会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Bonding apparatus and bonding method
    • 接合装置和接合方法
    • US08434538B2
    • 2013-05-07
    • US13284434
    • 2011-10-28
    • Naoki AkiyamaMasahiko SugiyamaYosuke Omori
    • Naoki AkiyamaMasahiko SugiyamaYosuke Omori
    • B32B37/00
    • H01L21/67092
    • A bonding apparatus has an upper chuck and a lower chuck for holding wafers. The upper chuck is configured such that the center portion is bent to be convex when pressurized with a predetermined pressure. On the bottom surface of the lower chuck, there is an insulating ring formed of a combination of a plurality of insulating members to support the periphery of the lower chuck. The bottom surface of the insulating ring is supported by a support ring formed of a combination of a plurality of supporting members. The supporting members and the lower chuck are fixed by a bolt provided for each of the supporting members. The bolt is inserted through a through hole and a through hole which are formed in the insulating members and the supporting members, respectively, the through holes having a diameter larger than a diameter of the bolt.
    • 接合装置具有用于保持晶片的上卡盘和下卡盘。 上卡盘构造成使得当以预定压力加压时,中心部分弯曲成凸起。 在下卡盘的底表面上,存在由多个绝缘构件的组合形成的绝缘环,以支撑下卡盘的周边。 绝缘环的底表面由多个支撑构件的组合形成的支撑环支撑。 支撑构件和下卡盘通过为每个支撑构件设置的螺栓来固定。 螺栓穿过分别形成在绝缘构件和支撑构件中的通孔和通孔,直径大于螺栓直径的通孔。