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    • 1. 发明申请
    • Gan semiconductor device
    • 甘半导体器件
    • US20060097278A1
    • 2006-05-11
    • US10517877
    • 2003-06-19
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • H01L33/00
    • H01S5/0207H01S5/0014H01S5/0422H01S5/2201H01S5/32341
    • Provided is a GaN-based semiconductor light emitting device formed on a GaN single-crystal substrate and having a configuration capable of reducing a current leak. A GaN-based semiconductor laser device (50) is disclosed as an example of the GaN-based semiconductor light emitting device, and it is a semiconductor laser device having a structure such that a p-side electrode and an n-side electrode are provided on a multilayer structure of GaN-based compound semiconductor layers. The GaN-based semiconductor laser device (50) is similar in configuration to a conventional GaN-based semiconductor laser device formed on a sapphire substrate except that a GaN single-crystal substrate (52) is used in place of the sapphire substrate and that the multilayer structure is directly formed on the GaN single-crystal substrate (52) without providing a GaN-ELO structure layer. The GaN single-crystal substrate (52) has continuous belt-shaped core portions (52a) each having a width of 10 μm. These core portions (52a) are spaced apart from each other by a distance of about 400 μm. A laser stripe (30), a pad metal (37) for the p-side electrode (36), and the n-side electrode (38) are provided on the multilayer structure in a region except the core portions (52a) of the GaN single-crystal substrate (52). The horizontal distance Sp between the pad metal (37) and the core portion (52a) adjacent thereto is 95 μm, and the horizontal distance Sn between the n-side electrode (38) and the core portion (52a) adjacent thereto is also 95 μm.
    • 提供了一种形成在GaN单晶衬底上并具有能够减少电流泄漏的构造的GaN基半导体发光器件。 作为GaN系半导体发光元件的一例,公开了GaN系半导体激光元件(50),是具有p侧电极和n侧电极的结构的半导体激光元件 在GaN基化合物半导体层的多层结构上。 GaN基半导体激光器件(50)的结构与形成在蓝宝石衬底上的常规GaN基半导体激光器器件相似,除了使用GaN单晶衬底(52)代替蓝宝石衬底,并且 多层结构直接形成在GaN单晶衬底(52)上,而不提供GaN-ELO结构层。 GaN单晶衬底(52)具有宽度为10μm的连续的带状芯部(52a)。 这些芯部分(52a)彼此隔开约400μm的距离。 激光条纹(30),用于p侧电极(36)的焊盘金属(37)和n侧电极(38)设置在除了芯部(52a)的芯部 GaN单晶衬底(52)。 焊垫金属(37)与与其相邻的芯部(52a)之间的水平距离Sp为95μm,n侧电极(38)与与其相邻的芯部(52a)之间的水平距离Sn为 也是95妈妈。
    • 2. 发明授权
    • Gan semiconductor device
    • 甘半导体器件
    • US07372080B2
    • 2008-05-13
    • US10517877
    • 2003-06-19
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • H01L29/22H01L33/00
    • H01S5/0207H01S5/0014H01S5/0422H01S5/2201H01S5/32341
    • Provided is a GaN-based semiconductor light emitting device formed on a GaN single-crystal substrate and having a configuration capable of reducing a current leak.A GaN-based semiconductor laser device (50) is disclosed as an example of the GaN-based semiconductor light emitting device, and it is a semiconductor laser device having a structure such that a p-side electrode and an n-side electrode are provided on a multilayer structure of GaN-based compound semiconductor layers. The GaN-based semiconductor laser device (50) is similar in configuration to a conventional GaN-based semiconductor laser device formed on a sapphire substrate except that a GaN single-crystal substrate (52) is used in place of the sapphire substrate and that the multilayer structure is directly formed on the GaN single-crystal substrate (52) without providing a GaN-ELO structure layer. The GaN single-crystal substrate (52) has continuous belt-shaped core portions (52a) each having a width of 10 μm. These core portions (52a) are spaced apart from each other by a distance of about 400 μm. A laser stripe (30), a pad metal (37) for the p-side electrode (36), and the n-side electrode (38) are provided on the multilayer structure in a region except the core portions (52a) of the GaN single-crystal substrate (52). The horizontal distance Sp between the pad metal (37) and the core portion (52a) adjacent thereto is 95 μm, and the horizontal distance Sn between the n-side electrode (38) and the core portion (52a) adjacent thereto is also 95 μm.
