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1. 发明授权

US06744054B2 Evacuation use sample chamber and circuit pattern forming apparatus using the same 有权
标题翻译：疏散使用样品室和使用其的电路图案形成装置
公开(公告)号：US06744054B2
公开(公告)日：2004-06-01
申请号：US10002144
申请日：2001-12-05
申请人： Masaki Mizuochi , Yoshimasa Fukushima , Mitsuru Inoue
发明人： Masaki Mizuochi , Yoshimasa Fukushima , Mitsuru Inoue
IPC分类号： G21K508
CPC分类号： H01J37/18 , H01J37/20
摘要： An evacuation use sample chamber is constituted by a top table 21 which is provided with a recessed portion disposed in a sample chamber main body 10 and for mounting a sample 8 and a groove portion surrounding the recessed portion; a stage 20 which holds the top table 21 and is displaceable in front and back, right and left and up and down directions together with the top table 21; a sample chamber cover 11 which covers above the sample chamber main body 10 including the top table 21; and an evacuation use pipe 21C which communicates with the groove portion and evacuates gas between the bottom face of the sample chamber cover 11 and the top face of the top table 21 including the sample 8. Thereby, an evacuation use sample chamber which performs a stable evacuation and keeps around a sample at a predetermined high vacuum and a circuit pattern forming apparatus which permits a highly accurate pattern drawing over the entire region of the sample are provided.
摘要翻译：排气用样品室由顶台21构成，顶台21设置有设置在样品室主体10中的凹部，并且用于安装样品8和围绕凹部的槽部; 保持顶台21并与顶台21一起在前后左右上下方向上移动的台架20; 样品室盖11，其覆盖包括顶台21的样品室主体10的上方; 以及与槽部连通并在样品室盖11的底面与包含样品8的顶台21的顶面之间排出气体的排气用管21C。由此，进行稳定的排气用样品室抽出并保持预定的高真空下的样品，并且提供允许在样品的整个区域上进行高精度图案绘制的电路图案形成装置。

2. 发明授权

US06730916B1 Electron beam lithography apparatus 有权
标题翻译：电子束光刻设备
公开(公告)号：US06730916B1
公开(公告)日：2004-05-04
申请号：US09691234
申请日：2000-10-19
申请人： Hiroshi Tsuji , Mitsuru Inoue , Norio Saitou , Yasuhiro Someda , Yoshimasa Fukushima
发明人： Hiroshi Tsuji , Mitsuru Inoue , Norio Saitou , Yasuhiro Someda , Yoshimasa Fukushima
IPC分类号： H01J3720
CPC分类号： H01J37/09 , H01J37/20 , H01J2237/3175 , H02K11/01 , H02K41/03
摘要： An electron beam lithography apparatus of the present invention prevents the electron beam trajectory from being affected by a leakage magnetic field from a permanent magnet which is used as a sample stage guide/driving mechanism. In this electron beam lithography apparatus, an air bearing guide is used as a sample stage guide mechanism, and the stage posture is held by attracting the stage floating on a surface plate to the surface plate side by the permanent magnet. To avoid the leakage magnetic field from the permanent magnet from affecting the electron beam irradiation position on the sample, the permanent magnet is magnetically shielded by a shield member. In addition, to reduce variations in magnetic field above the sample, which are generated when the shield member moves in a leakage magnetic field from the electron lens, another shield member is arranged under the electron lens.
摘要翻译：本发明的电子束光刻设备防止电子束轨迹受到用作样品台引导/驱动机构的永久磁铁的泄漏磁场的影响。在该电子束光刻装置中，使用空气轴承引导件作为样品台引导机构，通过永久磁铁吸引在表面板上浮动到台板侧的台架来保持台阶姿态。为了避免来自永磁体的泄漏磁场影响样品上的电子束照射位置，永磁体被屏蔽部件磁屏蔽。此外，为了减小当屏蔽部件在来自电子透镜的泄漏磁场中移动时产生的样品上方的磁场的变化，在电子透镜下方设置有另一个屏蔽部件。

