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    • 1. 发明授权
    • Method of designing semiconductor integrated circuit device
    • 半导体集成电路器件设计方法
    • US06647539B1
    • 2003-11-11
    • US09710910
    • 2000-11-14
    • Masayoshi TojimaMasahiro OhashiMana HamadaMiki AritaYuji Sugisawa
    • Masayoshi TojimaMasahiro OhashiMana HamadaMiki AritaYuji Sugisawa
    • G06F1750
    • G06F17/5045
    • A system which allows signal transmission between circuit locks is constructed promptly by automatically generating an I/F circuit in response to the adjustment of a timing relationship and to a modification in a waveform on a GUI and automatically inserting the I/F circuit between the circuit blocks or adding the I/F circuit to any of the circuit block. A circuit for outputting an operation enable for a receiving side is generated automatically between a plurality of blocks operating with different frequencies, whereby the use of the circuit blocks is expanded in spite of the different frequencies. Further, the design of a large-scale system is performed efficiently by automatically generating a desired waveform by a simple editing operation, generating a desired signal waveform by forming a combinational circuit of signals in the circuit block, and automatically generating a logic synthesis script.
    • 通过自动产生I / F电路来响应于时序关系的调整和GUI上的波形的修改,迅速地构成允许电路锁之间的信号传输的系统,并且自动地将I / F电路插入电路 块或将I / F电路添加到任何电路块。 用于输出用于接收侧的操作使能的电路在以不同频率操作的多个块之间自动生成,由此尽管频率不同,电路块的使用也被扩展。 此外,通过简单的编辑操作自动生成期望的波形,通过形成电路块中的信号的组合电路,生成期望的信号波形,自动生成逻辑综合脚本,有效地执行大规模系统的设计。
    • 2. 发明授权
    • Method of designing semiconductor integrated circuit device
    • 半导体集成电路器件设计方法
    • US06898771B2
    • 2005-05-24
    • US10330097
    • 2002-12-30
    • Masayoshi TojimaMasahiro OhashiMana HamadaMiki AritaYuji Sugisawa
    • Masayoshi TojimaMasahiro OhashiMana HamadaMiki AritaYuji Sugisawa
    • H01L21/82G06F17/50
    • G06F17/5045
    • A system which allows signal transmission between circuit blocks is constructed promptly by automatically generating an I/F circuit in response to the adjustment of a timing relationship and to a modification in a waveform on a GUI and automatically inserting the I/F circuit between the circuit blocks or adding the I/F circuit to any of the circuit block. A circuit for outputting an operation enable for a receiving side is generated automatically between a plurality of blocks operating with different frequencies, whereby the use of the circuit blocks is expanded in spite of the different frequencies. Further, the design of a large-scale system is performed efficiently by automatically generating a desired waveform by a simple editing operation, generating a desired signal waveform by forming a combinational circuit of signals in the circuit block, and automatically generating a logic synthesis script.
    • 通过自动生成I / F电路,可以快速构建允许电路块之间进行信号传输的系统,以响应于定时关系的调整和GUI上的波形的修改,并自动将I / F电路插入电路 块或将I / F电路添加到任何电路块。 用于输出用于接收侧的操作使能的电路在以不同频率操作的多个块之间自动生成,由此尽管频率不同,电路块的使用也被扩展。 此外,通过简单的编辑操作自动生成期望的波形,通过形成电路块中的信号的组合电路,生成期望的信号波形,自动生成逻辑综合脚本,有效地执行大规模系统的设计。
    • 3. 发明授权
    • Method of designing semiconductor integrated circuit device
    • 半导体集成电路器件设计方法
    • US06826731B2
    • 2004-11-30
    • US10330083
    • 2002-12-30
    • Masayoshi TojimaMasahiro OhashiMana HamadaMiki AritaYuji Sugisawa
    • Masayoshi TojimaMasahiro OhashiMana HamadaMiki AritaYuji Sugisawa
    • G06F1750
    • G06F17/5045
    • A system which allows signal transmission between circuit blocks is constructed promptly by automatically generating an I/F circuit in response to the adjustment of a timing relationship and to a modification in a waveform on a GUI and automatically inserting the I/F circuit between the circuit blocks or adding the I/F circuit to any of the circuit block. A circuit for outputting an operation enable for a receiving side is generated automatically between a plurality of blocks operating with different frequencies, whereby the use of the circuit blocks is expanded in spite of the different frequencies. Further, the design of a large-scale system is performed efficiently by automatically generating a desired waveform by a simple editing operation, generating a desired signal waveform by forming a combinational circuit of signals in the circuit block, and automatically generating a logic synthesis script.
