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    • 3. 发明授权
    • Anodic bonding method and electronic device having anodic bonding structure
    • 阳极接合方法和具有阳极结合结构的电子器件
    • US07153758B2
    • 2006-12-26
    • US10786106
    • 2004-02-26
    • Shohei HataHideo SotokawaHiroaki Furuichi
    • Shohei HataHideo SotokawaHiroaki Furuichi
    • H01L21/326B32B37/00
    • H01L21/2007C03C27/00C03C27/02
    • In anodic bonding between a conductor or semiconductor and glass, in order to attain good adhesion at a lower bonding temperature than usual and improve the toughness at its boundary to obtain higher reliability for a bonded portion even in a case where bonded members are warped or dust is present at the bonding boundary, a soft metal film is formed on the surface of a conductor or semiconductor on which an active metal film having high reactivity with oxygen is formed, whereby a warp or dust, if any, can be absorbed by the deformation of the soft metal film, thereby to improve the adhesion at the boundary. Adhesion at the bonding boundary is improved even at a low bonding temperature of, e.g., about 200° C. Further, the toughness at the bonding boundary can be improved to increase reliability by roughening the bonded surface on the side of the glass.
    • 在导体或半导体与玻璃之间的阳极接合中,为了在比通常更低的接合温度下获得良好的粘附性,并且即使在接合部件翘曲或灰尘的情况下也能够提高其边界处的韧性以获得更高的接合部的可靠性 存在于接合边界处,在形成有与氧反应性高的活性金属膜的导体或半导体的表面上形成软金属膜,由此可以通过变形来吸收翘曲或灰尘(如果有的话) 的软金属膜,从而提高边界的粘附性。 即使在例如约200℃的低接合温度下,接合边界处的粘附性也得到改善。此外,通过使玻璃侧的接合面粗糙化,可以提高接合边界的韧性,提高可靠性。