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1. 发明授权

US06852202B2 Small epicyclic magnetron with controlled radial sputtering profile 有权
标题翻译：具有受控径向溅射特性的小型行星磁控管
公开(公告)号：US06852202B2
公开(公告)日：2005-02-08
申请号：US10418710
申请日：2003-04-17
申请人： Michael Andrew Miller , James H. Tsung , Daniel C. Lubben , Ilyoung Richard Hong , Peijun Ding
发明人： Michael Andrew Miller , James H. Tsung , Daniel C. Lubben , Ilyoung Richard Hong , Peijun Ding
IPC分类号： C23C14/35 , H01J37/34
CPC分类号： H01J37/3408 , H01J37/3455
摘要： A small unbalanced magnet assembly is scanned in a retrograde planetary or epicyclic path about the back of a target being plasma sputtered including an orbital rotation about the center axis of the target and a planetary rotation about another axis rotating about the target center axis. The magnet assembly may pass through the target center, thus allowing full target coverage. A geared planetary mechanism may include a rotating drive plate, a fixed center gear, and an idler and a follower gear rotatably supported in the drive plate supporting a cantilevered magnet assembly on the side of the drive plate facing the target. The erosion profile may be controlled by varying the rotation rate through the rotation cycle or by modulating the target power. A second planetary stage may be added or non-circular gears be used. Auxiliary electromagnetic coils may create a focusing magnetic field.
摘要翻译：小型不平衡磁体组件以逆行星行星或行星路径围绕目标物的背面进行扫描，等离子体溅射包括围绕目标的中心轴线的轨道旋转和围绕围绕目标中心轴线旋转的另一轴线的行星旋转。磁体组件可以穿过目标中心，从而允许完全的目标覆盖。齿轮行星机构可以包括旋转驱动板，固定中心齿轮和惰轮以及可旋转地支撑在驱动板中的从动齿轮，该驱动板支撑在与驱动板对置的驱动板侧的悬臂磁体组件。可以通过改变通过旋转周期的旋转速率或通过调节目标功率来控制侵蚀曲线。可以添加第二行星级或使用非圆形齿轮。辅助电磁线圈可产生聚焦磁场。

2. 发明授权

US08771136B2 Hybrid powertrain with operator selectable electric propulsion mode 有权
标题翻译：混合动力总成，具有操作员可选电力推进模式
公开(公告)号：US08771136B2
公开(公告)日：2014-07-08
申请号：US13157346
申请日：2011-06-10
申请人： Michael Andrew Miller , Alan G. Holmes , Brendan M. Conlon , Steven A. Tarnowsky
发明人： Michael Andrew Miller , Alan G. Holmes , Brendan M. Conlon , Steven A. Tarnowsky
IPC分类号： B60W10/02
CPC分类号： B60K6/46 , B60K6/52 , B60W20/10 , B60W2510/083 , B60W2520/26 , B60W2540/04 , B60W2540/16 , B60W2720/403 , Y02T10/6217 , Y02T10/6265
摘要： A powertrain for a vehicle includes an engine and a transmission having an input member, an output member, and a neutral state in which torque is not transmitted from the input member to the output member. A first motor/generator is coupled to the engine. A second motor/generator is coupled with vehicle wheels directly or indirectly through the transmission. The first motor/generator acts as a generator when powered by the engine to provide electric power to the second motor/generator. The second motor/generator acts as a motor when receiving electric power from a battery or from the first motor/generator. A shift selector is moved by a vehicle operator to establish an electric propulsion mode in which the transmission is in the neutral state and the second motor/generator functions as a motor.
摘要翻译：用于车辆的动力系统包括发动机和具有输入构件，输出构件和中止状态的变速器，其中转矩不从输入构件传递到输出构件。第一电动机/发电机耦合到发动机。第二电动机/发电机通过变速器直接或间接地与车轮联接。当由发动机供电时，第一电动机/发电机用作发电机，以向第二电动机/发电机提供电力。当从电池或第一电动机/发电机接收电力时，第二电动机/发电机用作电动机。换档选择器由车辆操作者移动以建立其中变速器处于中立状态并且第二电动机/发电机用作电动机的电推进模式。