3. 发明申请

US20100315803A1 OPTICAL SHEET, SURFACE LIGHT SOURCE DEVICE AND TRANSMISSION-TYPE DISPLAY DEVICE 有权
标题翻译：光学片，表面光源器件和透射型显示器件
公开(公告)号：US20100315803A1
公开(公告)日：2010-12-16
申请号：US12918834
申请日：2009-07-17
申请人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
发明人： Mitsuru Inoue , Amane Koike , Akiko Tomita , Hiroshi Kojima , Akinobu Ushiyama , Satoshi Goishihara
IPC分类号： G02F1/13357 , F21V5/04 , F21V5/00
CPC分类号： G02B3/0068 , G02B5/0231 , G02B5/0278 , G02F1/1303 , G02F2001/133607
摘要： An optical sheet including a fly-eye lens is provided. This optical sheet can exhibit excellent optical functions, including desired light condensing ability, light diffusing ability and ability for rendering a light source image substantially invisible, as well as can be produced with high reproducibility. In one example, the optical sheet (40) includes: a sheet-like main body (45); first unit shaped elements (50) arranged on one surface (46) of the main body and constituting together the fly-eye lens; and second unit shaped elements (55) arranged on the one surface of the main body and extending in parallel with one direction on the sheet surface of the main body. In this case, the first unit shaped elements are arranged, with a space provided therebetween, on the one surface of the main body, while the second unit shaped elements are arranged, between the first unit shaped elements, on the one surface of the main body.
摘要翻译：提供了包括飞眼镜片的光学片。该光学片可以表现出优异的光学功能，包括期望的聚光能力，光漫射能力和使光源图像基本上不可见的能力，并且可以以高再现性制造。在一个示例中，光学片（40）包括：片状主体（45）; 第一单元形元件（50），布置在主体的一个表面（46）上，并构成飞眼透镜; 以及第二单元形元件（55），其布置在主体的一个表面上并且在主体的片材表面上与一个方向平行地延伸。在这种情况下，第一单元形状元件在主体的一个表面上设置有间隔开的空间，而第二单元形状元件布置在第一单元形状元件之间，主体的一个表面上身体。

4. 发明授权

US07454216B2 in-facility information provision system and in-facility information provision method 失效
标题翻译：设施内信息提供系统和设施信息提供方法
公开(公告)号：US07454216B2
公开(公告)日：2008-11-18
申请号：US11071342
申请日：2005-03-04
申请人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
发明人： Hiroaki Shikano , Naohiko Irie , Atsushi Ito , Junji Inaba , Mitsuru Inoue , Kazutaka Sakai
IPC分类号： H04Q7/20
CPC分类号： G06Q30/00
摘要： To enable an appropriate change of a path according to a situation of a user and a situation of a target store and the path without having a special terminal when the user of a facility utilizes the target store and an appropriate guidance, spatial recognition nodes respectively provided with a sensor and information processing equipment are installed in each location in the facility and connected via a network. The nodes recognize the position, the action and the behavior of a user of the facility. A server controlling a system manages the recognition result and constantly grasps the situation of the user. The situation of the user is recognized by the node installed at a destination and on a path, and notified to the server. The server displays appropriate path information based on the recognition result on any of plural information displays installed in the facility when the user approaches.
摘要翻译：为了在设施的用户利用目标存储和适当的指导的情况下，根据用户的情况和目标存储的情况以及路径而不具有特殊终端的路径的适当改变，分别提供了空间识别节点传感器和信息处理设备安装在设施的每个位置并通过网络连接。节点识别设施的用户的位置，动作和行为。控制系统的服务器管理识别结果并且不断掌握用户的情况。用户的情况由安装在目的地和路径上的节点识别，并通知给服务器。当用户接近时，服务器基于在设施中安装的多个信息显示器中的任一个上的识别结果来显示适当的路径信息。

5. 发明申请

US20080158530A1 EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译：曝光装置和装置制造方法
公开(公告)号：US20080158530A1
公开(公告)日：2008-07-03
申请号：US11959197
申请日：2007-12-18
申请人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
发明人： Hirofumi Fujii , Hiroshi Ito , Mitsuru Inoue
IPC分类号： G03B27/42
CPC分类号： G03B27/58 , G03F7/70725 , G03F7/709
摘要： An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.
摘要翻译：包括投影光学系统并经配置以经由投影光学系统将基板曝光于光的曝光装置包括：支撑构件，用于支撑投影光学系统;由支撑件支撑并可相对于支撑件移动的物体;致动器，物体，被配置为检测物体和支撑体之间的相对位置的检测器，以及被配置为基于检测器的输出执行致动器的控制以使物体跟随支撑件的控制器。控制器被配置为基于检测器的输出与控制并行地执行对支撑件的振动的估计，以使对象遵循支撑。

