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1. 发明授权

US06864618B2 Method for operating a microelectromechanical system using a stiff coupling 有权
标题翻译：使用刚性联轴器操作微机电系统的方法
公开(公告)号：US06864618B2
公开(公告)日：2005-03-08
申请号：US10688024
申请日：2003-10-17
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： B81B3/00 , G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008
摘要： A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.
摘要翻译：公开了一种微机电系统，其使用致动器组件和杠杆之间的刚性系绳，其与适当的衬底互连，使得杆的第一端可相对于衬底移动，这取决于致动器组件的运动方向。任何适当的负载可以与杠杆互连，包括用于任何光学应用的反射镜。

2. 发明授权

US06831390B2 Microelectromechanical system with stiff coupling 有权
公开(公告)号：US06831390B2
公开(公告)日：2004-12-14
申请号：US10099464
申请日：2002-03-14
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： G02B2608
CPC分类号： G02B26/0841 , B81B3/0062 , H02N1/008
摘要： A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.

3. 发明授权

US06640023B2 Single chip optical cross connect 有权
公开(公告)号：US06640023B2
公开(公告)日：2003-10-28
申请号：US09966966
申请日：2001-09-27
申请人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
发明人： Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski
IPC分类号： G02B635
CPC分类号： G02B6/3582 , B33Y80/00 , G02B6/32 , G02B6/3512 , G02B6/3556 , G02B6/357 , G02B6/358 , G02B6/3644 , G02B6/3672 , H04Q11/0005 , H04Q2011/003
摘要： The present invention provides a free space optical cross connect for switching optical signals between a plurality of optical signal ports to/from the switch interface. In one embodiment, a single chip 2N OXC (10) for switching optical signals (12) between any one of N input optical fibers (14) and any one of N output optical fibers (16) within a compact free space switch interface (18) includes N reflective microstructures (20) built/assembled on a substrate (30) and N positioning systems (40) associated with the reflective microstructures (20) that are also built/assembled on the substrate (30). The positioning systems (40) are operable to both elevate their associated reflective microstructures (20) from the surface of the substrate (30) and to tilt their associated reflective microstructures (20) with at least two degrees of freedom with respect to the surface of the substrate (30) in order to reflect optical signal (12) through the switch interface (18) from any one of the input optical fibers (14) to any one of the output optical fibers (16). The single chip 2N OXC (10) may also include a lid (62) overlying and spaced away from the substrate (30) to provide a hermetically sealed package (60).

4. 发明授权

US06847152B2 Microelectromechnical system for tilting a platform 有权
标题翻译：用于倾斜平台的微机电系统
公开(公告)号：US06847152B2
公开(公告)日：2005-01-25
申请号：US10697385
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： B81B3/00 , H02N1/00 , G02B26/08 , G02B26/10
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

5. 发明授权

US06774535B2 Micromechanical platform pivotal on a compliant member 有权
标题翻译：微机械平台在合规成员上枢转
公开(公告)号：US06774535B2
公开(公告)日：2004-08-10
申请号：US10697348
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B2608
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

6. 发明授权

US06844657B2 Microelectromechanical system and method for producing displacement multiplication 有权
标题翻译：微机电系统和产生位移乘法的方法
公开(公告)号：US06844657B2
公开(公告)日：2005-01-18
申请号：US10099465
申请日：2002-03-14
申请人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
发明人： Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
IPC分类号： B81B3/00 , G02B26/08 , H02N1/00 , H02N2/00
CPC分类号： B81B3/0062 , G02B26/0841 , H02N1/008
摘要： A microelectromechanical system is disclosed that provides amplified movement without requiring the use of a displacement multiplier. Generally, a lever or the like is interconnected with a substrate on which the system is fabricated at a first location, while a free end of the lever is able to move relative to the substrate, typically at least generally about the first location. One or more actuators are movably interconnected with the substrate, and in turn are interconnected with the lever at a location that is somewhere between the free end and the first location. The lever may be configured to move at least generally away from the substrate upon movement of the actuator in one direction, at least generally toward the substrate upon movement of the actuator in another direction, or in any direction and in any manner. The movement of the “free” end of the lever may be used to perform any function, including lifting/pivoting a mirror away from/relative to the substrate.
摘要翻译：公开了一种微机电系统，其提供放大的运动而不需要使用位移乘法器。通常，杆或类似物与其上制造系统的基板在第一位置互连，而杠杆的自由端能够相对于基板移动，通常至少大体上围绕第一位置。一个或多个致动器可移动地与衬底互连，并且在与位于自由端和第一位置之间的位置处与杠杆互连。杠杆可构造成在致动器沿一个方向运动时至少大体上远离基板移动，至少在致动器沿另一个方向或任何方向和任何方向移动时至少大致朝向基板。杠杆的“自由”端的移动可以用于执行任何功能，包括使镜子远离/相对于基板提升/枢转。

