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1. 发明申请

US20080100959A1 Magnetic write head having a shield that extends below the leading edge of the write pole 有权
标题翻译：磁写头具有在写柱的前缘下方延伸的屏蔽
公开(公告)号：US20080100959A1
公开(公告)日：2008-05-01
申请号：US11588961
申请日：2006-10-27
申请人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
发明人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
IPC分类号： G11B5/127
CPC分类号： G11B5/11 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording that has a write pole and a trailing or side shield that has a leading edge that extends to or beyond the leading edge of write pole, thereby ensuring complete side magnetic shielding. The write head can be formed by forming the write pole on a non-magnetic substrate that is constructed of a material that can be readily removed by reactive ion etching (RIE). The write pole can be formed by depositing a layer of magnetic write pole material over the substrate and then forming a mask over the magnetic write pole material. An ion mill can be performed to define the write pole, and then a reactive ion etch can be performed to notch the substrate, so that when a non-magnetic shield gap material is deposited it will be below or at the bottom of the write pole. Then a magnetic shield material can be deposited to form a shield having a leading edge that extends beyond the leading edge of the write pole.
摘要翻译：一种用于垂直磁记录的磁写头，具有写磁极和后屏蔽或侧屏蔽，其具有延伸到或超过写极的前沿的前沿，从而确保完全的侧磁屏蔽。写头可以通过在由可以通过反应离子蚀刻（RIE）容易地去除的材料构成的非磁性衬底上形成写极来形成。可以通过在衬底上沉积一层磁性写入磁极材料，然后在磁性写入磁极材料上形成掩模来形成写入极。可以执行离子磨以限定写入极，然后可以执行反应离子蚀刻以蚀刻衬底，使得当非磁性屏蔽间隙材料沉积时，它将在写入极的下方或底部。然后，可以沉积磁屏蔽材料以形成具有延伸超过写柱的前缘的前缘的屏蔽。

2. 发明授权

US07715147B2 Magnetic write head having a shield that extends below the leading edge of the write pole 有权
标题翻译：磁写头具有在写柱的前缘下方延伸的屏蔽
公开(公告)号：US07715147B2
公开(公告)日：2010-05-11
申请号：US11588961
申请日：2006-10-27
申请人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
发明人： Michael Feldbaum , Quang Le , Aron Pentek , Sue Siyang Zhang
IPC分类号： G11B5/187 , G11B5/11
CPC分类号： G11B5/11 , G11B5/315
摘要： A magnetic write head for perpendicular magnetic recording that has a write pole and a trailing or side shield that has a leading edge that extends to or beyond the leading edge of write pole, thereby ensuring complete side magnetic shielding. The write head can be formed by forming the write pole on a non-magnetic substrate that is constructed of a material that can be readily removed by reactive ion etching (RIE). The write pole can be formed by depositing a layer of magnetic write pole material over the substrate and then forming a mask over the magnetic write pole material. An ion mill can be performed to define the write pole, and then a reactive ion etch can be performed to notch the substrate, so that when a non-magnetic shield gap material is deposited it will be below or at the bottom of the write pole. Then a magnetic shield material can be deposited to form a shield having a leading edge that extends beyond the leading edge of the write pole.
摘要翻译：一种用于垂直磁记录的磁写头，具有写磁极和后屏蔽或侧屏蔽，其具有延伸到或超过写极的前沿的前沿，从而确保完全的侧磁屏蔽。写头可以通过在由可以通过反应离子蚀刻（RIE）容易地去除的材料构成的非磁性衬底上形成写极来形成。可以通过在衬底上沉积一层磁性写入磁极材料，然后在磁性写入磁极材料上形成掩模来形成写入极。可以执行离子磨以限定写入极，然后可以执行反应离子蚀刻以蚀刻衬底，使得当非磁性屏蔽间隙材料沉积时，它将在写入极的下方或底部。然后，可以沉积磁屏蔽材料以形成具有延伸超过写柱的前缘的前缘的屏蔽。

