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    • 2. 发明授权
    • Automatic LSI testing apparatus using expert system
    • 自动LSI测试仪器采用专家系统
    • US5511162A
    • 1996-04-23
    • US82289
    • 1993-06-24
    • Hiroyuki HamadaTohru TsujideMasaaki Sugimoto
    • Hiroyuki HamadaTohru TsujideMasaaki Sugimoto
    • G01R31/26G01R31/28G06F11/25G11C29/00G11C29/44G11C29/56H01L21/66G06F11/00
    • G06F11/2257G11C29/56
    • An automatic testing apparatus includes an expert rule which is derived from expert knowledge and defines a tree of successively traceable nodes interconnected by decision branches which lead to a plurality of fault modes. Each of the nodes defines a particular test pattern and a corresponding expected value. One of the nodes is specified and a test pattern defined by the specified node is applied to an LSI chip under test and a result signal is derived therefrom. This result signal is compared with the expected value defined by the specified node to produce a comparison result. The tree of the expert rule is traced from the specified node to a subsequent node according to the comparison result and the subsequent node is specified instead of the previously specified node. The process is repeated as the tree is traced from one node to another until one of the fault modes is reached to identify a chip failure.
    • 自动测试装置包括从专家知识导出的专家规则,并且定义通过导致多个故障模式的决策分支互连的连续可跟踪节点的树。 每个节点定义特定的测试模式和相应的预期值。 指定其中一个节点,并将由指定节点定义的测试模式应用于被测试的LSI芯片,并从中得到结果信号。 将该结果信号与由指定节点定义的期望值进行比较以产生比较结果。 专家规则的树根据比较结果从指定的节点追溯到后续节点,指定后续节点,而不是先前指定的节点。 当树从一个节点追溯到另一​​个节点时,重复该过程,直到到达一个故障模式来识别芯片故障。
    • 4. 发明授权
    • Production managing system of semiconductor device
    • 半导体器件生产管理系统
    • US06842663B2
    • 2005-01-11
    • US10790276
    • 2004-03-01
    • Keizo YamadaYousuke ItagakiTakeo UshikiTohru Tsujide
    • Keizo YamadaYousuke ItagakiTakeo UshikiTohru Tsujide
    • H01L21/02H01L21/00G06F19/99
    • H01L21/67276
    • A production managing system for semiconductor devices includes, in a semiconductor producing center C, production devices 11a-11c for producing semiconductor devices, in-line measuring devices 12a-12c for measuring data of a lot, a database 2 storing data of production methods, the measured data, the specifications of the process steps corresponding to the measured data, the estimated yield, the data of lot input date and hour, the data of the scheduled date on which the process step is performed, the data of actual date of completion in every step and the data of the scheduled date of completion of the semiconductor devices of every lot, correspondingly to a lot number data of the semiconductor devices (chips) and a server 1 including an estimated yield operating unit 1a for calculating the estimated yield, which is a final yield, on the basis of the specifications and the measured data, and a production managing unit 1b for performing a production management of semiconductor devices ordered by a user on the basis of the respective data inputted by the user and the estimated yield, wherein a user terminal of the user not only performs a determination whether or not the process processing in every process is normal but also estimates the final number of normal products ordered by the user and obtainable finally.
    • 半导体装置的生产管理系统包括半导体制造中心C,用于制造半导体器件的生产装置11a-11c,用于测量批次数据的在线测量装置12a-12c,存储生产方法数据的数据库2, 测量数据,对应于测量数据的过程步骤的规格,估计产量,批次输入日期和时间的数据,执行处理步骤的预定日期的数据,实际完成日期的数据 在每个步骤和每个批次的半导体器件的预定完成日期的数据中,对应于半导体器件(芯片)的批号数据和包括用于计算估计产量的估计产量操作单元1a的服务器1, 根据规格和测量数据是最终产量,以及用于执行半导体器件的生产管理的生产管理单元1b 由用户根据用户输入的相应数据和估计的收益进行排序,其中用户的用户终端不仅执行每个处理中的处理处理是否正常的确定,还估计 正品由用户订购,最终可以获得。
    • 5. 发明授权
    • Semiconductor integrated circuit fault analyzing apparatus and method
therefor
    • 半导体集成电路故障分析装置及其方法
    • US5521516A
    • 1996-05-28
    • US354088
    • 1994-12-06
    • Yasuko HanagamaToyokazu NakamuraKiyoshi NikawaTohru Tsujide
    • Yasuko HanagamaToyokazu NakamuraKiyoshi NikawaTohru Tsujide
    • G01R31/302G01R31/307H01L21/66G01R1/04
    • G01R31/307
    • A semiconductor integrated circuit fault analyzing apparatus includes an electron beam tester and controller. The electron beam tester includes an electron gun assembly for generating a primary electron beam and forms a voltage contrast image on the basis of a detection amount of secondary electrons obtained by irradiating the primary electron beam from the electron gun assembly onto a semiconductor integrated circuit serving as a target to be tested and supplied with a test pattern signal, thereby specifying a faulty circuit portion of the semiconductor integrated circuit using the formed voltage contrast image. The controller sets, immediately before the test pattern signal is supplied to the semiconductor integrated circuit, at least one of a power and a signal which are supplied to the semiconductor integrated circuit to be a voltage different from a voltage obtained in the presence of the test pattern signal to cause the electron beam tester to acquire a voltage contrast image free from charge-up phenomena in synchronism with the start of supplying the test pattern signal.
