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1. 发明授权

US08810770B2 Exposure apparatus and article manufacturing method 有权
标题翻译：曝光装置和制品制造方法
公开(公告)号：US08810770B2
公开(公告)日：2014-08-19
申请号：US13157618
申请日：2011-06-10
申请人： Yuji Maehara , Nobushige Korenaga
发明人： Yuji Maehara , Nobushige Korenaga
IPC分类号： G03B27/52 , G03B27/58 , G03B27/60
CPC分类号： G03F7/70875 , B82Y10/00 , B82Y40/00 , H01J37/20 , H01J37/3174 , H01J2237/2001 , H01J2237/2482
摘要： An apparatus for exposing a substrate to an energy in a vacuum includes a substrate stage having a mirror surface; a mirror configured to deflect a light into a Z axis direction; a measuring device configured to measure the stage position in the Z axis direction with the light in which the mirror surface is irradiated; a driving device configured to move the measuring device so that the mirror surface is irradiated with the light; an optical system configured to project the energy onto the substrate; and a cooling device including a radiation plate (arranged between the optical system and the stage in the Z axis direction and having a first opening which the energy passes and a second opening which the light passes), including a cooler configured to cool the first radiation plate, and configured to perform radiation cooling of the substrate.
摘要翻译：用于将衬底暴露于真空中的能量的装置包括具有镜面的衬底台; 配置为将光偏转到Z轴方向的反射镜; 测量装置，被配置为用照射所述镜面的光来测量所述Z轴方向上的所述平台位置; 驱动装置，其构造成使所述测量装置移动，使得所述镜面被所述光照射; 配置成将能量投射到基板上的光学系统; 以及冷却装置，其包括辐射板（布置在所述光学系统和所述台架之间的Z轴方向上并且具有所述能量通过的第一开口和所述光通过的第二开口），所述冷却装置包括冷却器，所述冷却器被配置为冷却所述第一辐射并且被配置为执行基板的辐射冷却。

2. 发明授权

US07282819B2 Stage apparatus, exposure apparatus, and device manufacturing method 失效
标题翻译：舞台装置，曝光装置和装置的制造方法
公开(公告)号：US07282819B2
公开(公告)日：2007-10-16
申请号：US10983573
申请日：2004-11-09
申请人： Nobushige Korenaga
发明人： Nobushige Korenaga
IPC分类号： H02K41/00 , G03B27/42
CPC分类号： H02K41/03 , G03F7/70758 , H02K2201/18 , Y10T74/20201
摘要： A stage apparatus in which support units supporting a counter-mass surface plate on a reference surface each include a first permanent magnet disposed on one of the surface plate and the reference surface, and a pair of second permanent magnets disposed on the other of the surface plate and the reference surface so as to sandwich the first permanent. This stage apparatus is arranged to satisfy the following relations: (1) [(stroke of movement of the stage in a first direction)×(mass of moving portion of the stage in the first direction)/(mass of surface plate)]
摘要翻译：其中支撑在基准面上的反质量面板的支撑单元的平台装置包括设置在所述表面板和参考表面之一上的第一永磁体和设置在所述表面的另一个表面上的一对第二永磁体板和参考表面，以便夹持第一永久物。该台装置被配置为满足以下关系：（1）[（第一方向的台阶的移动行程）×（第一方向的台的移动部的质量）/（表面板的质量）] [第一方向上的第一和第二永久磁铁之间的空间总和]; 和/或（2）[（阶段在第二方向的移动行程）x（阶段在第二方向的移动部分的质量）/（表面板的质量）] <[ 第二永久磁铁面对第一永久磁铁的第二方向]。

3. 发明授权

US07075197B2 Aligning apparatus, exposure apparatus, and device manufacturing method 失效
标题翻译：对准装置，曝光装置和装置制造方法
公开(公告)号：US07075197B2
公开(公告)日：2006-07-11
申请号：US11068784
申请日：2005-03-02
申请人： Nobushige Korenaga
发明人： Nobushige Korenaga
IPC分类号： H02K41/00 , H02K7/09
CPC分类号： G03F7/70758 , H02K3/47 , H02K16/02 , H02K41/031 , H02K2201/18
摘要： An aligning apparatus includes a moving member, a magnetic member arranged vertically above the moving member, a stator unit which is arranged vertically below the moving member and has a plurality of coreless coils, a first magnet unit which is provided to the moving member and generates a force with the magnetic member, and a second magnet unit which is provided to the moving member and generates a force with the stator unit. The aligning apparatus has no coils between the magnetic member and the moving member.
摘要翻译：一种定位装置，包括移动构件，垂直于移动构件上方布置的磁性构件，定子单元，其垂直设置在移动构件的下方并具有多个无芯线圈;第一磁体单元，设置在移动构件上，并产生具有磁性构件的力，以及第二磁体单元，其设置在所述移动构件上并与所述定子单元产生力。对位装置在磁性构件和移动构件之间没有线圈。

