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    • 9. 发明授权
    • High-voltage complementary bipolar and BiCMOS technology using double expitaxial growth
    • 高电压互补双极和BiCMOS技术采用双外延生长
    • US06365447B1
    • 2002-04-02
    • US09005786
    • 1998-01-12
    • Francois HèbertDatong ChenReda Razouk
    • Francois HèbertDatong ChenReda Razouk
    • H01L218238
    • H01L21/84H01L21/8249H01L27/1203
    • A method of making high voltage complementary bipolar and BiCMOS devices on a common substrate. The bipolar devices are vertical NPN and PNP transistors having the same structure. The fabrication process utilizes trench isolation and thus is scalable. The process uses two epitaxial silicon layers to form the high voltage NPN collector, with the PNP collector formed from a p-well diffused into the two epitaxial layers. The collector contact resistance is minimized by the use of sinker up/down structures formed at the interface of the two epitaxial layers. The process minimizes the thermal budget and therefore the up diffusion of the NPN and PNP buried layers. This maximizes the breakdown voltage at the collector-emitter junction for a given epitaxial thickness. The epitaxial layers may be doped as required depending upon the specifications for the high voltage NPN device. The process is compatible with the fabrication of low voltage devices, which can be formed by placing the sinker regions under the emitter region. The thicknesses of the two epitaxial layers may be adjusted as required depending upon the specifications for the low voltage devices.
    • 在公共衬底上制造高电压互补双极和BiCMOS器件的方法。 双极器件是具有相同结构的垂直NPN和PNP晶体管。 制造工艺利用沟槽隔离,因此是可扩展的。 该工艺使用两个外延硅层来形成高压NPN集电极,PNP集电极由扩散到两个外延层中的p阱形成。 通过使用在两个外延层的界面处形成的沉降片上/下结构来最小化集电极接触电阻。 该过程使热预算最小化,因此最小化NPN和PNP埋层的向上扩散。 对于给定的外延厚度,这使集电极 - 发射极结处的击穿电压最大化。 外延层可以根据需要掺杂,这取决于高压NPN器件的规格。 该工艺与低电压器件的制造兼容,这可以通过将沉降片区域放置在发射极区域下而形成。 根据低电压器件的规格,可以根据需要调整两个外延层的厚度。