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1. 发明授权

US08581557B2 Direct-current power source apparatus 失效
标题翻译：直流电源装置
公开(公告)号：US08581557B2
公开(公告)日：2013-11-12
申请号：US13048267
申请日：2011-03-15
申请人： Mitsuyoshi Kanoh , Masahiko Amano , Yukio Iida , Yoshiki Hama , Keizo Yamada
发明人： Mitsuyoshi Kanoh , Masahiko Amano , Yukio Iida , Yoshiki Hama , Keizo Yamada
IPC分类号： H02J7/00
CPC分类号： H02J7/345 , B60L7/16 , B60L11/005 , B60L11/12 , B60L11/1809 , B60L11/187 , F02N11/0866 , F02N2011/0885 , H02J7/0024 , H02J7/047 , H02J9/02 , Y02T10/7011 , Y02T10/7016 , Y02T10/7022 , Y02T10/705 , Y02T10/7072 , Y02T10/7077 , Y02T90/14 , Y10T307/696
摘要： A direct-current power source apparatus in which a lithium-ion capacitor unit is used as an electric storage system and which can fully utilize the lithium-ion capacitor unit and maintain the supply of electricity to a load is provided. An electric storage system includes a lithium-ion capacitor unit and a lead-acid battery connected in parallel with a load, and a voltage detecting section that detects the voltage of the lithium-ion capacitor unit. When the voltage detecting section detects that the voltage of the lithium-ion capacitor unit has reached a unit lower-limit voltage, a control circuit outputs a conduction signal for causing a switching circuit to get into a conductive state. When the switching circuit gets into a conductive state, the secondary battery supplies an electric power to a motor. At this time, the secondary battery charges the lithium-ion capacitor unit.
摘要翻译：提供了一种直流电源装置，其中使用锂离子电容器单元作为蓄电系统，并且可以充分利用锂离子电容器单元并保持对负载的电力供应。电气存储系统包括与负载并联连接的锂离子电容器单元和铅酸电池，以及检测锂离子电容器单元的电压的电压检测部。当电压检测部检测到锂离子电容器单元的电压达到单位下限电压时，控制电路输出用于使开关电路进入导通状态的导通信号。当开关电路进入导通状态时，二次电池向电动机供给电力。此时，二次电池对锂离子电容器单元充电。

2. 发明申请

US20110227540A1 Direct-Current Power Source Apparatus 失效
标题翻译：直流电源装置
公开(公告)号：US20110227540A1
公开(公告)日：2011-09-22
申请号：US13048267
申请日：2011-03-15
申请人： Mitsuyoshi KANOH , Masahiko Amano , Yukio Iida , Yoshiki Hama , Keizo Yamada
发明人： Mitsuyoshi KANOH , Masahiko Amano , Yukio Iida , Yoshiki Hama , Keizo Yamada
IPC分类号： H02J7/04 , H02J3/00 , H02J7/00
CPC分类号： H02J7/345 , B60L7/16 , B60L11/005 , B60L11/12 , B60L11/1809 , B60L11/187 , F02N11/0866 , F02N2011/0885 , H02J7/0024 , H02J7/047 , H02J9/02 , Y02T10/7011 , Y02T10/7016 , Y02T10/7022 , Y02T10/705 , Y02T10/7072 , Y02T10/7077 , Y02T90/14 , Y10T307/696
摘要： A direct-current power source apparatus in which a lithium-ion capacitor unit is used as an electric storage system and which can fully utilize the lithium-ion capacitor unit and maintain the supply of electricity to a load is provided. An electric storage system includes a lithium-ion capacitor unit and a lead-acid battery connected in parallel with a load, and a voltage detecting section that detects the voltage of the lithium-ion capacitor unit. When the voltage detecting section detects that the voltage of the lithium-ion capacitor unit has reached a unit lower-limit voltage, a control circuit outputs a conduction signal for causing a switching circuit to get into a conductive state. When the switching circuit gets into a conductive state, the secondary battery supplies an electric power to a motor. At this time, the secondary battery charges the lithium-ion capacitor unit.
摘要翻译：提供了一种直流电源装置，其中使用锂离子电容器单元作为蓄电系统，并且可以充分利用锂离子电容器单元并保持对负载的电力供应。电气存储系统包括与负载并联连接的锂离子电容器单元和铅酸电池，以及检测锂离子电容器单元的电压的电压检测部。当电压检测部检测到锂离子电容器单元的电压达到单位下限电压时，控制电路输出用于使开关电路进入导通状态的导通信号。当开关电路进入导通状态时，二次电池向电动机供给电力。此时，二次电池对锂离子电容器单元充电。

