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    • 4. 发明申请
    • ULTRASONIC CLEANING APPARATUS
    • 超声波清洗装置
    • US20090044844A1
    • 2009-02-19
    • US12248514
    • 2008-10-09
    • Naoaki SAKURAIHiroshi Fujita
    • Naoaki SAKURAIHiroshi Fujita
    • B08B13/00
    • H01L21/67051B08B3/12Y10S134/902
    • An ultrasonic cleaning apparatus which cleans a material at a surface by supplying an ultrasonic wave from an ultrasonic wave application head to a cleaning liquid on the surface, and cleans the surface, wherein the ultrasonic wave application head has an ultrasonic wave transmission member which is provided opposite the surface, and has a curved portion on a first plane placed close to the surface, an ultrasonic transducer which is provided on a second plane placed opposite the first plane of the ultrasonic wave transmission member, and generates and applies an ultrasonic wave to a cleaning liquid on the surface through the ultrasonic wave transmission member, and a preventive portion which is provided in the ultrasonic wave transmission member, and prevents the ultrasonic wave applied to the cleaning liquid and reflected on the surface from entering the ultrasonic transducer through the ultrasonic wave transmission member.
    • 一种超声波清洗装置,其通过从超声波施加头向表面上的清洗液提供超声波来清洗表面的材料,并且清洁表面,其中超声波施加头具有设置有超声波传递部件 在与表面相邻的第一平面上具有弯曲部分,设置在与超声波传播部件的第一平面相对的第二平面上的超声波换能器,并且产生并施加超声波到 通过超声波传递部件在表面上清洗液体,以及设置在超声波传递部件中的防止部,防止施加到清洗液上并在表面上反射的超声波通过超声波进入超声波换能器 传输部件。