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    • 2. 发明授权
    • Copper sputtering target
    • 铜溅射靶
    • US6149776A
    • 2000-11-21
    • US191253
    • 1998-11-12
    • Howard TangImran HashimRichard HongPeijun Ding
    • Howard TangImran HashimRichard HongPeijun Ding
    • C23C14/34H01J37/34
    • H01J37/3435C23C14/3407
    • The present invention generally provides an apparatus and a method for physical vapor deposition of a metal onto a substrate comprising a physical vapor deposition chamber and a target disposed in an upper portion of the chamber. The target comprises a backing plate having a central portion and a flange portion attachable to the physical vapor deposition chamber, a sputterable portion extending from the central portion of the backing plate, and an annular ridge disposed on a surface of the flange portion. Preferably, the sputterable portion of the target includes a restriction side wall that restricts entry of plasma and back-scattered particles into the dark space gap between an upper shield and the target.
    • 本发明通常提供一种将金属物理气相沉积到衬底上的装置和方法,该衬底包括物理气相沉积室和设置在腔室上部的靶。 目标包括具有中心部分和可连接到物理气相沉积室的凸缘部分的背板,从背板的中心部分延伸的可溅射部分和设置在凸缘部分的表面上的环形凸脊。 优选地,靶的可溅射部分包括限制侧壁,其限制等离子体和背散射粒子进入上屏蔽和靶之间的暗空间间隙。
    • 9. 发明授权
    • Shunt regulator circuit having a split output
    • 具有分流输出的并联稳压器电路
    • US08841890B2
    • 2014-09-23
    • US13490296
    • 2012-06-06
    • Agustin OchoaHoward Tang
    • Agustin OchoaHoward Tang
    • G05F1/613G06K19/07
    • G05F1/613G06K19/0715
    • A shunt regulator for an RFID tag chip is powered from split outputs from the RF rectifier, including a first output for providing a power delivery path to on-chip circuits and a second output for providing a discharge-regulation path. The shunt regulator includes a capacitor coupled between the first output and ground. The shunt regulator further includes an input node for receiving a power supply voltage from the rectifier split outputs, a first diode having an anode coupled to the input node, a second diode having an anode coupled to the input node, a resistor divider circuit and amplifier coupled between a cathode of the first diode and ground, transistor having a control terminal coupled to an output of the resistor divider and amplifier circuit, and a current path coupled between a cathode of the second diode and ground.
    • 用于RFID标签芯片的分流调节器由来自RF整流器的分离输出供电,包括用于提供片上电路的功率输送路径的第一输出和用于提供放电调节路径的第二输出。 并联调节器包括耦合在第一输出和地之间的电容器。 分流调节器还包括输入节点,用于从整流器分流输出端接收电源电压,第一二极管具有耦合到输入节点的阳极,具有耦合到输入节点的阳极的第二二极管,电阻分压器电路和放大器 耦合在第一二极管的阴极和地之间,具有耦合到电阻分压器和放大器电路的输出的控制端的晶体管和耦合在第二二极管的阴极和地之间的电流通路。
    • 10. 发明申请
    • DYNAMIC POWER CLAMP FOR RFID POWER CONTROL
    • 用于RFID功率控制的动态功率钳
    • US20120312881A1
    • 2012-12-13
    • US13490254
    • 2012-06-06
    • Agustin OchoaHoward Tang
    • Agustin OchoaHoward Tang
    • G06K19/073
    • H01L27/0285G06K19/0715
    • A clamp circuit for an RFID tag includes a power supply node, a dynamic clamp coupled between the power supply node and ground, and an active clamp coupled between the power supply and ground, having a shunt combined effect for providing a clamped power supply node VDDR voltage. The dynamic clamp includes a capacitor divider circuit, a resistor coupled to the capacitor divider circuit, and an N-channel transistor coupled to the capacitor divider circuit. The active clamp includes a differential amplifier having a first input coupled to a resistor divider, a second input for receiving a reference voltage, and an output coupled to a P-channel transistor for the clamped VDDR voltage.
    • 用于RFID标签的钳位电路包括电源节点,耦合在电源节点和地之间的动态钳位以及耦合在电源和地之间的有源钳位,具有用于提供钳位电源节点VDDR的分流组合效应 电压。 动态钳位电路包括一个电容分压电路,一个耦合到电容分压电路的电阻和一个耦合到电容分压电路的N沟道晶体管。 有源钳位包括差分放大器,其具有耦合到电阻分压器的第一输入端,用于接收参考电压的第二输入端和耦合到用于钳位的VDDR电压的P沟道晶体管的输出。