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    • 2. 发明授权
    • Quadrupole mass spectrometer
    • 四极质谱仪
    • US08410436B2
    • 2013-04-02
    • US12952104
    • 2010-11-22
    • Kazuo MukaibatakeShigenobu NakanoMinoru Fujimoto
    • Kazuo MukaibatakeShigenobu NakanoMinoru Fujimoto
    • B01D59/44
    • H01J49/429H01J49/4215
    • In a scan measurement in which a mass scan is repeated across a predetermined mass range, when a voltage is returned from a termination voltage of one scan to an initiation voltage for the next scan, an undershoot or other drawbacks occur to destabilize the voltage value. Therefore, an appropriate waiting time is required. Conventionally, this waiting time has been set to be constant regardless of the analysis conditions. On the other hand, in the quadrupole mass spectrometer according to the present invention, the mass difference ΔM between the scan termination mass and the scan initiation mass is computed based on the specified mass range, and a different settling time is set in accordance with this mass difference. When the mass difference ΔM is small and hence requires only a short voltage stabilization time, a relatively short settling time is set. This shortens the cycle period of the mass scan, which increases the temporal resolution.
    • 在其中质量扫描在预定质量范围内重复的扫描测量中,当电压从一次扫描的终止电压返回到下次扫描的起始电压时,会发生下冲或其他缺点,以使电压值不稳定。 因此,需要适当的等待时间。 通常,无论分析条件如何,该等待时间都被设定为恒定。 另一方面,在本发明的四极质谱仪中,基于指定的质量范围计算扫描终止质量和扫描开始质量之间的质量差Dgr·M,并且根据规定的质量差设定不同的建立时间 有这个质量差异。 当质量差Dgr; M小时,因此仅需要短的电压稳定时间,则设定相对较短的建立时间。 这缩短了质量扫描的循环周期,这增加了时间分辨率。
    • 4. 发明授权
    • Laser Marking apparatus
    • 激光打标机
    • US5260542A
    • 1993-11-09
    • US800262
    • 1991-11-29
    • Kouji IshiguroMinoru FujimotoKiyoshi OkumuraKiyoshi SaitoKouji KuwabaraMakoto YanoHiroo Ohkawa
    • Kouji IshiguroMinoru FujimotoKiyoshi OkumuraKiyoshi SaitoKouji KuwabaraMakoto YanoHiroo Ohkawa
    • B23K26/06B23K26/00
    • B23K26/066
    • A laser marking apparatus comprises a pulse laser oscillator which emits a linearly polarized laser beam; a transmission type liquid crystal mask which displays a pattern to be marked on an article in one of a positive pattern display mode and a negative pattern display mode by dots arranged in a matrix form and which allows to pass the emitted laser beam but differentiates the polarization plane of the laser beam which has passed through masked portions from that through unmasked portions; a polarized beam splitter disposed downstream the transmission type liquid crystal mask for selectivity passing the laser beam to be irradiated on the article to be marked from the transmission type liquid crystal mask; a TV camera for detecting a discriminator indicating the thermal conductivity of the article to be marked; a recognition unit which determines the thermal conductivity of the article to be marked based upon the detected discriminator; and a control unit which controls the transmission type liquid crystal mask to operate in one of the positive pattern display mode and the negative pattern display mode based upon the determined thermal conductivity of the article to be marked in such a manner that when the determined thermal conductivity of the article to be marked is low, the positive pattern display mode is selected and when the determined thermal conductivity of the article to be marked is high, the negative pattern display mode is selected.