7. 发明授权

US06841464B2 Multi-level shielded multi-conductor interconnect bus for MEMS 有权
标题翻译：用于MEMS的多层屏蔽多导体互连总线
公开(公告)号：US06841464B2
公开(公告)日：2005-01-11
申请号：US10426433
申请日：2003-04-30
申请人： Stephen Matthew Barnes , Samuel Lee Miller , Murray Steven Rodgers
发明人： Stephen Matthew Barnes , Samuel Lee Miller , Murray Steven Rodgers
IPC分类号： H01L23/522 , H01L21/4763
CPC分类号： H01L23/5225 , H01L2924/0002 , H01L2924/00
摘要： A multi-level shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources and a method of fabricating a multi-level shielded multi-conductor interconnect bus are disclosed. In one embodiment, a multi-level shielded interconnect bus (410A) formed on a substrate (20) includes first and second level electrically conductive lines (42, 92) arranged in sets of one, two or more conductive lines between first and second level electrically conductive shield walls (46, 66, 96). The first and second level electrically conductive lines (42, 92) are surrounded by various layers of dielectric material (30, 50, 80, 100). A first level electrically conductive shield (78) overlies the first level electrically conductive lines (42) and shield walls (46, 66). A second level electrically conductive shield (112) overlies the second level electrically conductive lines (92) and shield walls (96).
摘要翻译：公开了一种用于将MEM器件与控制信号源互连的多电平屏蔽多导体互连总线和制造多电平屏蔽多导体互连总线的方法。在一个实施例中，形成在衬底（20）上的多级屏蔽互连总线（410A）包括第一和第二级导电线（42,92），其布置成在第一和第二级之间的一条，两条或更多条导线导电屏蔽壁（46,66,96）。第一和第二级导电线（42,92）被各种介电材料层（30,50,80,100）包围。第一级导电屏蔽（78）覆盖在第一级导电线（42）和屏蔽壁（46,66）之间。第二级导电屏蔽（112）覆盖在第二级导电线（92）和屏蔽壁（96）上。

8. 发明授权

US06831391B2 Microelectromechanical system for tilting a platform 有权
标题翻译：用于倾斜平台的微机电系统
公开(公告)号：US06831391B2
公开(公告)日：2004-12-14
申请号：US10697386
申请日：2003-10-30
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： H02N100
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从衬底（12）的表面上升，所以可以相对于衬底（12）以大的角度倾斜。

9. 发明授权

US06794793B2 Microelectromechnical system for tilting a platform 有权
标题翻译：用于倾斜平台的微机电系统
公开(公告)号：US06794793B2
公开(公告)日：2004-09-21
申请号：US09966963
申请日：2001-09-27
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： H02N100
CPC分类号： B81B3/0062 , B33Y80/00 , H02N1/006 , H02N1/008
摘要： The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).
摘要翻译：本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高，。在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于通过相等或不相等的角度量到基板（12）。在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

10. 发明授权

US07055975B2 Microelectromechanical system with non-collinear force compensation 失效
公开(公告)号：US07055975B2
公开(公告)日：2006-06-06
申请号：US10097177
申请日：2002-03-12
申请人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
发明人： Samuel Lee Miller , Murray Steven Rodgers , Stephen Matthew Barnes , Jeffry Joseph Sniegowski , Paul Jackson McWhorter
IPC分类号： G02B7/182 , H02K5/00
CPC分类号： G02B7/182 , G02B26/0833 , G02B26/0841 , Y10S359/904
摘要： A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

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