3. 发明授权

US07674360B2 Mechanism for varying the spacing between sputter magnetron and target 有权
标题翻译：改变溅射磁控管与靶材间距的机理
公开(公告)号：US07674360B2
公开(公告)日：2010-03-09
申请号：US10942273
申请日：2004-09-16
申请人： Ilyoung Richard Hong , Donny Young , Michael Rosenstein , Robert B. Lowrance , Daniel C. Lubben , Michael Andrew Miller , Peijun Ding , Sreekrishnan Sankaranarayan , Goichi Yoshidome
发明人： Ilyoung Richard Hong , Donny Young , Michael Rosenstein , Robert B. Lowrance , Daniel C. Lubben , Michael Andrew Miller , Peijun Ding , Sreekrishnan Sankaranarayan , Goichi Yoshidome
IPC分类号： C25B9/00 , C25B11/00 , C25B13/00 , C23C14/00
CPC分类号： C23C14/3407 , C23C14/35 , C23C14/54 , H01J37/3408 , H01J37/3455
摘要： A lift mechanism for and a corresponding use of a magnetron in a plasma sputter reactor. A magnetron rotating about the target axis is controllably lifted away from the back of the target to compensate for sputter erosion, thereby maintaining a constant magnetic field and resultant plasma density at the sputtered surface, which is particularly important for stable operation with a small magnetron, for example, one executing circular or planetary motion about the target axis. The lift mechanism can include a lead screw axially fixed to the magnetron support shaft and a lead nut engaged therewith to raise the magnetron as the lead nut is turned. Alternatively, the support shaft is axially fixed to a vertically moving slider. The amount of lift may be controlled according a recipe based on accumulated power applied to the target or by monitoring electrical characteristics of the target.
摘要翻译：用于等离子体溅射反应器中的磁控管的升降机构和相应的使用。围绕目标轴旋转的磁控管被可控地从目标的背面提升，以补偿溅射侵蚀，从而在溅射表面保持恒定的磁场和合成的等离子体密度，这对于使用小的磁控管的稳定操作特别重要，例如，一个执行关于目标轴的圆形或行星运动。升降机构可以包括轴向固定到磁控管支撑轴的导螺杆和与其接合的导螺母，以在导螺母转动时升高磁控管。或者，支撑轴轴向固定到垂直移动的滑块。可以根据基于施加到目标的累积功率的配方或通过监视目标的电气特性来控制升力量。

4. 发明申请

US20130047616A1 ELECTRICAL POWER COGENERATION SYSTEM 审中-公开
标题翻译：电力加热系统
公开(公告)号：US20130047616A1
公开(公告)日：2013-02-28
申请号：US13215437
申请日：2011-08-23
申请人： Alan G. Holmes , Edward D. Tate, JR. , George M. Claypole , Constantine Nick Raptis , Michael Andrew Miller
发明人： Alan G. Holmes , Edward D. Tate, JR. , George M. Claypole , Constantine Nick Raptis , Michael Andrew Miller
IPC分类号： F01K23/06
CPC分类号： F24D11/005 , F24D11/009 , F24H2240/06 , Y02E20/14
摘要： A cogeneration system includes an engine, a motor/generator unit (MGU) powered by the engine, a compressor powered by the MGU, and a heat storage tank. The system further includes an engine coolant loop which places the engine in thermal communication with the tank, and a vapor loop which circulates refrigerant from the compressor. An air handler unit exchanges heat between the engine coolant loop and the vapor loop. A controller is configured to control the engine, MGU, compressor, and air handler unit, alone or in combination, to heat or cool air supplied to a building and water in the tank, and to selectively charge at least one auxiliary device such as a battery of an electric vehicle (EV) via the MGU. The system may include two power plants, with one, e.g., an EV or a portable module, having the engine and a first engine coolant loop.
摘要翻译：热电联产系统包括发动机，由发动机供电的电动机/发电机单元（MGU），由MGU供电的压缩机和蓄热箱。该系统还包括使发动机与罐热连通的发动机冷却剂回路，以及使来自压缩机的制冷剂循环的蒸气回路。空气处理器单元在发动机冷却剂回路和蒸汽回路之间交换热量。控制器被配置为单独或组合地控制发动机，MGU，压缩机和空气处理器单元，以加热或冷却供应给建筑物的水和在水箱中的水，并且选择性地对至少一个辅助设备（例如通过MGU的电动汽车（EV）的电池。该系统可以包括两个发电厂，其中一个，例如具有发动机和第一发动机冷却剂回路的EV或便携式模块。