6. 发明申请

US20080068603A1 ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：防振装置，曝光装置和装置制造方法
公开(公告)号：US20080068603A1
公开(公告)日：2008-03-20
申请号：US11846904
申请日：2007-08-29
申请人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
发明人： Ryo Nawata , Mitsuru Inoue , Hiroshi Ito , Makoto Mizuno
IPC分类号： G01N21/01 , G03B27/62 , H01S4/00
CPC分类号： G03B27/53 , G03F7/70833 , G03F7/709 , Y10T29/49002
摘要： An anti-vibration apparatus includes a target object, a reference object, a measuring device which measures the position of the target object relative to the reference object, a driving mechanism to drive the target object based on the measurement result obtained by the measuring device, a Lorentz's force actuator which supports the reference object, and a power supply device which supplies a constant current to the Lorentz's force actuator. The actuator which supports the reference object uses a Lorentz's force actuator or an actuator which supports the reference object by the pressure of a gas.
摘要翻译：防振装置包括目标物体，参考物体，测量目标物体相对于基准物体的位置的测量装置，基于由测量装置获得的测量结果来驱动目标物体的驱动机构，支撑参考对象的洛伦兹力致动器，以及向洛伦兹力致动器提供恒定电流的电源装置。支撑参考对象的致动器使用洛仑兹力致动器或通过气体压力支撑参考对象的致动器。

7. 发明申请

US20060098320A1 Storage control device and method for detecting write errors to storage media 失效
公开(公告)号：US20060098320A1
公开(公告)日：2006-05-11
申请号：US11022781
申请日：2004-12-28
申请人： Tsutomu Koga , Mitsuru Inoue
发明人： Tsutomu Koga , Mitsuru Inoue
IPC分类号： G11B5/09
CPC分类号： G06F11/1004 , G06F12/0866
摘要： There are provided a cache region that stores write data from a host device, storage media, a data storage region for the storage media, and a comparison unit. A first comparison object is generated for N items of write data on the cache region and the N items of write data are transferred to the data storage region. Write data is read from a designated address of the data storage region and this write data is written to the storage media. When N items of write data have been read, a second comparison object is generated in respect of the write data. The comparison unit compares the first comparison object and the second comparison object, and if the result of the comparison is a mismatch, the N items of write data on the cache region are again transferred to the data storage region.

8. 发明授权

US06320645B1 Stage system and exposure apparatus, and device manufacturing method using the same 有权
标题翻译：舞台系统和曝光装置以及使用其的装置制造方法
公开(公告)号：US06320645B1
公开(公告)日：2001-11-20
申请号：US09324652
申请日：1999-06-03
申请人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
发明人： Mitsuru Inoue , Nobushige Korenaga , Yukio Tokuda
IPC分类号： G03B2742
CPC分类号： G03F7/70691 , G03B27/42 , Y10T74/20354
摘要： A stage system includes a movable stage, a guide mechanism for guiding the stage with respect to a predetermined direction, and a preloading mechanism for producing a magnetic attraction force with which the rigidity of the guide mechanism can be increased, wherein a portion to be attracted by the magnetic attraction force is made of a material having a product of a residual magnetic flux density Br and a holding force Hc in a hysteresis curve, not greater than 100 J/m3, this being very effective to reduce the hysteresis force, which is resistance due to the residual magnetic force, as compared with the preloading attraction force, whereby high precision positioning of the stage is accomplished.
摘要翻译：舞台系统包括可动台，用于相对于预定方向引导舞台的引导机构，以及用于产生引力机构的刚性的磁吸引力的预加载机构，其中吸引的部分通过磁吸引力由具有残余磁通密度Br和滞后曲线中的保持力Hc的乘积的材料制成，不大于100J / m 3，这对减小滞后力是非常有效的，这是非常有效的与预载吸引力相比，由于剩余磁力产生的阻力，从而实现了台的高精度定位。

