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    • 4. 发明授权
    • Film forming apparatus, film forming method, and semiconductor device
    • 成膜装置,成膜方法和半导体装置
    • US08614500B2
    • 2013-12-24
    • US13048612
    • 2011-03-15
    • Tsuyoshi SatoHiroyasu KondoNaoaki SakuraiKatsuyuki SoedaKenichi OoshiroShuichi Kimura
    • Tsuyoshi SatoHiroyasu KondoNaoaki SakuraiKatsuyuki SoedaKenichi OoshiroShuichi Kimura
    • H01L23/58
    • H01L21/6715B05D1/005B05D3/0486G03F7/162H01L21/67253
    • According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.
    • 根据一个实施例,一种成膜装置包括载物台,涂布部分,蒸气供应部分,鼓风机部分和控制器。 在舞台上放置涂层目标。 涂布部分将材料施加到放置在载物台上的涂布靶上的预定区域上以形成涂膜。 蒸气供给部产生能够溶解涂膜的溶剂蒸气。 鼓风机部分将由蒸汽供应部分产生的溶剂蒸气吹到放置在载物台上的涂覆靶上的涂膜上。 控制器控制由鼓风机部分吹送的溶剂蒸气的量,使得涂膜溶解; 表面层侧的一部分涂膜的粘度比涂布目标侧的一部分的粘度低; 并且表面层侧的部分中的粘度和涂布目标侧的粘度取得防止涂布靶上的涂膜扩散的值。