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    • 3. 发明授权
    • Cantilever beam MEMS variable optical attenuator
    • 悬臂梁MEMS可变光衰减器
    • US07242825B2
    • 2007-07-10
    • US11010769
    • 2004-12-13
    • Pinyen LinYao Rong WangJun MaXueyuan LiuPeter M. GulvinKristine A. GermanJoel A. Kubby
    • Pinyen LinYao Rong WangJun MaXueyuan LiuPeter M. GulvinKristine A. GermanJoel A. Kubby
    • G02B6/35
    • G02B6/3508G02B6/266G02B6/3566G02B6/357G02B6/358G02B6/3594G02B6/3596
    • An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
    • 改进的悬臂光束开关设计,提供可变光衰减器(VOA)的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准,可以实现单个设备,其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。
    • 4. 发明授权
    • Decreased crosstalk in adjacent photonic waveguides
    • 相邻光子波导中的串扰减少
    • US07116880B1
    • 2006-10-03
    • US11170869
    • 2005-06-30
    • Xueyuan LiuYao Rong WangKristine A. GermanPeter M. Gulvin
    • Xueyuan LiuYao Rong WangKristine A. GermanPeter M. Gulvin
    • G02B6/10
    • G02B6/2813G02B6/122
    • First and second ridge type photonic waveguides are provided. Each of the waveguides includes a core layer and a reflective cladding layer in continuous contact with a first side of a core layer. The core layer has a core index of the refraction and is formed in a ridge in a dimension and shape to impose lateral confinement. The reflective cladding layer has an index of refraction that is substantially different than the core index of refraction. An inter-waveguide slab portion is provided between the first and second waveguides. A substrate supports the first and second waveguides, the slab portion, and the reflective cladding layer. A light interceptor region is provided to hinder a transfer of photons between the first and second waveguides through the inter-waveguides slab portion. The light interceptor region may include a trench region, which is an air gap in one embodiment.
    • 提供第一和第二脊型光子波导。 每个波导包括与芯层的第一侧连续接触的芯层和反射包层。 芯层具有折射率的芯指数,并且形成为具有尺寸和形状的脊,以施加横向约束。 反射包层具有与芯折射率基本上不同的折射率。 在第一和第二波导之间设置有波导管间的部分。 基板支撑第一和第二波导,平板部分和反射包层。 提供光拦截器区域以阻止通过所述波导板间部分在第一和第二波导之间的光子的转移。 光拦截区域可以包括沟槽区域,其在一个实施例中是气隙。
    • 5. 发明申请
    • Cantilever beam MEMS variable optical attenuator
    • 悬臂梁MEMS可变光衰减器
    • US20060127029A1
    • 2006-06-15
    • US11010769
    • 2004-12-13
    • Pinyen LinYao WangJun MaXueyuan LiuPeter GulvinKristine GermanJoel Kubby
    • Pinyen LinYao WangJun MaXueyuan LiuPeter GulvinKristine GermanJoel Kubby
    • G02B6/00
    • G02B6/3508G02B6/266G02B6/3566G02B6/357G02B6/358G02B6/3594G02B6/3596
    • An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
    • 改进的悬臂光束开关设计,提供可变光衰减器(VOA)的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准,可以实现单个设备,其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。