3. 发明授权

US07037847B2 Methods for fabricating read sensor for magnetic heads with reduced read track width 失效
标题翻译：用于制造磁头读取传感器的方法，读取磁道宽度减小
公开(公告)号：US07037847B2
公开(公告)日：2006-05-02
申请号：US10856679
申请日：2004-05-28
申请人： Quang Le , Sue Siyang Zhang
发明人： Quang Le , Sue Siyang Zhang
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： C23C16/44 , G11B5/3163 , G11B5/3169 , H01L21/3146
摘要： The fabrication of the read head sensor components where chemical mechanical polishing (CMP) stop layer is deposited above the sensor layers, a first reactive ion etch (RIE) layer and a second RIE layer are deposited, where the second RIE layer is etchable with a different ion species than the first RIE layer. A stencil layer is then deposited and patterned to create an etching stencil having the desired magnetic read track width of the sensor. An RIE step is then conducted in which the second RIE layer is etched. An RIE step for the first RIE layer is then conducted with a different ion species. Thereafter, the sensor layers are milled where the remaining portions of the first and second RIE layers act as a milling mask. A CMP assisted liftoff step is then conducted in which the remaining portions of the ion milling mask are removed.
摘要翻译：沉积化学机械抛光（CMP）停止层沉积在传感器层上方，第一反应离子蚀刻（RIE）层和第二RIE层的读取头传感器部件的制造，其中第二RIE层可以用不同的离子种类比第一个RIE层。然后沉积和图案化模板层以产生具有传感器的期望磁读取磁道宽度的蚀刻模版。然后进行RIE步骤，其中蚀刻第二RIE层。然后用不同的离子种类进行第一RIE层的RIE步骤。此后，将第一和第二RIE层的剩余部分用作铣削掩模的传感器层进行研磨。然后进行CMP辅助剥离步骤，其中除去离子铣削掩模的剩余部分。

4. 发明授权

US07950137B2 Method for manufacturing a magnetic write head 有权
标题翻译：磁写头制造方法
公开(公告)号：US07950137B2
公开(公告)日：2011-05-31
申请号：US11766711
申请日：2007-06-21
申请人： Christian Rene Bonhote , Thomas Dudley Boon, Jr. , Ming Jiang , Jordan Asher Katine , Quang Le , Yinshi Liu , Xhavin Sinha , Sue Siyang Zhang , Yi Zheng
发明人： Christian Rene Bonhote , Thomas Dudley Boon, Jr. , Ming Jiang , Jordan Asher Katine , Quang Le , Yinshi Liu , Xhavin Sinha , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3169 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a write pole for perpendicular magnetic recording for accurately defining a side shield throat height and write pole flare point. The magnetic structure includes a write pole portion and first and second side shield portions. The side shields portions are magnetically connected with the write pole portion in a region in front of an intended air bearing surface plane (e.g. in the direction from which lapping will progress). The side shields portions are each separated from the write pole portion in a region behind the intended air bearing surface plane by notches that terminate at a desired location relative to the intended air bearing surface plane and which open up in a region behind the intended air bearing surface plane.
摘要翻译：一种制造用于垂直磁记录的写磁极的方法，用于准确地限定侧屏蔽喉高度和写磁极点。磁性结构包括写极部分和第一和第二侧面屏蔽部分。侧屏蔽部分在预期的空气轴承表面（例如沿着研磨过程的方向）前面的区域中与写入极部分磁性连接。侧面屏蔽部分分别与预期的空气支承面平面后面的区域中的写入磁极部分分开，该凹口终止于相对于预期的空气轴承表面平面的期望位置，并且在预期的空气轴承后面的区域中开口表面。