3. 发明授权

US07700380B2 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device 失效
标题翻译：用于半导体晶片的表面污染物分析仪，其中使用的方法和用于制造半导体器件的工艺
公开(公告)号：US07700380B2
公开(公告)日：2010-04-20
申请号：US11151068
申请日：2005-06-13
申请人： Takeo Ushiki , Keizo Yamada , Yohsuke Itagaki , Tohru Tsujide
发明人： Takeo Ushiki , Keizo Yamada , Yohsuke Itagaki , Tohru Tsujide
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , G21K7/00 , H01J2237/24507 , H01J2237/24571 , H01J2237/24592 , H01L21/02063 , H01L22/12
摘要： A semiconductor wafer is radiated with an electron beam so that the inelastic scattering takes place in the narrow region, and current flows out from the narrow region; the amount of current is dependent on the substance or substances in the narrow region so that the analyst evaluates the degree of contamination on the basis of the substance or substances specified in the narrow region.
摘要翻译：用电子束照射半导体晶片，使得非弹性散射发生在窄区域，电流从窄区域流出; 当前的数量取决于狭窄地区的物质或物质，以便分析人员根据狭义地区规定的物质或物质评估污染程度。

4. 发明申请

US20070273329A1 STORAGE BATTERY UNIT 有权
标题翻译：储存电池单元
公开(公告)号：US20070273329A1
公开(公告)日：2007-11-29
申请号：US11755297
申请日：2007-05-30
申请人： Shun Kobuse , Keizo Yamada , Yoshiaki Machiyama , Kouji Ohtsu
发明人： Shun Kobuse , Keizo Yamada , Yoshiaki Machiyama , Kouji Ohtsu
IPC分类号： H02J7/00
CPC分类号： H01M10/482 , G01R31/3655 , G01R31/3686 , G01R31/3696 , H01M10/48 , H02J7/0031 , H02J7/0047 , H02J2007/004
摘要： A storage battery unit (1) including a storage battery (2) and a monitoring device (3) that monitors a state of the storage battery using an output of the storage battery as an input, wherein, in order to prevent the monitoring device from consuming electric power in a state before use of the storage battery and prevent nonfunctioning of the monitoring device in use of the storage battery, a starting circuit (4) is provided between the storage battery and the monitoring device (3), the starting circuit including: a main switch that holds an OFF state in a state before a load is connected to the storage battery and interrupts supply of electric power from the storage battery (2) to the monitoring device; and a switch drive circuit that detects a reduction in terminal voltage of the storage battery that occurs when the load exceeding the set value is connected to the storage battery, and sets the main switch to an ON state.
摘要翻译：一种蓄电池单元（1），包括使用所述蓄电池的输出作为输入来监视所述蓄电池的状态的蓄电池（2）和监视装置（3），其中，为了防止所述监视装置在使用蓄电池之前的状态下消耗电力，并且防止在使用蓄电池时监视装置不起作用，在蓄电池和监视装置（3）之间设置起动电路（4），起动电路包括：在负载连接到蓄电池之前的状态下保持断开状态并中断从蓄电池（2）向监控装置供电的主开关; 以及开关驱动电路，其检测当超过设定值的负载连接到蓄电池时发生的蓄电池的端子电压的降低，并将主开关设定为接通状态。

