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1. 发明授权

US06831390B2 Microelectromechanical system with stiff coupling 有权
公开(公告)号：US06831390B2
公开(公告)日：2004-12-14
申请号：US10099464
申请日：2002-03-14
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： G02B2608
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008
摘要： A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.

2. 发明授权

US06640023B2 Single chip optical cross connect 有权
公开(公告)号：US06640023B2
公开(公告)日：2003-10-28
申请号：US09966966
申请日：2001-09-27
申请人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
发明人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
IPC分类号： G02B635
CPC分类号： G02B6/3582 , B33Y80/00 , G02B6/32 , G02B6/3512 , G02B6/3556 , G02B6/357 , G02B6/358 , G02B6/3644 , G02B6/3672 , H04Q11/0005 , H04Q2011/003
摘要： The present invention provides a free space optical cross connect for switching optical signals between a plurality of optical signal ports to/from the switch interface. In one embodiment, a single chip 2N OXC (10) for switching optical signals (12) between any one of N input optical fibers (14) and any one of N output optical fibers (16) within a compact free space switch interface (18) includes N reflective microstructures (20) built/assembled on a substrate (30) and N positioning systems (40) associated with the reflective microstructures (20) that are also built/assembled on the substrate (30). The positioning systems (40) are operable to both elevate their associated reflective microstructures (20) from the surface of the substrate (30) and to tilt their associated reflective microstructures (20) with at least two degrees of freedom with respect to the surface of the substrate (30) in order to reflect optical signal (12) through the switch interface (18) from any one of the input optical fibers (14) to any one of the output optical fibers (16). The single chip 2N OXC (10) may also include a lid (62) overlying and spaced away from the substrate (30) to provide a hermetically sealed package (60).

3. 发明授权

US06864618B2 Method for operating a microelectromechanical system using a stiff coupling 有权
标题翻译：使用刚性联轴器操作微机电系统的方法
公开(公告)号：US06864618B2
公开(公告)日：2005-03-08
申请号：US10688024
申请日：2003-10-17
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： B81B3/00 , G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008
摘要： A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.
摘要翻译：公开了一种微机电系统，其使用致动器组件和杠杆之间的刚性系绳，其与适当的衬底互连，使得杆的第一端可相对于衬底移动，这取决于致动器组件的运动方向。任何适当的负载可以与杠杆互连，包括用于任何光学应用的反射镜。

4. 发明授权

US06847152B2 Microelectromechnical system for tilting a platform 有权
标题翻译：用于倾斜平台的微机电系统
公开(公告)号：US06847152B2
公开(公告)日：2005-01-25
申请号：US10697385
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： B81B3/00 , H02N1/00 , G02B26/08 , G02B26/10
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

5. 发明授权

US06774535B2 Micromechanical platform pivotal on a compliant member 有权
标题翻译：微机械平台在合规成员上枢转
公开(公告)号：US06774535B2
公开(公告)日：2004-08-10
申请号：US10697348
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B2608
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

6. 发明授权

US06731513B2 Shielded multi-conductor interconnect bus for MEMS 有权
标题翻译：用于MEMS的屏蔽多导体互连总线
公开(公告)号：US06731513B2
公开(公告)日：2004-05-04
申请号：US10099724
申请日：2002-03-15
申请人： Murray Steven Rodgers , Stephen Matthew Barnes
发明人： Murray Steven Rodgers , Stephen Matthew Barnes
IPC分类号： H05K702
CPC分类号： B81B7/0006 , G02B26/0841 , H01L23/147 , H01L23/49872 , H01L23/552 , H01L2924/0002 , H01L2924/00
摘要： A shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources or the like and a method of fabricating a shielded multi-conductor interconnect bus are disclosed. In one embodiment, a shielded interconnect bus formed on a substrate (20) includes a plurality of electrically conductive lines (42) arranged in sets of one, two or more conductive lines between electrically conductive shield walls (46, 66). The electrically conductive lines (42) are surrounded by layers of dielectric material (30, 50). An electrically conductive shield (78) overlies the electrically conductive lines (42) and electrically conductive shield walls (46, 66).
摘要翻译：公开了一种用于将MEM器件与控制信号源等互连的屏蔽多导体互连总线以及制造屏蔽多导体互连总线的方法。在一个实施例中，形成在衬底（20）上的屏蔽互连总线包括在导电屏蔽壁（46,66）之间布置成一组，两根或多根导电线的多个导电线（42）。导电线（42）被介电材料层（30,50）包围。导电屏蔽（78）覆盖在导电线（42）和导电屏蔽壁（46,66）之间。

7. 发明授权

US07055975B2 Microelectromechanical system with non-collinear force compensation 失效
公开(公告)号：US07055975B2
公开(公告)日：2006-06-06
申请号：US10097177
申请日：2002-03-12
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B7/182 , H02K5/00
CPC分类号： G02B7/182 , G02B26/0833 , G02B26/0841 , Y10S359/904
摘要： A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

