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1. 发明授权

US07298954B2 Waveguide shuttle MEMS variable optical attenuator 失效
标题翻译：波导梭MEMS可变光衰减器
公开(公告)号：US07298954B2
公开(公告)日：2007-11-20
申请号：US11154019
申请日：2005-06-16
申请人： Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Yao Rong Wang , Jun Ma , Pinyen Lin , Joel A. Kubby , Kathleen A. Feinberg
发明人： Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Yao Rong Wang , Jun Ma , Pinyen Lin , Joel A. Kubby , Kathleen A. Feinberg
IPC分类号： G02B6/26
CPC分类号： G02B6/358 , G02B6/266 , G02B6/3508 , G02B6/3544 , G02B6/357 , G02B6/3584 , G02B6/3594 , G02B6/3596
摘要： An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
摘要翻译：提供了可变光衰减器（VOA）的功能的改进的波导穿梭光开关设计。波导的有意的不对准会导致不同程度的光衰减。通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。开关功能和VOA功能的集成减少光损耗，否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时，光损失是不可避免的。所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

2. 发明授权

US07242825B2 Cantilever beam MEMS variable optical attenuator 失效
标题翻译：悬臂梁MEMS可变光衰减器
公开(公告)号：US07242825B2
公开(公告)日：2007-07-10
申请号：US11010769
申请日：2004-12-13
申请人： Pinyen Lin , Yao Rong Wang , Jun Ma , Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Joel A. Kubby
发明人： Pinyen Lin , Yao Rong Wang , Jun Ma , Xueyuan Liu , Peter M. Gulvin , Kristine A. German , Joel A. Kubby
IPC分类号： G02B6/35
CPC分类号： G02B6/3508 , G02B6/266 , G02B6/3566 , G02B6/357 , G02B6/358 , G02B6/3594 , G02B6/3596
摘要： An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
摘要翻译：改进的悬臂光束开关设计，提供可变光衰减器（VOA）的功能。波导的有意的不对准会导致不同程度的光衰减。通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

3. 发明授权

US06987920B1 Waveguide structures and methods 失效
标题翻译：波导结构和方法
公开(公告)号：US06987920B1
公开(公告)日：2006-01-17
申请号：US10878834
申请日：2004-06-28
申请人： Kristine A. German , Peter M. Gulvin , Joel A. Kubby , Pinyen Lin , Xueyuan Liu , Yao Rong Wang
发明人： Kristine A. German , Peter M. Gulvin , Joel A. Kubby , Pinyen Lin , Xueyuan Liu , Yao Rong Wang
IPC分类号： G02B6/10
CPC分类号： G02B6/122 , G02B6/105
摘要： A waveguide structure has a base having a base height (h) above a substrate and a rectangular waveguide having a waveguide height (H) above the substrate and a waveguide width (W) between opposing sides of the waveguide.
摘要翻译：波导结构具有在基板上方具有基底高度（h）的基部和在基板上方具有波导高度（H）的矩形波导和波导的相对侧之间的波导宽度（W）。

4. 发明授权

US06985651B2 Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same 失效
标题翻译：具有偏转光束段中性轴的热致动器和包括该中间轴的光波导开关
公开(公告)号：US06985651B2
公开(公告)日：2006-01-10
申请号：US10772693
申请日：2004-02-05
申请人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
发明人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
IPC分类号： G02B6/26 , G02B6/42 , H01H37/00
CPC分类号： B81B3/0018 , G02B6/3566 , G02B6/3576 , G02B6/3584
摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments with beam segment lengths. Each beam segment has a beam segment neutral axis, thus forming a corresponding plurality of beam segment neutral axes. The beam segment neutral axes are offset along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in the predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括基本上直的梁。光束具有光束长度和光束中点。梁包括具有梁段长度的多个梁段。每个光束段具有光束段中性轴线，从而形成相应的多个光束段中性轴线。光束段中性轴基于预定图案沿光束长度偏移。当束被加热装置加热时，光束弯曲。光束的弯曲又使光束中点在预定方向上平移或移动。光束中点运动依次运行附带的光波导开关。加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

5. 发明授权

US06983088B2 Thermal actuator and an optical waveguide switch including the same 失效
标题翻译：热致动器和包括其的光波导开关
公开(公告)号：US06983088B2
公开(公告)日：2006-01-03
申请号：US10634941
申请日：2003-08-05
申请人： Joel A. Kubby , Jun Ma , Kristine A. German , Peter M. Gulvin , Pinyen Lin
发明人： Joel A. Kubby , Jun Ma , Kristine A. German , Peter M. Gulvin , Pinyen Lin
IPC分类号： G02B6/26 , G02B6/42 , H01H37/00
CPC分类号： G02B6/3576 , B81B3/0018 , G02B6/3566 , G02B6/3584
摘要： A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。每个光束的中点附加或耦合到正交耦合光束。每个阵列光束具有具有对应的光束加热参数值的光束加热参数。光束加热参数值基于预定图案在波束阵列上变化。当束被加热装置加热时，光束阵列中光束温度的分布变得不对称，从而使光束阵列发生弯曲。光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。耦合光束运动反过来操作包括的光波导开关。光束阵列中的光束通过焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种加热。

6. 发明授权

US06968100B2 MEMS waveguide shuttle optical latching switch 失效
标题翻译： MEMS波导穿梭光闭锁开关
公开(公告)号：US06968100B2
公开(公告)日：2005-11-22
申请号：US10712200
申请日：2003-11-12
申请人： Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
发明人： Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
IPC分类号： G02B26/02 , B81B3/00 , G02B6/12 , G02B6/35 , G02B6/26 , G02B6/42
CPC分类号： G02B6/3508 , G02B6/356 , G02B6/358 , G02B2006/12145
摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.
摘要翻译：公开了一种光学微机电系统（MEMS）开关。在优选实施例中，光学MEMS开关用作MxN光信号交换系统。光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