5. 发明申请

US20060093789A1 Contact hole standard test device, method of forming the same, method of testing contact hole, method and apparatus for measuring a thickness of a film, and method of testing a wafer 失效
标题翻译：接触孔标准试验装置，其形成方法，接触孔测试方法，测量薄膜厚度的方法和装置以及测试晶片的方法
公开(公告)号：US20060093789A1
公开(公告)日：2006-05-04
申请号：US11198462
申请日：2005-08-05
申请人： Keizo Yamada
发明人： Keizo Yamada
IPC分类号： B32B3/10
CPC分类号： G01N23/2251 , Y10T428/24331
摘要： The present invention provides a standard test device used for testing a hole of a semiconductor device. The standard test device has a structure which comprises: at least a dummy film on a base surface; at least an insulating layer which has at least one opening penetrating through the insulating layer, so that a part of a top surface of the at least dummy film is shown through the at least one opening, wherein the at least dummy film has a predetermined constant thickness at least around the at least one opening. The standard test device makes it easily possible to determine or measure a thickness of a residual film on a bottom of the contact hole.
摘要翻译：本发明提供了一种用于测试半导体器件的孔的标准测试装置。标准测试装置具有以下结构：至少在基面上具有虚拟膜; 至少一个绝缘层，其至少有一个穿透绝缘层的开口，使得至少一个虚拟膜的上表面的一部分通过至少一个开口示出，其中该至少虚拟膜具有预定的常数至少在所述至少一个开口周围的厚度。标准测试装置可以容易地确定或测量接触孔底部残留膜的厚度。

6. 发明申请

US20050116726A1 FILM THICKNESS MEASURING APPARATUS AND A METHOD FOR MEASURING A THICKNESS OF A FILM 失效
标题翻译：薄膜厚度测量装置和测量薄膜厚度的方法
公开(公告)号：US20050116726A1
公开(公告)日：2005-06-02
申请号：US11005339
申请日：2004-12-06
申请人： Keizo Yamada , Yousuke Itagaki , Takeo Ushiki
发明人： Keizo Yamada , Yousuke Itagaki , Takeo Ushiki
IPC分类号： G01B15/02 , H01J1/62 , G01R27/08 , H01J63/04
CPC分类号： G01B15/02 , H01J2237/2813
摘要： An apparatus for measuring the thickness of thin-film cause electron beams of first and second energies to strike thin-film to be measured that is formed on a silicon substrate, and measures the first substrate current value of current flowing in the substrate when it is struck by an electron beam of a first energy and the second substrate current value of current flowing in the substrate when it is struck by an electron beam of a second energy. The thin-film measuring apparatus obtains reference data indicating a relationship between the film thickness and a reference function having as variables the substrate current for the case of an electron beam of the first energy striking a standard sample and the substrate current for the case of an electron beam of the second energy striking the standard sample, and calculates the thickness of the thin-film under measurement based on the first and second substrate current values, giving consideration to the reference data.
摘要翻译：用于测量薄膜厚度的装置使得第一和第二能量的电子束撞击形成在硅衬底上的要测量的薄膜，并且测量在衬底中流动的电流的第一衬底电流值被第一能量的电子束撞击并且当其被第二能量的电子束撞击时在衬底中流动的电流的第二衬底电流值。薄膜测量装置获得指示薄膜厚度和参考功能之间的关系的参考数据，该基准函数具有作为第一能量的电子束冲击标准样品的情况下的衬底电流的变量和用于电子束的第二能量冲击到标准样品，并且基于第一和第二衬底电流值计算测量的薄膜的厚度，考虑参考数据。

7. 发明授权

US06837936B2 Semiconductor manufacturing device 失效
标题翻译：半导体制造装置
公开(公告)号：US06837936B2
公开(公告)日：2005-01-04
申请号：US10078357
申请日：2002-02-21
申请人： Takeo Ushiki , Keizo Yamada , Yousuke Itagaki
发明人： Takeo Ushiki , Keizo Yamada , Yousuke Itagaki
IPC分类号： G01R31/28 , G03F7/20 , H01L21/027 , H01L21/66 , C23C16/00
CPC分类号： G03F7/70866 , G03F7/70933
摘要： The semiconductor manufacturing device according to the present invention having a mechanical drive part which is moved in a vacuum device while holding a substrate includes at least one discharge port for introducing an inert gas into the vacuum device, and a flow rate control part for controlling the inert gas which is discharged into the vacuum device from the discharge port at a constant flow rate.