    • 一种激光打标装置,包括:发射线偏振激光束的脉冲激光振荡器; 透射型液晶掩模,以正方形显示模式和负型图形显示模式中的一种以矩阵形式显示以商品形式标记的图案,并且允许通过发射的激光束,但是使偏振 通过未屏蔽部分穿过掩模部分的激光束的平面; 偏振光束分离器,其设置在透射型液晶掩模的下游,用于选择性地将待照射的激光束从透射型液晶掩模上传送到要标记的物品上; 用于检测指示要标记的物品的热导率的鉴别器的电视摄像机; 识别单元,其基于检测到的鉴别器确定待标记物品的导热性; 以及控制单元,其基于所确定的要标记的制品的热导率,控制透射型液晶掩模以正图案显示模式和负图案显示模式之一进行操作,使得当确定的热导率 要标记的物品低,选择正型显示模式,并且当待标记的物品的确定的热导率高时,选择负图案显示模式。
    • 8. 发明授权
    • Quadrupole mass spectrometer with quadrupole mass filter as a mass separator
    • 具有四极质量过滤器的四极质谱仪作为质量分离器
    • US09548193B2
    • 2017-01-17
    • US12994019
    • 2008-05-26
    • Kazuo MukaibatakeShigenobu NakanoMinoru Fujimoto
    • Kazuo MukaibatakeShigenobu NakanoMinoru Fujimoto
    • H01J49/00H01J49/42
    • H01J49/4215H01J49/429
    • In a scan measurement in which a mass scan is repeated across a predetermined mass range, when a voltage is returned from a termination voltage of one scan to an initiation voltage for the next scan, an undershoot or other drawbacks occur to destabilize the voltage value. Therefore, an appropriate waiting time is required. Conventionally, this waiting time has been set to be constant regardless of the analysis conditions. On the other hand, in the quadrupole mass spectrometer according to the present invention, the mass difference ΔM between the scan termination mass and the scan initiation mass is computed based on the specified mass range, and a different settling time is set in accordance with this mass difference. When the mass difference ΔM is small and hence requires only a short voltage stabilization time, a relatively short settling time is set. This shortens the cycle period of the mass scan, which increases the temporal resolution.
    • 在其中质量扫描在预定质量范围内重复的扫描测量中,当电压从一次扫描的终止电压返回到下次扫描的起始电压时,会发生下冲或其他缺点,以使电压值不稳定。 因此,需要适当的等待时间。 通常,无论分析条件如何,该等待时间都被设定为恒定。 另一方面,在本发明的四极质谱仪中,基于规定的质量范围来计算扫描终止质量和扫描开始质量之间的质量差ΔM,并根据该设定设定不同的建立时间 质量差异 当质量差ΔM小时,仅需要短的电压稳定时间时,设定较短的建立时间。 这缩短了质量扫描的循环周期,这增加了时间分辨率。
    • 10. 发明授权
    • Ion injection device and method therefor
    • 离子注入装置及其方法
    • US5753923A
    • 1998-05-19
    • US654601
    • 1996-05-29
    • Kazuo MeraIsao HashimotoYasuo YamashitaMinoru FujimotoKouji Ishiguro
    • Kazuo MeraIsao HashimotoYasuo YamashitaMinoru FujimotoKouji Ishiguro
    • C23C14/48H01J37/317H01L21/265
    • H01J37/3171H01J2237/20228
    • An ion injection device is provided which permits ion injection into a wafer with an optimum ion beam injection angle, and the ion injection device is characterized, by the provision of a wafer holding means for holding a wafer into which ion beam taken out from an ion source is implanted; a relative position varying means for varying the relative position between the wafer holding means and the ion beam within a plane substantially perpendicular to the direction of the ion beam; and an incidence angle varying means for varying an incidence angle of the ion beam on the surface of the wafer held on the wafer holding means. More specifically, the wafer holding means is a rotatable disk which holds a plurality of wafers on the circumference thereof, and the relative position varying means is constituted by a rotating means which causes the rotatable disk to rotate in a plane substantially perpendicular to the direction of the ion beam and by a rocking means for rocking the rotatable disk in a plane substantially perpendicular to the direction of the ion beam.
    • 提供一种离子注入装置,其允许以最佳离子束注入角将离子注入晶片,并且离子注入装置的特征在于,通过提供用于保持晶片的晶片保持装置,离子束从离子 源植入; 相对位置变化装置,用于在基本垂直于离子束方向的平面内改变晶片保持装置和离子束之间的相对位置; 以及用于改变保持在晶片保持装置上的晶片的表面上的离子束的入射角的入射角变化装置。 更具体地说,晶片保持装置是在圆周上保持多个晶片的可旋转盘,并且相对位置变化装置由旋转装置构成,该旋转装置使得可旋转盘在基本上垂直于 离子束和用于在基本上垂直于离子束的方向的平面中摆动可旋转盘的摆动装置。