5. 发明申请

US20120312122A1 HYBRID POWERTRAIN WITH OPERATOR SELECTABLE ELECTRIC PROPULSION MODE 有权
标题翻译：混合动力系统与操作者选择电动推进模式
公开(公告)号：US20120312122A1
公开(公告)日：2012-12-13
申请号：US13157346
申请日：2011-06-10
申请人： Michael Andrew Miller , Alan G. Holmes , Brendan M. Conlon , Steven A. Tarnowsky
发明人： Michael Andrew Miller , Alan G. Holmes , Brendan M. Conlon , Steven A. Tarnowsky
IPC分类号： B60K6/36
CPC分类号： B60K6/46 , B60K6/52 , B60W20/10 , B60W2510/083 , B60W2520/26 , B60W2540/04 , B60W2540/16 , B60W2720/403 , Y02T10/6217 , Y02T10/6265
摘要： A powertrain for a vehicle includes an engine and a transmission having an input member, an output member, and a neutral state in which torque is not transmitted from the input member to the output member. A first motor/generator is coupled to the engine. A second motor/generator is coupled with vehicle wheels directly or indirectly through the transmission. The first motor/generator acts as a generator when powered by the engine to provide electric power to the second motor/generator. The second motor/generator acts as a motor when receiving electric power from a battery or from the first motor/generator. A shift selector is moved by a vehicle operator to establish an electric propulsion mode in which the transmission is in the neutral state and the second motor/generator functions as a motor.
摘要翻译：用于车辆的动力系统包括发动机和具有输入构件，输出构件和中止状态的变速器，其中转矩不从输入构件传递到输出构件。第一电动机/发电机耦合到发动机。第二电动机/发电机通过变速器直接或间接地与车轮联接。当由发动机供电时，第一电动机/发电机用作发电机，以向第二电动机/发电机提供电力。当从电池或第一电动机/发电机接收电力时，第二电动机/发电机用作电动机。换档选择器由车辆操作者移动以建立其中变速器处于中立状态并且第二电动机/发电机用作电动机的电推进模式。

6. 发明授权

US06627050B2 Method and apparatus for depositing a tantalum-containing layer on a substrate 有权
公开(公告)号：US06627050B2
公开(公告)日：2003-09-30
申请号：US09916412
申请日：2001-07-26
申请人： Michael Andrew Miller , Peijun Ding , Howard Tang , Tony Chiang , Jianming Fu
发明人： Michael Andrew Miller , Peijun Ding , Howard Tang , Tony Chiang , Jianming Fu
IPC分类号： C23C1434
CPC分类号： H01L21/76843 , C23C14/0641 , C23C14/35 , C30B25/02 , C30B29/38 , H01J37/3408 , H01J37/3441 , H01L21/28568
摘要： A method of forming a tantalum-containing layer on a substrate is described. The tantalum-containing layer is formed using a physical vapor deposition technique wherein a magnetic field in conjunction with an electric field function to confine material sputtered from a tantalum-containing target within a reaction zone of a deposition chamber. The electric field is generated by applying a power of at least 8 kilowatts to the tantalum-containing target. The magnetic field is generated from a magnetron including a first magnetic pole of a first magnetic polarity surrounded by a second magnetic pole of a second magnetic polarity opposite the first magnetic polarity. The first magnetic pole preferably has a magnetic flux at least about 30% greater than a magnetic flux of the second magnetic pole. The tantalum-containing layer deposition method is compatible with integrated circuit fabrication processes. In one integrated circuit fabrication process, an interconnect structure is formed.

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