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    • 3. 发明授权
    • Superconductor deposition system
    • 超导体沉积系统
    • US5207884A
    • 1993-05-04
    • US633275
    • 1990-12-24
    • Kookrin CharNathan NewmanJohn M. Rowell
    • Kookrin CharNathan NewmanJohn M. Rowell
    • C23C14/28
    • C23C14/28Y10S505/786
    • To deposit a plurality of substances on a substrate while the substrate remains in a low pressure oxygen environment, several target carriers are mounted around the edge of a disc and the disc is rotated to position the targets at the focal point of a fixed laser. The target carriers are themselves rotatable in bearings on the disc and are turned by a sun gear that is carried about the same shaft that turns the disc so that the heat of the laser beam is not concentrated at one spot on the surface of the target. All the apparatus is contained in a oxygen chamber. The substrate is heated and the targets are cooled continuously.
    • 为了在基板保持在低压氧气环境中的同时将多种物质沉积在基板上,在圆盘的边缘周围安装有几个目标载体,并且旋转盘以将目标定位在固定激光器的焦点处。 目标托架本身可以在盘上的轴承中旋转,并且由围绕相同轴转动的太阳齿轮转动,所述恒星转动盘,使得激光束的热量不集中在目标表面上的一个点处。 所有的装置都包含在氧气室中。 将基板加热并使靶材连续冷却。