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    • 1. 发明授权
    • P-type gallium nitride
    • P型氮化镓
    • US5657335A
    • 1997-08-12
    • US146502
    • 1993-11-01
    • Michael RubinNathan NewmanTracy FuJennifer RossJames Chan
    • Michael RubinNathan NewmanTracy FuJennifer RossJames Chan
    • H01L33/00H01L33/32
    • H01L33/32H01L21/2233H01L21/26546H01L33/007H01L33/325
    • Several methods have been found to make p-type gallium nitride. P-type gallium nitride has long been sought for electronic devices. N-type gallium nitride is readily available. Discovery of p-type gallium nitride and the methods for making it will enable its use in ultraviolet and blue light-emitting diodes and lasers. pGaN will further enable blue photocathode elements to be made. Molecular beam epitaxy on substrates held at the proper temperatures, assisted by a nitrogen beam of the proper energy produced several types of p-type GaN with hole concentrations of about 5.times.10.sup.11 /cm.sup.3 and hole mobilities of about 500 cm.sup.2 /V-sec, measured at 250.degree. K. P-type GaN can be formed of unintentionally-doped material or can be doped with magnesium by diffusion, ion implantation, or co-evaporation. When applicable, the nitrogen can be substituted with other group III elements such as Al.
    • 已经发现了几种制造p型氮化镓的方法。 长期以来一直在寻求电子器件的P型氮化镓。 N型氮化镓容易获得。 发现p型氮化镓及其制造方法将能够用于紫外线和蓝色发光二极管和激光器。 pGaN将进一步使得能够制造蓝色光电阴极元件。 在适当温度下保持的衬底上的分子束外延由适当能量的氮气束辅助产生几种类型的具有约5×10 11 / cm 3的空穴浓度和约500cm 2 / V-sec的空穴迁移率的p型GaN,其在 250°K .P型GaN可以由无意掺杂的材料形成,或者可以通过扩散,离子注入或共蒸发掺杂镁。 当适用时,氮气可以被其他III族元素如Al取代。
    • 2. 发明授权
    • Constricted glow discharge plasma source
    • 约束辉光放电等离子体源
    • US6137231A
    • 2000-10-24
    • US711844
    • 1996-09-10
    • Andre AndersSimone AndersMichael DickinsonMichael RubinNathan Newman
    • Andre AndersSimone AndersMichael DickinsonMichael RubinNathan Newman
    • H01J37/32H05H1/24
    • H01J37/32009H05H1/24
    • A constricted glow discharge chamber and method are disclosed. The polarity and geometry of the constricted glow discharge plasma source is set so that the contamination and energy of the ions discharged from the source are minimized. The several sources can be mounted in parallel and in series to provide a sustained ultra low source of ions in a plasma with contamination below practical detection limits. The source is suitable for applying films of nitrides such as gallium nitride and oxides such as tungsten oxide and for enriching other substances in material surfaces such as oxygen and water vapor, which are difficult process as plasma in any known devices and methods. The source can also be used to assist the deposition of films such as metal films by providing low-energy ions such as argon ions.
    • 公开了一种收缩辉光放电室和方法。 缩小的辉光放电等离子体源的极性和几何形状被设定为使从源极排出的离子的污染物和能量最小化。 可以并联并串联安装多个源,以在等离子体中提供持续的超低离子源,污染低于实际检测限。 该源适合于施加诸如氮化镓的氮化物和氧化钨等氧化物的膜,并且用于富集诸如氧和水蒸气的材料表面中的其它物质,这在任何已知的装置和方法中作为等离子体是困难的过程。 该源还可用于通过提供诸如氩离子的低能离子来辅助诸如金属膜的膜的沉积。