8. 发明授权

US06809534B2 Semiconductor device test method and semiconductor device tester 失效
公开(公告)号：US06809534B2
公开(公告)日：2004-10-26
申请号：US09865528
申请日：2001-05-29
申请人： Keizo Yamada
发明人： Keizo Yamada
IPC分类号： G01R3102
CPC分类号： G01R31/307 , G01R31/2853
摘要： A defective position of a sample to be tested is detected by irradiating the test sample and another test sample with electron beam while scanning the test samples, storing values of current generated in the test samples correspondingly to electron beam irradiation positions as current waveforms and comparing the current waveforms.

9. 发明授权

US5913076A Simple data input device for supplying computer unit digital signal converted from analog signal 失效
标题翻译：用于提供从模拟信号转换的计算机单元数字信号的简单数据输入装置
公开(公告)号：US5913076A
公开(公告)日：1999-06-15
申请号：US826053
申请日：1997-03-28
申请人： Keizo Yamada
发明人： Keizo Yamada
IPC分类号： G06F3/041 , G06F3/033 , G06F3/038 , G06F3/048 , G06F3/05 , A63F9/00
CPC分类号： G06F3/038 , G06F3/0383 , G06F3/05
摘要： A house is two-dimensionally moved, and generates first and second analog signals representative of a movement in opposing first and second directions and another movement in opposing third and fourth directions that are perpendicular to the first and second directions. A data input device compares the first and second analog signals with a periodically changing reference signal to output a first pulse signal and a second pulse signal depending upon the comparison result, and selectively transfers a first pulse train and a second pulse train depending upon the duty factors of the first and second pulse signals so as to generate a composite digital signal representative of the motion of the mouse to a computer unit.
摘要翻译：二维地移动房屋，并且产生表示相反的第一和第二方向的运动的第一和第二模拟信号，以及垂直于第一和第二方向的相反的第三和第四方向的另一运动。数据输入装置将第一和第二模拟信号与周期性变化的参考信号进行比较，以根据比较结果输出第一脉冲信号和第二脉冲信号，并根据占空比选择性地传送第一脉冲串和第二脉冲串第一和第二脉冲信号的因子，以产生代表鼠标对计算机单元的运动的复合数字信号。

10. 发明授权

US5656846A Semiconductor acceleration sensor and method of fabrication thereof 失效
标题翻译：半导体加速度传感器及其制造方法
公开(公告)号：US5656846A
公开(公告)日：1997-08-12
申请号：US399883
申请日：1995-03-07
申请人： Keizo Yamada
发明人： Keizo Yamada
IPC分类号： G01P1/00 , G01P15/08 , G01P15/12 , H01L29/82
CPC分类号： G01P15/0802 , G01P1/003 , G01P15/12
摘要： An acceleration sensor is provided with damping means on an upper surface and/or an lower surface of a movable portion of a sensor body and/or opposite regions surrounded by the movable portion and a rim of the sensor body in order to provide damping of a vibration to the movable portion of the sensor body. The damping means includes a material having a large mechanical damping constant, for example, a plastic, a gel, an inorganic material, and micro capsules. In a fabrication process of the acceleration sensor, a supporting film is provided on the movable portion of the sensor body, the damping material is provided on the supporting film and the movable portion of the sensor body is subjected to etching so as to form a weight and a diaphragm.
摘要翻译：加速度传感器在传感器主体的可动部分的上表面和/或下表面上和/或被可移动部分和传感器主体的边缘包围的相对区域中设置有阻尼装置，以便提供阻尼向传感器主体的可动部分振动。阻尼装置包括具有大的机械阻尼常数的材料，例如塑料，凝胶，无机材料和微胶囊。在加速度传感器的制造过程中，在传感器主体的可动部分设置有支撑膜，在支撑膜上设置阻尼材料，对传感器主体的可动部进行蚀刻，以形成重量和隔膜。

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