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    • 6. 发明授权
    • Method of fabricating pressure sensor monolithically integrated
    • 制造压力传感器单片集成方法
    • US06743654B2
    • 2004-06-01
    • US10014880
    • 2001-12-11
    • Salvatore CoffaLuigi Occhipinti
    • Salvatore CoffaLuigi Occhipinti
    • H01L2100
    • B81C1/00182B81B2201/0257B81B2201/0264B81B2203/0127B81C2201/0109B81C2201/0115G01L9/0042
    • A method of making a monolithically integrated pressure sensor includes making a cavity in the semiconductor substrate. This may be formed by plasma etching the front side or the back side of the silicon wafer to cut a plurality of trenches or holes deep enough to extend for at least part of its thickness into a doped buried layer of opposite type of conductivity of the substrate and of the epitaxial layer grown over it. The method may also include electrochemically etching through such trenches, and the silicon of the buried layer with an electrolytic solution suitable for selectively etching the doped silicon of the opposite type of conductivity, thereby making the silicon of the buried layer porous. The method may also include oxidizing and leaching away the silicon so made porous.
    • 制造单片集成压力传感器的方法包括在半导体衬底中形成空腔。 这可以通过等离子体蚀刻硅晶片的前侧或背面来形成,以切割多个深度足以将其厚度的至少一部分延伸到衬底的相反导电性的掺杂掩埋层中的沟槽或孔 以及在其上生长的外延层。 该方法还可以包括通过这样的沟槽进行电化学蚀刻,以及使用适合于选择性地蚀刻具有相反导电性的掺杂硅的电解液的掩埋层的硅,从而使掩埋层的硅多孔化。 该方法还可以包括氧化和浸出如此制成的多孔的硅。
    • 8. 发明授权
    • Method and apparatus for controlling power transfer in a flyback
converter by modulating the power switch off time during transient
conditions
    • 用于通过在瞬态条件下调制电源开关时间来控制反激式转换器中的功率传输的方法和装置
    • US6118675A
    • 2000-09-12
    • US413996
    • 1999-10-07
    • Antonio LionettoLuigi OcchipintiSergio Tommaso SpampinatoRiccardo Caponetto
    • Antonio LionettoLuigi OcchipintiSergio Tommaso SpampinatoRiccardo Caponetto
    • H02M3/28H02M1/00H02M1/36H02M3/335
    • H02M1/36H02M3/33523H02M2001/0032Y02B70/16
    • A method of controlling a flyback DC-DC converter includes using a primary control loop to monitor an auxiliary winding of a transformer for determining the amount of energy being transferred to a load. The voltage in the auxiliary winding is induced by current flowing in the secondary winding of the transformer. The primary control loop disables and enables the turning on of a power switch for driving the primary winding of the transformer, and detects the zero-crossing. The duration that the power switch is turned on is established by a secondary control loop using the output voltage for turning off the power switch for a new off phase. The flyback DC-DC converter further includes a fixed frequency oscillator having a frequency lower than the self-oscillating frequency of the converter. The power transferred from the primary circuit to the secondary circuit of the flyback transformer is controlled by introducing a delay on the turn-on instant of the power switch. This is with respect to a turn-on command generated during a self-oscillating functioning phase regardless of the mode of control of the converter. The turn-on command is based upon a zero crossing, a fixed frequency functioning phase, a rising edge of the signal generated by the oscillator, and as a function of the input variables of the primary and secondary control loops.
    • 控制回扫DC-DC转换器的方法包括使用主控制回路来监测变压器的辅助绕组,以确定正在传送到负载的能量的量。 辅助绕组中的电压由在变压器的次级绕组中流动的电流引起。 主控制回路禁用并启用用于驱动变压器初级绕组的电源开关,并检测过零点。 通过使用输出电压关闭电源开关进行新的关断阶段的次级控制回路来建立电源开关打开的持续时间。 反激式DC-DC转换器还包括频率低于转换器的自振频率的固定频率振荡器。 通过在电源开关的导通瞬间引入延迟来控制从回扫变压器的初级电路传递到次级电路的功率。 这是关于在自振荡功能阶段期间产生的开启命令,而不管转换器的控制方式如何。 开启命令基于过零点,固定频率功能相位,由振荡器产生的信号的上升沿,以及主控制回路和次控制回路的输入变量的函数。