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    • 4. 发明申请
    • INTERMEDIATE ANNEAL FOR METAL DEPOSITION
    • 中间金属沉积物
    • US20070144628A1
    • 2007-06-28
    • US11682406
    • 2007-03-06
    • Dale Collins
    • Dale Collins
    • C22F1/08
    • H01L21/76871H01L21/2885H01L21/76877H01L21/76883
    • The present teachings and illustrations describe a process for forming a plurality of conductive structures in or on a substrate. In one embodiment, the process comprises forming a plurality of recesses in or on the substrate, wherein the plurality of recesses include recesses having different dimensions. In addition, the process further comprises (i) forming a conductive layer which at least partially fills the plurality of recesses and (ii) treating the conductive layer to improve the conductive properties of the conductive layer. Moreover, the process still further comprises (iii) sequentially repeating acts (i) and (ii) until each of the recesses of the plurality of recesses are filled to a desired dimension and such that the conductive material in the recesses of smaller dimension are more uniformly adhered to the bottom surfaces of the recesses.
    • 本教导和说明描述了在衬底中或衬底上形成多个导电结构的工艺。 在一个实施例中,该方法包括在基底中或基底上形成多个凹槽,其中多个凹槽包括具有不同尺寸的凹槽。 此外,该方法还包括(i)形成至少部分地填充多个凹部的导电层,和(ii)处理导电层以改善导电层的导电性能。 此外,该方法还包括(iii)顺序地重复动作(i)和(ii),直到多个凹部中的每个凹部被填充到期望的尺寸,并且使得较小尺寸的凹槽中的导电材料更多 均匀地粘附到凹部的底面。
    • 7. 发明申请
    • Semiconductor constructions comprising conductive structures, and methods of forming conductive structures
    • 包括导电结构的半导体结构以及形成导电结构的方法
    • US20070048932A1
    • 2007-03-01
    • US11218232
    • 2005-09-01
    • Dale CollinsRita KleinJames Green
    • Dale CollinsRita KleinJames Green
    • H01L21/8242
    • H01L21/76885H01L21/76834H01L21/76852
    • The invention includes methods of forming pluralities of electrically conductive structures. The methods can include formation of a gradient-containing material across a substrate and in direct physical contact with conductive surfaces of nodes. The gradient-containing material can consist essentially of tantalum nitride at a lowermost portion in contact with the conductive surfaces, consist essentially of tantalum at an uppermost portion, and have a TaN/Ta gradient extending between the lowermost and uppermost portions. Alternatively, the gradient-containing material can have a Co/W gradient extending therethrough. Conductive structures can be formed over the gradient-containing material. The invention also includes constructions comprising electrically conductive lines over a material having a TaN/Ta gradient, or a W/Co gradient, extending therethrough.
    • 本发明包括形成多个导电结构的方法。 这些方法可以包括在衬底上形成含梯度的材料,并且与节点的导电表面直接物理接触。 含梯度的材料可以基本上由在与导电表面接触的最下部分的氮化钽组成,其基本上由最上部的钽构成,并且具有在最下部和最上部之间延伸的TaN / Ta梯度。 或者,含梯度的材料可以具有从其延伸的Co / W梯度。 可以在含梯度材料上形成导电结构。 本发明还包括在TaN / Ta梯度或延伸穿过其中的W / Co梯度的材料上包括导电线的构造。
    • 10. 发明申请
    • Method of forming a mass over a semiconductor substrate
    • 在半导体衬底上形成质量的方法
    • US20050139479A1
    • 2005-06-30
    • US11053765
    • 2005-02-08
    • Dale CollinsRichard LaneRita Klein
    • Dale CollinsRichard LaneRita Klein
    • C25D7/12H01L21/02H01L21/288H01L21/8242H01L27/108C25D5/02C25D3/38
    • H01L27/10852H01L21/2885H01L27/10808H01L27/10817H01L28/60H01L28/90Y10S257/906
    • The invention includes methods of electrochemically treating semiconductor substrates. The invention includes a method of electroplating a substance. A substrate having defined first and second regions is provided. The first and second regions can be defined by a single mask, and accordingly can be considered to be self-aligned relative to one another. A first electrically conductive material is formed over the first region, and a second electrically conductive material is formed over the second region. The first and second electrically conductive materials are exposed to an electrolytic solution while providing electrical current to the first and second electrically conductive materials. A desired substance is selectively electroplated onto the first electrically conductive material during the exposing of the first and second electrically conductive materials to the electrolytic solution. The invention also includes methods of forming capacitor constructions.
    • 本发明包括电化学处理半导体衬底的方法。 本发明包括电镀物质的方法。 提供了具有限定的第一和第二区域的基板。 第一和第二区域可以由单个掩模限定,因此可以被认为是相对于彼此自对准的。 在第一区域上形成第一导电材料,并且在第二区域上形成第二导电材料。 第一和第二导电材料暴露于电解溶液,同时向第一和第二导电材料提供电流。 在将第一和第二导电材料暴露于电解液期间,期望的物质选择性地电镀到第一导电材料上。 本发明还包括形成电容器结构的方法。