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    • 1. 发明授权
    • Gan semiconductor device
    • 甘半导体器件
    • US07372080B2
    • 2008-05-13
    • US10517877
    • 2003-06-19
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • H01L29/22H01L33/00
    • H01S5/0207H01S5/0014H01S5/0422H01S5/2201H01S5/32341
    • Provided is a GaN-based semiconductor light emitting device formed on a GaN single-crystal substrate and having a configuration capable of reducing a current leak.A GaN-based semiconductor laser device (50) is disclosed as an example of the GaN-based semiconductor light emitting device, and it is a semiconductor laser device having a structure such that a p-side electrode and an n-side electrode are provided on a multilayer structure of GaN-based compound semiconductor layers. The GaN-based semiconductor laser device (50) is similar in configuration to a conventional GaN-based semiconductor laser device formed on a sapphire substrate except that a GaN single-crystal substrate (52) is used in place of the sapphire substrate and that the multilayer structure is directly formed on the GaN single-crystal substrate (52) without providing a GaN-ELO structure layer. The GaN single-crystal substrate (52) has continuous belt-shaped core portions (52a) each having a width of 10 μm. These core portions (52a) are spaced apart from each other by a distance of about 400 μm. A laser stripe (30), a pad metal (37) for the p-side electrode (36), and the n-side electrode (38) are provided on the multilayer structure in a region except the core portions (52a) of the GaN single-crystal substrate (52). The horizontal distance Sp between the pad metal (37) and the core portion (52a) adjacent thereto is 95 μm, and the horizontal distance Sn between the n-side electrode (38) and the core portion (52a) adjacent thereto is also 95 μm.
    • 提供了一种形成在GaN单晶衬底上并具有能够减少电流泄漏的构造的GaN基半导体发光器件。 作为GaN系半导体发光元件的一例,公开了GaN系半导体激光元件(50),是具有p侧电极和n侧电极的结构的半导体激光元件 在GaN基化合物半导体层的多层结构上。 GaN基半导体激光器件(50)的结构与形成在蓝宝石衬底上的常规GaN基半导体激光器器件相似,除了使用GaN单晶衬底(52)代替蓝宝石衬底,并且 多层结构直接形成在GaN单晶衬底(52)上,而不提供GaN-ELO结构层。 GaN单晶衬底(52)具有宽度为10μm的连续的带状芯部(52a)。 这些芯部分(52a)彼此隔开约400μm的距离。 激光条纹(30),用于p侧电极(36)的焊盘金属(37)和n侧电极(38)设置在除了芯部(52a)的芯部 GaN单晶衬底(52)。 焊垫金属(37)与与其相邻的芯部(52a)之间的水平距离Sp为95μm,n侧电极(38)与与其相邻的芯部(52a)之间的水平距离Sn为 也是95妈妈。
    • 2. 发明申请
    • Gan semiconductor device
    • 甘半导体器件
    • US20060097278A1
    • 2006-05-11
    • US10517877
    • 2003-06-19
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • Osamu GotoOsamu MatsumotoTomomi SasakiMasao Ikeda
    • H01L33/00
    • H01S5/0207H01S5/0014H01S5/0422H01S5/2201H01S5/32341
    • Provided is a GaN-based semiconductor light emitting device formed on a GaN single-crystal substrate and having a configuration capable of reducing a current leak. A GaN-based semiconductor laser device (50) is disclosed as an example of the GaN-based semiconductor light emitting device, and it is a semiconductor laser device having a structure such that a p-side electrode and an n-side electrode are provided on a multilayer structure of GaN-based compound semiconductor layers. The GaN-based semiconductor laser device (50) is similar in configuration to a conventional GaN-based semiconductor laser device formed on a sapphire substrate except that a GaN single-crystal substrate (52) is used in place of the sapphire substrate and that the multilayer structure is directly formed on the GaN single-crystal substrate (52) without providing a GaN-ELO structure layer. The GaN single-crystal substrate (52) has continuous belt-shaped core portions (52a) each having a width of 10 μm. These core portions (52a) are spaced apart from each other by a distance of about 400 μm. A laser stripe (30), a pad metal (37) for the p-side electrode (36), and the n-side electrode (38) are provided on the multilayer structure in a region except the core portions (52a) of the GaN single-crystal substrate (52). The horizontal distance Sp between the pad metal (37) and the core portion (52a) adjacent thereto is 95 μm, and the horizontal distance Sn between the n-side electrode (38) and the core portion (52a) adjacent thereto is also 95 μm.
    • 提供了一种形成在GaN单晶衬底上并具有能够减少电流泄漏的构造的GaN基半导体发光器件。 作为GaN系半导体发光元件的一例,公开了GaN系半导体激光元件(50),是具有p侧电极和n侧电极的结构的半导体激光元件 在GaN基化合物半导体层的多层结构上。 GaN基半导体激光器件(50)的结构与形成在蓝宝石衬底上的常规GaN基半导体激光器器件相似,除了使用GaN单晶衬底(52)代替蓝宝石衬底,并且 多层结构直接形成在GaN单晶衬底(52)上,而不提供GaN-ELO结构层。 GaN单晶衬底(52)具有宽度为10μm的连续的带状芯部(52a)。 这些芯部分(52a)彼此隔开约400μm的距离。 激光条纹(30),用于p侧电极(36)的焊盘金属(37)和n侧电极(38)设置在除了芯部(52a)的芯部 GaN单晶衬底(52)。 焊垫金属(37)与与其相邻的芯部(52a)之间的水平距离Sp为95μm,n侧电极(38)与与其相邻的芯部(52a)之间的水平距离Sn为 也是95妈妈。