8. 发明授权

US06747340B2 Multi-level shielded multi-conductor interconnect bus for MEMS 有权
标题翻译：用于MEMS的多层屏蔽多导体互连总线
公开(公告)号：US06747340B2
公开(公告)日：2004-06-08
申请号：US10099720
申请日：2002-03-15
申请人： Stephen Matthew Barnes , Samuel Lee Miller , Murray Steven Rodgers
发明人： Stephen Matthew Barnes , Samuel Lee Miller , Murray Steven Rodgers
IPC分类号： H01L23552
CPC分类号： H01L23/5225 , H01L2924/0002 , H01L2924/00
摘要： A multi-level shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources and a method of fabricating a multi-level shielded multi-conductor interconnect bus are disclosed. In one embodiment, a multi-level shielded interconnect bus (410A) formed on a substrate (20) includes first and second level electrically conductive lines (42, 92) arranged in sets of one, two or more conductive lines between first and second level electrically conductive shield walls (46, 66, 96). The first and second level electrically conductive lines (42, 92) are surrounded by various layers of dielectric material (30, 50, 80, 100). A first level electrically conductive shield (78) overlies the first level electrically conductive lines (42) and shield walls (46, 66). A second level electrically conductive shield (112) overlies the second level electrically conductive lines (92) and shield walls (96).
摘要翻译：公开了一种用于将MEM器件与控制信号源互连的多电平屏蔽多导体互连总线和制造多电平屏蔽多导体互连总线的方法。在一个实施例中，形成在衬底（20）上的多级屏蔽互连总线（410A）包括第一和第二级导电线（42,92），其布置成在第一和第二级之间的一条，两条或更多条导线导电屏蔽壁（46,66,96）。第一和第二级导电线（42,92）被各种介电材料层（30,50,80,100）包围。第一级导电屏蔽（78）覆盖在第一级导电线（42）和屏蔽壁（46,66）之间。第二级导电屏蔽（112）覆盖在第二级导电线（92）和屏蔽壁（96）上。

9. 发明授权

US06727436B2 Interconnect bus crossover for MEMS 有权
标题翻译：用于MEMS的互连总线交叉
公开(公告)号：US06727436B2
公开(公告)日：2004-04-27
申请号：US10098886
申请日：2002-03-15
申请人： Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： H05K103
CPC分类号： B81B7/0006 , H01L23/5225 , H01L2924/0002 , H01L2924/00
摘要： A shielded interconnect bus crossover useful in interconnecting MEM devices with control signal sources or the like and a method of fabricating such a shielded interconnect bus crossover are disclosed. In one embodiment, a shielded interconnect bus crossover (10) includes a plurality of base pads (44A-C) and a plurality of support columns (74) extending upward from the base pads (44A-C) through holes formed in an interconnect bus shield (78) overlying a plurality of interconnect bus lines (42). The support columns (74) support a two layer elevated crossing line (92/112) in a spaced relation above the interconnect bus shield (78). The two layer elevated crossing line (92/112) is oriented transverse to the direction of the interconnect bus lines (42) and is located within the perimeter of a two layer rectangular crossing line shield wall (96/116).
摘要翻译：公开了一种用于将MEM器件与控制信号源等互连有用的屏蔽互连总线交叉和制造这种屏蔽互连总线交叉的方法。在一个实施例中，屏蔽互连总线跨接器（10）包括多个基座（44A-C）和从基座（44A-C）向上延伸穿过形成在互连总线中的孔的多个支撑柱覆盖多个互连总线（42）的屏蔽（78）。支撑柱（74）在互连总线屏蔽（78）上方以间隔的关系支撑双层升高的交叉线（92/112）。两层升高的交叉线（92/112）横向于互连总线（42）的方向定向并且位于两层矩形交叉线屏蔽壁（96/116）的周边内。

10. 发明授权

US06665104B2 Mirror positioning assembly with vertical force component compensation 有权
标题翻译：具有垂直力分量补偿的镜面定位组件
公开(公告)号：US06665104B2
公开(公告)日：2003-12-16
申请号：US10097127
申请日：2002-03-12
申请人： Murray Steven Rodgers , Samuel Lee Miller , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Murray Steven Rodgers , Samuel Lee Miller , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B2608
CPC分类号： G02B26/08 , G02B26/0833 , G02B26/0841
摘要： A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.
摘要翻译：公开了一种微机电系统，其限制作用在第一负载上的力的方向，其中力源于第一负载和第二负载的相互作用。特别地，使作用在第一负载上的力的方向基本上与第一负载的运动平行。该力方向约束通过不包含摩擦或接触表面的力隔离器微结构实现。公开了使用力隔离器微结构来实现该力方向约束的结构/方法的各种实施例。

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