber, an electromagnet, and a radio frequency coil, wherein the rectangular cross-section source chamber and the radio frequency coil are configured to give the high density plasma beam an elongated ovate cross-section. Furthermore, the surface of the sputter target may be configured in a non-planar form to provide uniform plasma energy deposition into the target and/or uniform sputter deposition at the surface of a substrate on the substrate holder. The sputter deposition system may include a plasma spreading system for reshaping the high density plasma beam for complete and uniform coverage of the sputter target.
    • 溅射沉积系统包括真空室,其包括用于在真空室中保持真空的真空泵,用于向真空室供应处理气体的气体入口,真空室内的溅射靶和衬底保持器,以及附着的等离子体源 到真空室并且远离溅射靶定位,等离子体源被配置成形成延伸到真空室中的高密度等离子体束。 等离子体源可以包括矩形横截面源室,电磁体和射频线圈,其中矩形横截面源室和射频线圈被配置为给予高密度等离子体束细长的卵形横截面 。 此外,溅射靶的表面可以被配置为非平面形式,以在衬底保持器上的衬底的表面处提供均匀的等离子体能量沉积到靶中和/或均匀的溅射沉积。 溅射沉积系统可以包括等离子体扩散系统,用于重新形成高密度等离子体束,以完全和均匀地覆盖溅射靶。
    • 9. 发明申请
    • NANOCRYSTAL FORMATION
    • 纳米结构
    • US20080135914A1
    • 2008-06-12
    • US11771778
    • 2007-06-29
    • Nety M. KrishnaRalf HofmannKaushal K. SinghKarl J. Armstrong
    • Nety M. KrishnaRalf HofmannKaushal K. SinghKarl J. Armstrong
    • H01L21/28H01L29/788
    • H01L29/7881H01L29/40114H01L29/42332
    • In one embodiment, a method for forming a metallic nanocrystalline material on a substrate is provided which includes exposing a substrate to a pretreatment process, forming a tunnel dielectric layer on the substrate, exposing the substrate to a post-treatment process, forming a metallic nanocrystalline layer on the tunnel dielectric layer, and forming a dielectric capping layer on the metallic nanocrystalline layer. The method further provides forming the metallic nanocrystalline layer having a nanocrystalline density of at least about 5×1012 cm−2, preferably, at least about 8×1012 cm−2. In one example, the metallic nanocrystalline layer contains platinum, ruthenium, or nickel. In another embodiment, a method for forming a multi-layered metallic nanocrystalline material on a substrate is provided which includes forming a plurality of bi-layers, wherein each bi-layer contains an intermediate dielectric layer deposited on a metallic nanocrystalline layer. Some of the examples include 10, 50, 100, 200, or more bi-layers.
    • 在一个实施例中,提供了一种在衬底上形成金属纳米晶体材料的方法,其包括将衬底暴露于预处理工艺,在衬底上形成隧道电介质层,将衬底暴露于后处理工艺,形成金属纳米晶体 并在所述金属纳米晶层上形成介电覆盖层。 该方法进一步提供形成金属纳米晶层,其纳米晶密度为至少约5×10 12 cm -2,优选至少约8×10 12 / > cm -2。 在一个实例中,金属纳米晶层包含铂,钌或镍。 在另一个实施例中,提供了一种在衬底上形成多层金属纳米晶体材料的方法,其包括形成多个双层,其中每个双层包含沉积在金属纳米晶层上的中间介电层。 一些示例包括10,50,100,200或更多的双层。
    • 10. 发明申请
    • Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece
    • 用于通过工件施加RF源功率的等离子体增强物理气相沉积的装置
    • US20060172536A1
    • 2006-08-03
    • US11140544
    • 2005-05-25
    • Karl BrownJohn PipitoneVineet MehtaRalf Hofmann
    • Karl BrownJohn PipitoneVineet MehtaRalf Hofmann
    • H01L21/44
    • H01J37/3408C23C14/046C23C14/345C23C14/358H01J37/32082H01J37/32706H01L21/2855H01L21/76843H01L21/76844
    • A method of performing physical vapor deposition of copper onto an integrated circuit in a vacuum chamber of a plasma reactor includes providing a copper target near a ceiling of the chamber, placing an integrated circuit wafer on a wafer support pedestal facing the target near a floor of the chamber, introducing a carrier gas into the vacuum chamber, maintaining a target-sputtering plasma at the target to produce a stream comprising at least one of copper atoms and copper ions flowing from the target toward the wafer support pedestal for vapor deposition, and maintaining a wafer-sputtering plasma near the wafer support pedestal by capacitively coupling plasma RF source power to the wafer-sputtering plasma. The frequency of the RF source power is sufficiently high to limit ion energy near the surface of the wafer so that the principal portion of the power provides plasma ion generation. The method further includes maintaining the RF source power at a sufficiently high level to deposit a conformal layer of copper on vertical and horizontal surfaces of the workpiece.
    • 在等离子体反应器的真空室中将铜物理气相沉积到集成电路上的方法包括在室的顶部附近提供铜靶,将集成电路晶片放置在面向靶的晶片支撑台座附近, 将载气引入真空室,将目标溅射等离子体保持在目标处,以产生包含从目标流向晶片支撑基座的铜原子和铜离子中的至少一种的气流,用于气相沉积,并保持 通过将等离子体RF源功率电容耦合到晶片溅射等离子体,在晶片支撑基座附近的晶片溅射等离子体。 RF源功率的频率足够高以限制晶片表面附近的离子能量,使得功率的主要部分提供等离子体离子产生。 该方法还包括将RF源功率保持在足够高的水平以将铜的共形层沉积在工件的垂直和水平表面上。