5. 发明申请

US20080316652A1 SIMULTANEOUS POLE-TIP AND SIDE SHIELD FABRICATION AND INTEGRATED ELG 有权
标题翻译：同时提供和侧面制造和集成ELG
公开(公告)号：US20080316652A1
公开(公告)日：2008-12-25
申请号：US11766711
申请日：2007-06-21
申请人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Ming Jiang , Jordan Asher Katine , Quang Le , Yinshi Liu , Xhavin Sinha , Sue Siyang Zhang , Yi Zheng
发明人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Ming Jiang , Jordan Asher Katine , Quang Le , Yinshi Liu , Xhavin Sinha , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/10
CPC分类号： G11B5/3166 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3169 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a write pole for perpendicular magnetic recording for accurately defining a side shield throat height and write pole flare point. The method includes the formation of a magnetic structure that provides an electronic lapping guide as well as providing the structure for both the side shields and the write pole. The magnetic structure includes a write pole portion and first and second side shield portions. The side shields portions are magnetically connected with the write pole portion in a region in front of an intended air hearing surface plane (e.g. in the direction from which lapping will progress). The side shields portions are each separated from the write pole portion in a region behind the intended air bearing surface plane by notches that terminate at a desired location relative to the intended air bearing surface plane and which open up in a region behind the intended air bearing surface plane.
摘要翻译：一种制造用于垂直磁记录的写磁极的方法，用于准确地限定侧屏蔽喉高度和写磁极点。该方法包括形成提供电子研磨导轨的磁性结构，以及为侧屏和写极提供结构。磁性结构包括写极部分和第一和第二侧面屏蔽部分。侧面屏蔽部分在预期的空气听力表面（例如沿着研磨过程的方向）前面的区域中与写入极部分磁性连接。侧面屏蔽部分分别与预期的空气支承面平面后面的区域中的写入磁极部分分开，该凹口终止于相对于预期的空气轴承表面平面的期望位置，并且在预期的空气轴承后面的区域中开口表面。

6. 发明授权

US07251878B2 Method and apparatus for defining leading edge taper of a write pole tip 失效
标题翻译：用于定义写入磁极尖端的前缘锥度的方法和装置
公开(公告)号：US07251878B2
公开(公告)日：2007-08-07
申请号：US10884368
申请日：2004-06-30
申请人： Quang Le , Jui-Lung Li , Yvette Chung Nga Winton , Sue Siyang Zhang , Yi Zheng
发明人： Quang Le , Jui-Lung Li , Yvette Chung Nga Winton , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/187 , B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , Y10T29/49041 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and apparatus for defining leading edge taper of a write pole tip is disclosed. The fabrication process uses reactive ion etching to fabricate LET with tight control of the placement of LET's edge and to achieve higher angle for providing a higher effective write field at the pole tip while minimizing ATI for high-density perpendicular recording. The placement of a resist's edge is used to define the LET's edge and a CMP process is used to provide a planar surface for the fabrication of the write pole.
摘要翻译：公开了一种用于限定写入磁极尖端的前缘锥形的方法和装置。制造工艺使用反应离子蚀刻来制造LET，可以严格控制LET的边缘放置，并实现更高的角度，以便在磁极尖端提供更高的有效写入场，同时最大限度地降低ATI用于高密度垂直记录。使用抗蚀剂边缘的放置来定义LET的边缘，并且使用CMP工艺来提供用于制造写入极的平面。

7. 发明申请

US20090168258A1 HYBRID, SELF ALIGNED MAGNETIC WRITE HEAD WITH A PARTIALLY PLATED POLE AND METHOD OF PRODUCING SAME 有权
标题翻译：混合自动对准的具有部分电极的磁性写头及其制造方法
公开(公告)号：US20090168258A1
公开(公告)日：2009-07-02
申请号：US11966113
申请日：2007-12-28
申请人： Quang Le , Jeffrey S. Lille , Aron Pentek
发明人： Quang Le , Jeffrey S. Lille , Aron Pentek
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A magnetic write head for perpendicular magnetic recording. The write head has a secondary flare point defined by magnetic structures that extend from the sides of the write pole, but not over the trailing edge of the write pole. The magnetic structures each have a front edge that defines the secondary flare point. By constructing the magnetic structures so that they only extend from the sides of the write pole and not over the write pole, they can be formed by electroplating, while leafing the mask structure (used to define the write pole) still intact, thereby greatly simplifying manufacture and preventing damage to the write pole during manufacture.
摘要翻译：用于垂直磁记录的磁写头。写头具有由磁性结构限定的次级耀斑，其从写入极的侧面延伸，但不在写入极的后缘上方。磁性结构各自具有限定次级耀斑点的前边缘。通过构造磁结构，使得它们仅从写入极的侧面延伸而不是在写入极之上，它们可以通过电镀形成，同时使掩模结构（用于定义写入极）仍然完整，从而大大简化在制造过程中制造和防止对写入极的损坏。

