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    • 8. 发明授权
    • Method for producing electro-thermal transducer
    • 电热转换器的制造方法
    • US4545881A
    • 1985-10-08
    • US552013
    • 1983-11-16
    • Akira ShinmiMasahisa FukuiToshitami HaraYoshiaki ShiratoYoshioki Hajimoto
    • Akira ShinmiMasahisa FukuiToshitami HaraYoshiaki ShiratoYoshioki Hajimoto
    • H01C7/00H01L49/02H05B3/12H05B1/00
    • H05B3/12H01C7/006H01L49/02
    • An electro-thermal transducer is composed of a substrate, a resistive heater element formed on the substrate, and electrically conductive members to supply electric power to the resistive heater element, wherein the resistive heater element contains a metal boride as the principal constituent. The transducer of this construction is capable of selecting its resistivity to a high value and causing a large electric current to flow in the form of short pulses for the purpose of high speed printing, hence it is stable against repetitive pulse applications over a long period of time. The method of producing the transducer is by forming a layer of a resistive heater element including a metal boride on a substrate of an electrically insulative material by conducting a reactive sputtering reaction between a target of an elemental form of the metal and diborane gas; and then applying to the resistive heater element an electrically conductive member for supplying the resistive heater element with electric power.
    • 电热换能器由基板,形成在基板上的电阻加热元件和向电阻加热元件供电的导电元件组成,其中电阻加热器元件含有金属硼化物作为主要成分。 该结构的传感器能​​够将其电阻率选择为高值,并且为了高速打印的目的,导致大电流以短脉冲的形式流动,因此其对于长时间的重复脉冲应用是稳定的 时间。 制造换能器的方法是通过在元素形式的金属和乙硼烷气体的靶之间进行反应性溅射反应,在电绝缘材料的基板上形成包括金属硼化物的电阻加热元件层; 然后向电阻加热器元件施加用于向电阻加热器元件供电的导电构件。