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    • 8. 发明授权
    • Solid-state image pickup device and method for manufacturing such device
    • 固体摄像装置及其制造方法
    • US5483090A
    • 1996-01-09
    • US225004
    • 1994-04-07
    • Isaya KitamuraYoshiki NakamuraMasakazu InamiYoshihiro Okada
    • Isaya KitamuraYoshiki NakamuraMasakazu InamiYoshihiro Okada
    • H01L27/148H01L29/423H01L29/768
    • H01L29/42396H01L27/14831
    • A plurality of channel separting regions are formed on a substrate with a space therebetween to segment an channel region. A first insulating layer is formed on the substrate, and a polycrystalline silicon layer is formed thereon and is then subject to patterning so as to provide a plurality of first transfer electrodes in the direction crossing the channel separating region. A second insulating layer is formed on the first transfer electrode and on the substrate having been exposed by the patterning, and a second transfer electrodes are formed at a position between the first transfer electrodes on the second insulating layer. By setting the thickness of each transfer electrodes and the each insulating layer to a predetermined value, the interference of the visible light is controlled, and the transparency rate of the visible light is improved. Further, by increasing the thickness of the transfer electrode at regions other than the light-receiving region, the contact with the electrode is improved, and the operation at regions other than the light-receiving region is improved.
    • 在基板上形成多个通道分离区域,其间具有间隔以分割通道区域。 在基板上形成第一绝缘层,在其上形成多晶硅层,然后进行图案化,以便在与沟道分离区域交叉的方向上提供多个第一传输电极。 在第一传输电极上形成第二绝缘层,并且在通过图案化曝光的基板上形成第二绝缘层,并且在第二绝缘层上的第一传输电极之间的位置处形成第二传输电极。 通过将每个转印电极和每个绝缘层的厚度设定为预定值,可以控制可见光的干涉,提高可见光的透过率。 此外,通过增加转印电极在光接收区域以外的区域的厚度,可以提高与电极的接触,提高了光接收区域以外的区域的动作。