7. 发明授权

US06985650B2 Thermal actuator and an optical waveguide switch including the same 失效
标题翻译：热致动器和包括其的光波导开关
公开(公告)号：US06985650B2
公开(公告)日：2006-01-10
申请号：US10772564
申请日：2004-02-05
申请人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
发明人： Jun Ma , Joel A. Kubby , Kristine A. German , Peter M. Gulvin , Pinyen Lin
IPC分类号： G02B6/26 , G02B6/42 , H01H37/00
CPC分类号： B81B3/0018 , G02B6/3566 , G02B6/3576 , G02B6/3584
摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments. Each beam segment has a beam segment width, the beam thus forming a corresponding plurality of beam segment widths. The beam segment widths vary along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in a predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.
摘要翻译：热致动器包括基本上直的梁。光束具有光束长度和光束中点。梁包括多个梁段。每个光束段具有光束段宽度，因此光束形成相应的多个光束段宽度。光束段宽度基于预定图案沿着光束长度变化。当束被加热装置加热时，光束弯曲。光束的弯曲又使光束中点在预定方向上平移或移动。光束中点运动依次运行附带的光波导开关。加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

8. 发明授权

US06947624B2 MEMS optical latching switch 失效
标题翻译： MEMS光锁定开关
公开(公告)号：US06947624B2
公开(公告)日：2005-09-20
申请号：US10712203
申请日：2003-11-12
申请人： Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
发明人： Joel A. Kubby , Kathleen A. Feinberg , Kristine A. German , Peter M. Gulvin , Jun Ma , Pinyen Lin
IPC分类号： G02B6/12 , G02B6/35 , G02B6/26 , G02B6/42
CPC分类号： G02B6/358 , G02B6/3508 , G02B6/3566 , G02B6/3576 , G02B6/3584 , G02B6/3594 , G02B2006/12145
摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.
摘要翻译：公开了一种光学微机电系统（MEMS）开关。在优选实施例中，光学MEMS开关用作MxN光信号交换系统。光学MEMS开关包括形成在悬臂梁平台上的多个光波导，用于切换光学状态，其中光开关的状态由驱动和闩锁致动器的系统改变。光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。在使用中，光学MEMS器件可以与其他光学部件集成以形成平面光电路（PLC）。当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

9. 发明授权

US07116880B1 Decreased crosstalk in adjacent photonic waveguides 有权
标题翻译：相邻光子波导中的串扰减少
公开(公告)号：US07116880B1
公开(公告)日：2006-10-03
申请号：US11170869
申请日：2005-06-30
申请人： Xueyuan Liu , Yao Rong Wang , Kristine A. German , Peter M. Gulvin
发明人： Xueyuan Liu , Yao Rong Wang , Kristine A. German , Peter M. Gulvin
IPC分类号： G02B6/10
CPC分类号： G02B6/2813 , G02B6/122
摘要： First and second ridge type photonic waveguides are provided. Each of the waveguides includes a core layer and a reflective cladding layer in continuous contact with a first side of a core layer. The core layer has a core index of the refraction and is formed in a ridge in a dimension and shape to impose lateral confinement. The reflective cladding layer has an index of refraction that is substantially different than the core index of refraction. An inter-waveguide slab portion is provided between the first and second waveguides. A substrate supports the first and second waveguides, the slab portion, and the reflective cladding layer. A light interceptor region is provided to hinder a transfer of photons between the first and second waveguides through the inter-waveguides slab portion. The light interceptor region may include a trench region, which is an air gap in one embodiment.
摘要翻译：提供第一和第二脊型光子波导。每个波导包括与芯层的第一侧连续接触的芯层和反射包层。芯层具有折射率的芯指数，并且形成为具有尺寸和形状的脊，以施加横向约束。反射包层具有与芯折射率基本上不同的折射率。在第一和第二波导之间设置有波导管间的部分。基板支撑第一和第二波导，平板部分和反射包层。提供光拦截器区域以阻止通过所述波导板间部分在第一和第二波导之间的光子的转移。光拦截区域可以包括沟槽区域，其在一个实施例中是气隙。

10. 发明授权

US06828887B2 Bistable microelectromechanical system based structures, systems and methods 失效
标题翻译：双稳态微机电系统的结构，系统和方法
公开(公告)号：US06828887B2
公开(公告)日：2004-12-07
申请号：US10063762
申请日：2002-05-10
申请人： Joel A. Kubby , Fuqian Yang , Jun Ma , Kristine A. German , Peter M. Gulvin
发明人： Joel A. Kubby , Fuqian Yang , Jun Ma , Kristine A. German , Peter M. Gulvin
IPC分类号： H01H5122
CPC分类号： G02B6/3508 , B81B3/0054 , B81B2201/032 , G02B6/3546 , G02B6/3568 , G02B6/3582 , G02B6/3596 , H01H2001/0042
摘要： A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.
摘要翻译：基于双稳态微机电系统（MEMS）的系统包括具有第一稳定状态的微加工梁，其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。弯曲形状可以包括简单曲线或复合曲线。在实施例中，梁的边界条件是固定的边界条件，轴承边界条件，弹簧边界条件或其组合。系统还可以包括致动器，其被布置成在第一和第二稳定状态之间移动梁，以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。致动器可以包括热致动器，静电致动器，压电致动器和磁致动器中的一个。致动器还可以包括热冲击致动器或拉链静电致动器。

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