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    • 5. 发明申请
    • OPTICAL SEMICONDUCTOR DEVICE
    • 光学半导体器件
    • US20090261441A1
    • 2009-10-22
    • US12400346
    • 2009-03-09
    • Hisatada YasukawaHironari TakeharaTakaki Iwai
    • Hisatada YasukawaHironari TakeharaTakaki Iwai
    • H01L31/02H01L31/112
    • H01L31/103G11B7/13G11B2007/0006
    • An optical semiconductor device includes a light-receiving element on a semiconductor substrate of a first conductivity type, the light-receiving element including a light-receiving portion for converting incident light to an electrical current signal and performing a current amplification. The light-receiving portion includes: a semiconductor layer formed on the semiconductor substrate and having an impurity concentration substantially equal to or less than that of the semiconductor substrate; a first semiconductor region of a second conductivity type formed on the semiconductor layer and having an impurity concentration higher than that of the semiconductor layer; and a second semiconductor region of the first conductivity type selectively formed between the semiconductor substrate and the semiconductor layer and having an impurity concentration higher than those of the semiconductor substrate and the semiconductor layer.
    • 光学半导体器件包括在第一导电类型的半导体衬底上的光接收元件,该光接收元件包括用于将入射光转换成电流信号并执行电流放大的光接收部分。 光接收部分包括:形成在半导体衬底上并具有基本上等于或小于半导体衬底的杂质浓度的杂质浓度的半导体层; 在所述半导体层上形成的杂质浓度高于所述半导体层的杂质浓度的第二导电类型的第一半导体区域; 以及第一导电类型的第二半导体区域,其选择性地形成在半导体衬底和半导体层之间,并且具有比半导体衬底和半导体层的杂质浓度更高的杂质浓度。