    • 提供了一种形成在GaN单晶衬底上并具有能够减少电流泄漏的构造的GaN基半导体发光器件。 作为GaN系半导体发光元件的一例,公开了GaN系半导体激光元件(50),是具有p侧电极和n侧电极的结构的半导体激光元件 在GaN基化合物半导体层的多层结构上。 GaN基半导体激光器件(50)的结构与形成在蓝宝石衬底上的常规GaN基半导体激光器器件相似,除了使用GaN单晶衬底(52)代替蓝宝石衬底,并且 多层结构直接形成在GaN单晶衬底(52)上,而不提供GaN-ELO结构层。 GaN单晶衬底(52)具有宽度为10μm的连续的带状芯部(52a)。 这些芯部分(52a)彼此隔开约400μm的距离。 激光条纹(30),用于p侧电极(36)的焊盘金属(37)和n侧电极(38)设置在除了芯部(52a)的芯部 GaN单晶衬底(52)。 焊垫金属(37)与与其相邻的芯部(52a)之间的水平距离Sp为95μm,n侧电极(38)与与其相邻的芯部(52a)之间的水平距离Sn为 也是95妈妈。
    • 7. 发明授权
    • Multi-beam semiconductor laser element
    • 多光束半导体激光元件
    • US06950451B2
    • 2005-09-27
    • US10480568
    • 2002-06-14
    • Tsuyoshi TojoTomonori HinoOsamu GotoYoshifumi YabukiShinichi AnsaiShiro UchidaMasao Ikeda
    • Tsuyoshi TojoTomonori HinoOsamu GotoYoshifumi YabukiShinichi AnsaiShiro UchidaMasao Ikeda
    • H01L21/205H01S5/042H01S5/22H01S5/323H01S5/40H01S3/10H01S3/082H01S3/14H01S5/00
    • H01S5/4031H01S5/0425H01S5/32341H01S5/4087
    • A multi-beam semiconductor laser device capable of emitting respective laser beams with uniform optical output levels and enabling easy alignment is provided. This multi-beam semiconductor laser device (40) is a GaN base multi-beam semiconductor laser device provided with four laser stripes (42A, 42B, 42C and 42D) which are capable of emitting laser beams with the same wavelength. The respective laser oscillating regions (42A to 42D) are provided with a p-type common electrode (48) on a mesa structure (46) which is formed on a sapphire substrate (44), and have active regions (50A, 50B, 50C and 50D) respectively. Two n-type electrodes (52A and 52B) are provided on an n-type GaN contact layer (54) and located as common electrodes opposite to the p-type common electrode (48) on both sides of the mesa structure (46). The distance A between the laser stripe (42A) and the laser stripe (42D) is no larger than 100 μm. The distance B1 between the laser stripe (42A) and the n-type electrode (52B) is no larger than 150 μm while the distance B2 between the laser stripe (42D) and the n-type electrode (52A) is no larger than 150 μm.
    • 提供能够发射具有均匀光输出水平的各激光束并且能够容易对准的多光束半导体激光器装置。 该多光束半导体激光器件(40)是具有能够发射具有相同波长的激光束的四个激光条纹(42A,42B,42C和42D)的GaN基多光束半导体激光器件。 相应的激光振荡区域(42A至42D)在形成在蓝宝石衬底(44)上的台面结构(46)上设置有p型公共电极(48),并具有活性区域(50A, 50B,50C和50D)。 在n型GaN接触层(54)上设置两个n型电极(52A和52B),并且位于与台面结构(46)的两侧的p型公共电极(48)相对的公共电极 )。 激光条纹(42A)与激光条纹(42D)之间的距离A不大于100μm。 激光条纹(42A)和n型电极(52B)之间的距离B 1 <1>不大于150μm,而激光之间的距离B 2 <2> 条纹(42D)和n型电极(52A)不大于150μm。