9. 发明授权

US5301933A Sample moving device 失效
标题翻译：样品移动装置
公开(公告)号：US5301933A
公开(公告)日：1994-04-12
申请号：US71225
申请日：1993-06-02
申请人： Mitsuru Inoue
发明人： Mitsuru Inoue
IPC分类号： B23Q5/40 , F16H25/24 , B23Q3/18
CPC分类号： F16H25/24 , B23Q5/408 , F16H2025/2445
摘要： A moving device includes a moving table for mounting an object thereon and for moving the object, a guiding mechanism for regulating the movement of the moving table, a driving mechanism for generating a force to move the moving table, and a transmission mechanism for transmitting the driving force to the moving table. The transmission mechanism includes at least one set of parallel leaf springs having an oscillation-damping material disposed therebetween.
摘要翻译：移动装置包括用于在其上安装物体并用于移动物体的移动台，用于调节移动台的移动的引导机构，用于产生移动移动台的力的驱动机构，以及用于传送移动台的传动机构驱动力到移动台。传动机构包括至少一组平行的板簧，其中设置有摆动阻尼材料。

10. 发明申请

US20090295113A1 VEHICULAR SUSPENSION ARM 失效
标题翻译：车用悬挂臂
公开(公告)号：US20090295113A1
公开(公告)日：2009-12-03
申请号：US12063601
申请日：2006-08-16
申请人： Mitsuru Inoue , Fumio Kikuchi , Yutaka Hozumi , Jun Matsuike
发明人： Mitsuru Inoue , Fumio Kikuchi , Yutaka Hozumi , Jun Matsuike
IPC分类号： B60G7/00
CPC分类号： B60G7/001 , B60G2200/144 , B60G2204/129 , B60G2204/1431 , B60G2206/014 , B60G2206/017 , B60G2206/122 , B60G2206/722 , B60G2206/8103 , B60G2206/8201
摘要： A vehicular suspension arm is provided in which an arm main body (1) includes a main plate (2) press-formed as a main part of the arm main body and having a short cylindrical part (EB) provided integrally with one end by flanging, and a reinforcing plate (H) superimposed on one of upper and lower faces of the main plate (2) and reinforcing the main plate (2). The reinforcing plate (H) has an eye-shaped head part (Ha) formed in an annular shape and arranged coaxially with the short cylindrical part (EB), and a tail part (Hb) extending integrally from the eye-shaped head part (Ha) along the longitudinal direction of the main plate (2), is formed from a single plate material that is thicker than the main plate (2), and has at least the tail part (Hb) welded to the main plate (2). A bush press-fit portion (P1) is formed from an inner peripheral face of the eye-shaped head part (Ha) and an inner peripheral face of the short cylindrical part (EB). This ensures that the cross-sectional shape of a transition section from the bush press-fit portion to the plate-type arm main body is adequate, thus enabling the rigidity and strength required for the transition section to be easily guaranteed and, furthermore, it becomes possible to meet a requirement for increasing the strength of the arm without specially increasing the space around the outer periphery of the bush press-fit portion.
摘要翻译：提供一种车辆悬架臂，其中臂主体（1）包括主压板（2）作为臂主体的主要部分，该主板（2）具有通过折边与一端一体设置的短圆柱形部分（EB），以及叠加在主板（2）的上表面和下表面之一上并加强主板（2）的加强板（H）。所述加强板（H）具有与所述短圆筒部（EB）同轴配置的环状的眼形头部（Ha），和从所述眼形头部（ Ha）沿着主板（2）的纵向方向由与板（2）相比厚的单个板材形成，并且至少具有焊接到主板（2）的尾部（Hb）。衬套压入部（P1）由眼形头部（Ha）的内周面和短圆筒部（EB）的内周面形成。这确保了从衬套压合部到板式臂主体的过渡部的横截面形状是足够的，因此能够容易地保证过渡部所需的刚性和强度，此外，可以满足增加臂的强度的要求，而不会特别地增加衬套压合部的外周周围的空间。

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