8. 发明授权

US07120988B2 Method for forming a write head having air bearing surface (ABS) 失效
标题翻译：用于形成具有空气轴承表面（ABS）的写头的方法
公开(公告)号：US07120988B2
公开(公告)日：2006-10-17
申请号：US10672896
申请日：2003-09-26
申请人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
发明人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
IPC分类号： G11B5/127 , C23C14/00
CPC分类号： G11B5/1278 , G11B5/112 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49067
摘要： A method and materials to fabricate a trailing shield write pole that resolve the problems of controlling the write gap and preventing damages to the write gap or pole during fabrication of the subsequent structure. This process also introduces a CMP assisted lift-off process to remove re-deposition and fencing (increase yields) and a method to create dishing in the top of the write pole. Moreover, also included in this disclosure are suitable materials that can function as an ion mill transfer layer, CMP layer, and RIEable layer.
摘要翻译：一种用于制造后屏蔽写入极的方法和材料，其解决了在后续结构的制造期间控制写入间隙并防止对写入间隙或极的损坏的问题。该过程还引入CMP辅助剥离过程以去除再沉积和栅栏（增加产量）以及在写柱顶部产生凹陷的方法。此外，本公开中还包括可用作离子磨转移层，CMP层和可分离层的合适材料。

9. 发明申请

US20050068671A1 Magnetic transducer for perpendicular magnetic recording with single pole write head with trailing shield 有权
标题翻译：用于垂直磁记录的磁性传感器，带有后挡板的单刀头
公开(公告)号：US20050068671A1
公开(公告)日：2005-03-31
申请号：US10675046
申请日：2003-09-29
申请人： Yimin Hsu , Quang Le , Hin Lee , James Nix , Aron Pentek , Kurt Rubin , Neil Smith , Nian Sun , Walter Weresin , Mason Williams
发明人： Yimin Hsu , Quang Le , Hin Lee , James Nix , Aron Pentek , Kurt Rubin , Neil Smith , Nian Sun , Walter Weresin , Mason Williams
IPC分类号： G11B5/187 , G11B5/31 , G11B5/60 , H05K1/02 , G11B5/127
CPC分类号： G11B5/3116 , G11B5/11 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/6005
摘要： The invention is a magnetic transducer with separated read and write heads for perpendicular recording. The write head has a trailing shield that extends from the return pole piece toward the main pole piece to form the write gap at the air-bearing surface. One embodiment of the trailing shield is a two part structure with a pedestal and a much smaller tip that confronts the main pole piece at the gap. In one embodiment a sink of non-magnetic, electrically conductive material is disposed in the separation gap between the read head and the flux bearing pole piece. The sink is preferably made of copper and does not extend to the ABS.
摘要翻译：本发明是具有分离的用于垂直记录的读写头的磁性换能器。写头具有从返回极片向主极片延伸的尾部屏蔽件，以在空气轴承表面形成写入间隙。后挡板的一个实施例是具有基座的两部分结构和在间隙处面对主极片的更小的尖端。在一个实施例中，非磁性导电材料的汇流槽设置在读头和磁通轴承极片之间的分隔间隙中。水槽优选由铜制成并且不延伸到ABS。

10. 发明授权

US07563381B2 High milling resistance write pole fabrication method for perpendicular recording 失效
标题翻译：用于垂直记录的高铣削电阻写极制造方法
公开(公告)号：US07563381B2
公开(公告)日：2009-07-21
申请号：US10836867
申请日：2004-04-30
申请人： Amanda Baer , Quang Le , Kim Lee , Aron Pentek , Douglas J. Werner , Sue S. Zhang
发明人： Amanda Baer , Quang Le , Kim Lee , Aron Pentek , Douglas J. Werner , Sue S. Zhang
IPC分类号： G11B5/187
CPC分类号： G11B5/1871 , G11B5/3116 , G11B5/3163 , Y10T29/49021 , Y10T29/49043
摘要： A method for constructing a tapered write pole, the method including the use of a bilayer hard mask.
摘要翻译：一种用于构造锥形写入极的方法，该方法包括使用双层硬掩模。

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