    • 通过自动生成I / F电路,可以快速构建允许电路块之间进行信号传输的系统,以响应于定时关系的调整和GUI上的波形的修改,并自动将I / F电路插入电路 块或将I / F电路添加到任何电路块。 用于输出用于接收侧的操作使能的电路在以不同频率操作的多个块之间自动生成,由此尽管频率不同,电路块的使用也被扩展。 此外,通过简单的编辑操作自动生成期望的波形,通过形成电路块中的信号的组合电路,生成期望的信号波形,自动生成逻辑综合脚本,有效地执行大规模系统的设计。
    • 6. 发明授权
    • Method for producing group III nitride compound semiconductor element
    • 制备III族氮化物半导体元件的方法
    • US08324083B2
    • 2012-12-04
    • US12585969
    • 2009-09-29
    • Toshiya UemuraMasanobu AndoTomoharu ShirakiMasahiro OhashiNaoki ArazoeRyohei Inazawa
    • Toshiya UemuraMasanobu AndoTomoharu ShirakiMasahiro OhashiNaoki ArazoeRyohei Inazawa
    • H01L21/00H01L21/30H01L21/46
    • H01L33/0079H01L33/0095H01L33/44H01L33/46
    • A method for producing a Group III nitride compound semiconductor element includes growing an epitaxial layer containing a Group III nitride compound semiconductor using a different kind of substrate as an epitaxial growth substrate, adhering a supporting substrate to the top surface of the epitaxial growth layer through a conductive layer, and then removing the epitaxial growth substrate by laser lift-off. Before adhesion of the epitaxial layer and the supporting substrate, a first groove that at least reaches an interface between the bottom surface of the epitaxial layer and the epitaxial growth substrate from the top surface of the epitaxial layer formed on the epitaxial growth substrate and acts as an air vent communicating with the outside of a wafer when the epitaxial layer and the supporting substrate are joined to each other. Next, the epitaxial layer is divided into each chip by separating the epitaxial growth substrate by laser lift-off, and then removing the epitaxial layer serving as the outer periphery of each chip. Next, the outer peripheral side surface of the epitaxial layer of each chip is at least completely covered with an insulating protective film. Next, the supporting substrate is separated into each chip.
    • 制造III族氮化物化合物半导体元件的方法包括:使用不同种类的基板作为外延生长基板,生长含有III族氮化物化合物半导体的外延层,将支撑基板通过外延生长层的上表面附着在外延生长层的顶面 导电层,然后通过激光剥离去除外延生长衬底。 在外延层和支撑基板的粘合之前,形成至少到达外延层的底表面与外延生长衬底之间的界面的第一沟槽,该外延生长衬底从形成在外延生长衬底上的外延层的顶表面起作用 当所述外延层和所述支撑基板彼此接合时与所述晶片的外部连通的通风口。 接下来,通过用激光剥离分离外延生长衬底,然后除去作为每个芯片的外周的外延层,将外延层分成每个芯片。 接下来,每个芯片的外延层的外周侧表面至少完全被绝缘保护膜覆盖。 接下来,将支撑基板分离成各个芯片。
    • 9. 发明申请
    • Test Apparatus
    • 测试仪器
    • US20090072138A1
    • 2009-03-19
    • US12173038
    • 2008-07-15
    • Katsunori HIRANOTadanobu TobaMasahiro OhashiMasashi Wada
    • Katsunori HIRANOTadanobu TobaMasahiro OhashiMasashi Wada
    • G01N23/00
    • G01N23/2251H01J2237/221H01J2237/2817
    • A scan control unit for generating two-dimensional coordinates for performing a scan with an electron beam of an electron scanning microscope is provided with first and second transforming units for transforming coordinates in the horizontal (X) direction and the vertical (V) direction. An area to be tested in a sample is scanned with an electron beam in an arbitrary direction. As the first and second transforming units, small-capacity transformation tables (LUTs) capable of operating at high speed in each of the horizontal (X) direction and the vertical (Y) direction are used. By also using a large-capacity transformation table (LUT) that stores coordinate transformation data corresponding to plural scan types, a test apparatus compatible with the plural scan types, having multiple functions, and capable of performing high-speed scan control is realized.
    • 用于产生用电子扫描显微镜的电子束执行扫描的二维坐标的扫描控制单元设置有用于变换水平(X)方向和垂直(V)方向上的坐标的第一和第二变换单元。 用任意方向的电子束扫描样品中要测试的区域。 作为第一变换单元和第二变换单元,使用能够在水平(X)方向和垂直(Y)方向中的每一个中高速运转的小容量变换表(LUT)。 通过使用存储与多种扫描类型相对应的坐标变换数据的大容量变换表(LUT),实现具有多种功能,能够执行高速扫描控制的具有多种扫描类型的测试装置。