4. 发明授权

US07057710B2 Stage system including fine-motion cable unit, exposure apparatus, and method of manufacturing device 失效
标题翻译：舞台系统包括微动电缆单元，曝光装置及制造方法
公开(公告)号：US07057710B2
公开(公告)日：2006-06-06
申请号：US10893932
申请日：2004-07-20
申请人： Nobushige Korenaga
发明人： Nobushige Korenaga
IPC分类号： G03B27/58 , G03B27/62
CPC分类号： G03F7/70716 , G03F7/70758
摘要： A stage system that reduces disturbances caused by deformation of a cable and achieves high-precision positioning. The stage system includes a substrate stage movable in at least two axial directions, a fine-motion cable unit that holds a cable and finely moves in at least two axial directions, and a coarse-motion cable unit that coarsely moves the fine-motion cable unit in at least one axial direction.
摘要翻译：一种降低电缆变形引起的干扰并实现高精度定位的舞台系统。舞台系统包括可沿至少两个轴向移动的衬底台，保持电缆并沿至少两个轴向精细移动的精细运动电缆单元，以及粗动电缆单元，其将细微运动电缆在至少一个轴向方向上单元。

5. 发明申请

US20050194843A1 Aligning apparatus, exposure apparatus, and device manufacturing method 失效
标题翻译：对准装置，曝光装置和装置制造方法
公开(公告)号：US20050194843A1
公开(公告)日：2005-09-08
申请号：US11068784
申请日：2005-03-02
申请人： Nobushige Korenaga
发明人： Nobushige Korenaga
IPC分类号： H01L21/68 , G03F7/20 , H01L21/027 , H02K9/19 , H02K41/03 , H02K41/00
CPC分类号： G03F7/70758 , H02K3/47 , H02K16/02 , H02K41/031 , H02K2201/18
摘要： A aligning apparatus includes a moving member, a magnetic member arranged vertically above the moving member, a stator unit which is arranged vertically below the moving member and has a plurality of coreless coils, a first magnet unit which is provided to the moving member and generates a force with the magnetic member, and a second magnet unit which is provided to the moving member and generates a force with the stator unit. High accurate aligning can be performed while suppressing coil heat generation.
摘要翻译：定位装置包括移动构件，垂直于移动构件上方布置的磁性构件，定子单元，其垂直地设置在移动构件下方并具有多个无芯线圈;第一磁体单元，设置在移动构件上并产生具有磁性构件的力，以及第二磁体单元，其设置在所述移动构件上并与所述定子单元产生力。可以在抑制线圈发热的同时进行高精度对准。

6. 发明授权

US06903468B2 Moving stage device in exposure apparatus 失效
标题翻译：曝光装置中的舞台装置
公开(公告)号：US06903468B2
公开(公告)日：2005-06-07
申请号：US10637524
申请日：2003-08-11
申请人： Nobushige Korenaga
发明人： Nobushige Korenaga
IPC分类号： H01L21/027 , G03B27/48 , H02K33/00 , H02K41/03 , H02K7/09 , H02K41/00
CPC分类号： G03B27/48 , G03F7/70758
摘要： Disclosed is a stage device by which high precision motion and high speed motion can be accomplished simultaneously. The stage device includes a stage, a repulsive magnet unit for accelerating and/or decelerating the stage with respect to a movement direction, and a magnetic driving system for controlling the position of the stage. The repulsive force generator has (i) a repulsive stator, as a set magnet, including a plurality of magnets disposed along a direction orthogonal or substantially orthogonal to the movement direction, with a spacing therebetween while different poles of them are opposed to each other, and (ii) a repulsive movable element, as an insert magnet, to be mountably and demountably inserted into the spacing and being disposed in relation to the repulsive stator so that the same poles are opposed to each other.
摘要翻译：公开了一种能够同时实现高精度运动和高速运动的舞台装置。舞台装置包括舞台，用于相对于移动方向加速和/或减速舞台的排斥磁体单元，以及用于控制舞台位置的磁驱动系统。排斥力发生器具有：（i）作为集磁体的排斥性定子，包括沿着与移动方向正交或大致正交的方向配置的多个磁体，并且其间的间隔彼此相对，和（ii）作为插入磁体的排斥可移动元件可安装和拆卸地插入间隔中并相对于排斥定子设置，使得相同的极彼此相对。

