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    • 4. 发明授权
    • Photoelectric device and method of producing the same
    • 光电器件及其制造方法
    • US4394749A
    • 1983-07-19
    • US154999
    • 1980-05-30
    • Toshihisa TsukadaYukio TakasakiTadaaki HiraiToru BajiHideaki YamamotoYasuo TanakaEiichi MaruyamaSachio Ishioka
    • Toshihisa TsukadaYukio TakasakiTadaaki HiraiToru BajiHideaki YamamotoYasuo TanakaEiichi MaruyamaSachio Ishioka
    • H01L27/146G11C13/00
    • H01L27/14665
    • A photoelectric device having at least a predetermined impurity region which is disposed in a semiconductor substrate, and a photoelectric conversion portion which is constructed by stacking an electrode layer lying in contact with at least a part of the impurity region, a photoconductive material layer overlying the electrode layer, and a transparent electrode overlying the photoconductive material layer, characterized in that the photoconductive material layer is made of an amorphous chalcogenide material which principally contains Se, is disclosed. It is very favorable that the photoelectric conversion material layer made of the amorphous material principally containing Se is partially doped with Te so as to enhance its sensitivity. The amorphous chalcogenide material is very useful in the following point. In the course of forming, or after having formed, at least one photoconductive layer on a semiconductor body whose surface is uneven, a heat treatment is performed at a temperature of at least the softening point of the photoconductor so as to flatten the layer, whereby discontinuous parts of the photoconductor ascribable to the uneven surface of the semiconductor body can be avoided.
    • 具有至少设置在半导体衬底中的预定杂质区域的光电器件和通过堆叠与至少一部分杂质区域接触的电极层构成的光电转换部分,覆盖 电极层和覆盖光导材料层的透明电极,其特征在于,所述光导材料层由主要包含Se的无定形硫族化物材料制成。 非常有利的是,由主要含有Se的非晶体材料制成的光电转换材料层部分地掺杂有Te以提高其灵敏度。 无定形硫族化物材料在以下方面非常有用。 在形成表面不均匀的半导体本体上形成或形成至少一个光电导层的过程中,至少在光电导体的软化点的温度下进行热处理以使层平坦化,由此 可以避免归因于半导体本体的不平坦表面的感光体的不连续部分。
    • 6. 发明授权
    • Apparatus for vacuum deposition
    • 真空沉积设备
    • US4121537A
    • 1978-10-24
    • US779795
    • 1977-03-21
    • Eiichi MaruyamaTadaaki HiraiSachio IshiokaHideaki YamamotoKiyohisa Inao
    • Eiichi MaruyamaTadaaki HiraiSachio IshiokaHideaki YamamotoKiyohisa Inao
    • C23C14/54B05C11/00C23C13/08
    • C23C14/546
    • An apparatus for vacuum deposition comprising a turn-table for holding substrates for deposition, and a plurality of evaporation boats arranged in opposition to a circumferential part of the turn-table, the turn-table being rotated at deposition whereby vapors from the respective boats can be cyclically accumulated and stuck onto the substrates, further comprises at least one film-thickness monitor which is fixed to the turn-table and which detects the quantity of a deposited substance of one layer stuck every time the substrates pass over each boat, and means to receive a signal from the film-thickness monitor and divide the signal time sequentially, thereby detecting at least one of the deposition rate and the total amount of the vapor from each boat, and to control the quantity of the vapor arriving to the substrates for deposition from each boat while comparing the detected value with a predetermined value.
    • 一种用于真空沉积的装置,包括用于保持用于沉积的基板的转台以及与转台的圆周部分相对布置的多个蒸发舟,所述转台在沉积下旋转,从而来自各个船的蒸气可以 进一步包括至少一个薄膜厚度监测器,该膜厚监测器固定在转台上,每隔一个基板通过每个船只就检测一层沉积物质的量;以及装置 接收来自薄膜厚度监视器的信号并依次划分信号时间,从而检测来自每个船的蒸气的沉积速率和总量中的至少一个,并且控制到达基板的蒸气的量 在将检测值与预定值进行比较时,从每个船的沉积。