    • 半导体集成电路故障分析装置包括电子束测试器和控制器。 该电子束测试器包括一个用于产生一次电子束的电子枪组件,并且基于通过将来自电子枪组件的一次电子束照射到半导体集成电路而获得的二次电子的检测量形成电压对比图像, 要测试并提供测试图案信号的目标,从而使用形成的电压对比图像指定半导体集成电路的故障电路部分。 控制器将紧接在测试图案信号提供给半导体集成电路之前,将提供给半导体集成电路的功率和信号中的至少一个设置为与存在测试时获得的电压不同的电压 模式信号使电子束测试仪与开始提供测试图案信号同步地获取没有充电现象的电压对比图像。
    • 7. 发明授权
    • Production managing system of semiconductor device
    • 半导体器件生产管理系统
    • US07321805B2
    • 2008-01-22
    • US11005330
    • 2004-12-06
    • Keizo YamadaYousuke ItagakiTakeo UshikiTohru Tsujide
    • Keizo YamadaYousuke ItagakiTakeo UshikiTohru Tsujide
    • G06F19/00
    • H01L21/67276
    • A production managing system for semiconductor devices includes, in a semiconductor producing center C, production devices 11a-11c for producing semiconductor devices, in-line measuring devices 12a-12c for measuring data of a lot, a database 2 storing data of production methods, the measured data, the specifications of the process steps corresponding to the measured data, the estimated yield, the data of lot input date and hour, the data of the scheduled date on which the process step is performed, the data of actual date of completion in every step and the data of the scheduled date of completion of the semiconductor devices of every lot, correspondingly to a lot number data of the semiconductor devices (chips) and a server 1 including an estimated yield operating unit 1a for calculating the estimated yield, which is a final yield, on the basis of the specifications and the measured data, and a production managing unit 1b for performing a production management of semiconductor devices ordered by a user on the basis of the respective data inputted by the user and the estimated yield, wherein a user terminal of the user not only performs a determination whether or not the process processing in every process is normal but also estimates the final number of normal products ordered by the user and obtainable finally.
    • 半导体装置的生产管理系统包括在半导体生产中心C中,用于生产半导体器件的生产装置11a-11c,用于测量批次的数据的在线测量装置12a-12c,存储数据的数据库2 的生产方法,测量数据,对应于测量数据的过程步骤的规格,估计产量,批次输入日期和时间的数据,执行处理步骤的预定日期的数据,数据 相应于半导体器件(芯片)的批号数据和包括估计产量操作单元1a的服务器1,每个步骤的实际完成日期和每个批次的半导体器件的预定完成日期的数据, 根据规格和测量数据计算作为最终产量的估计产量,以及用于进行半导体生产管理的生产管理单元1b 用户根据用户输入的各个数据排序的设备和估计的收益,其中,用户的用户终端不仅执行每个处理中的处理处理是否正常,而且还估计最终数 的用户订购的正常产品,最终可以获得。
    • 10. 发明授权
    • Production managing system of semiconductor device
    • 半导体器件生产管理系统
    • US06711453B2
    • 2004-03-23
    • US10082247
    • 2002-02-26
    • Keizo YamadaYousuke ItagakiTakeo UshikiTohru Tsujide
    • Keizo YamadaYousuke ItagakiTakeo UshikiTohru Tsujide
    • G06F1900
    • H01L21/67276
    • A production managing system for semiconductor devices includes, in a semiconductor producing center C, production devices 11a-11c for producing semiconductor devices, in-line measuring devices 12a-12c for measuring data of a lot, a database 2 storing data of production methods, the measured data, the specifications of the process steps corresponding to the measured data, the estimated yield, the data of lot input date and hour, the data of the scheduled date on which the process step is performed, the data of actual date of completion in every step and the data of the scheduled date of completion of the semiconductor devices of every lot, correspondingly to a lot number data of the semiconductor devices (chips) and a server 1 including an estimated yield operating unit 1a for calculating the estimated yield, which is a final yield, on the basis of the specifications and the measured data, and a production managing unit 1b for performing a production management of semiconductor devices ordered by a user on the basis of the respective data inputted by the user and the estimated yield, wherein a user terminal of the user not only performs a determination whether or not the process processing in every process is normal but also estimates the final number of normal products ordered by the user and obtainable finally.
    • 半导体装置的生产管理系统包括半导体制造中心C,用于制造半导体器件的生产装置11a-11c,用于测量批次的数据的在线测量装置12a-12c,存储生产方法数据的数据库2, 测量数据,对应于测量数据的过程步骤的规格,估计产量,批次输入日期和时间的数据,执行处理步骤的预定日期的数据,实际完成日期的数据 在每个步骤和每个批次的半导体器件的预定完成日期的数据中,对应于半导体器件(芯片)的批号数据和包括用于计算估计产量的估计产量操作单元1a的服务器1, 根据规格和测量数据是最终产量,以及用于执行半导体器件的生产管理的生产管理单元1b 由用户根据用户输入的相应数据和估计的收益进行排序,其中用户的用户终端不仅执行每个处理中的处理处理是否正常的确定,还估计 正品由用户订购,最终可以获得。