7. 发明授权

US06864602B2 Linear motor, stage apparatus, and exposure apparatus 有权
标题翻译：直线电机，平台装置和曝光装置
公开(公告)号：US06864602B2
公开(公告)日：2005-03-08
申请号：US10265440
申请日：2002-10-07
申请人： Nobushige Korenaga
发明人： Nobushige Korenaga
IPC分类号： G03F7/20 , H02K41/03 , H02K41/00
CPC分类号： G03F7/70758 , H02K41/031
摘要： A linear motor includes a coil unit and a magnet unit. The coil unit includes an inner yoke extending in a moving direction and a coil arranged outside the inner yoke. The magnet includes a magnet arranged outside the coil. Each of the inner yoke, coil, and magnet includes a plurality of flat portions, the plurality of flat portions of the inner yoke are parallel to an axis of the coil. Each flat portion of the inner yoke is parallel to the corresponding flat portion of the coil and the corresponding flat portion of the magnet. A length of the inner yoke in a direction along the axis of the coil is longer than a length of the magnet in the direction along the axis of the coil, and the inner yoke has a prismatic structure formed by the plurality of flat portions supported by a support member.
摘要翻译：线性电动机包括线圈单元和磁体单元。线圈单元包括沿移动方向延伸的内磁轭和布置在内磁轭外侧的线圈。磁体包括布置在线圈外部的磁体。内磁轭，线圈和磁体中的每一个包括多个平坦部分，内磁轭的多个平坦部分平行于线圈的轴线。内轭铁的每个平坦部分平行于线圈的相应平坦部分和磁体的相应平坦部分。内轭铁沿着线圈轴线的方向的长度比沿着线圈轴线方向的磁体长度长，内磁轭具有由多个平坦部分形成的棱柱结构，支持成员

8. 发明授权

US06479991B1 Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage 失效
标题翻译：驱动机构的线圈单元与舞台基本上同步地移动的舞台机构，曝光装置和装置制造方法
公开(公告)号：US06479991B1
公开(公告)日：2002-11-12
申请号：US09283191
申请日：1999-04-01
申请人： Nobushige Korenaga
发明人： Nobushige Korenaga
IPC分类号： G01R3300
CPC分类号： G03F7/70758
摘要： A stage system includes a movable stage, a first driving mechanism, having magnet and a coil unit, for moving the stage along a predetermined direction, the coil unit including a coil and a yoke, wherein the magnet is connected to the stage side, and a second driving mechanism for moving the coil unit along the predetermined direction. While a position or a speed of the stage is controlled as the stage is driven through the first driving mechanism, the coil unit is moved substantially in synchronism with the stage.
摘要翻译：舞台系统包括：可动台，具有磁铁和线圈单元的第一驱动机构，用于沿预定方向移动舞台，线圈单元包括线圈和轭，其中磁体连接到舞台侧;以及用于沿预定方向移动线圈单元的第二驱动机构。当舞台通过第一驱动机构驱动时，舞台的位置或速度被控制，线圈单元基本上与舞台同步地移动。

9. 发明授权

US06414742B1 Stage apparatus, and exposure apparatus and device manufacturing method using the same 有权
标题翻译：舞台装置，曝光装置及其制造方法
公开(公告)号：US06414742B1
公开(公告)日：2002-07-02
申请号：US09209495
申请日：1998-12-11
申请人： Nobushige Korenaga , Shuichi Yabu
发明人： Nobushige Korenaga , Shuichi Yabu
IPC分类号： G03B2742
CPC分类号： G03F7/70691 , G03B27/42 , G03F7/709
摘要： A stage apparatus includes a movable stage, a base supporting the stage on a reference plane, a driving mechanism for driving the stage, and a rotor acting on the stage and producing a moment so as to reduce a reaction force produced along with the movement of the stage. The rotor also reduces the reaction force produced upon movement of the stage by the movement of the base and the rotation of the rotor.
摘要翻译：舞台装置包括可移动台，支撑在参考平面上的台架，用于驱动舞台的驱动机构，以及作用在舞台上的转子，并产生一个力矩，以便减少随着运动的产生而产生的反作用力舞台。转子还通过基座的运动和转子的旋转减小了台架运动时产生的反作用力。

10. 发明授权

US5537186A Movable stage mechanism and exposure apparatus using the same 失效
标题翻译：活动台机构及使用其的曝光装置
公开(公告)号：US5537186A
公开(公告)日：1996-07-16
申请号：US282328
申请日：1994-07-29
申请人： Nobushige Korenaga , Ryuichi Ebinuma
发明人： Nobushige Korenaga , Ryuichi Ebinuma
IPC分类号： B23Q1/60 , B23Q1/72 , G03F7/20 , G03B27/42 , H01L21/02
CPC分类号： G03F7/70716 , B23Q1/601 , B23Q1/72 , B23Q17/2495
摘要： A movable stage apparatus suitable for a semiconductor exposure apparatus or the like has a stage, a first driving mechanism for moving the stage in a predetermined direction, and a second driving mechanism for moving the stage by a minute amount in the predetermined direction. One of the mover and stator of the second driving mechanism is substantially fixed to the stage and the other is substantially movable with the movement of the stage by the first driving mechanism.
摘要翻译：适用于半导体曝光装置等的可移动平台装置具有台，用于沿预定方向移动台的第一驱动机构和用于沿预定方向微动地移动台的第二驱动机构。第二驱动机构的动子和定子中的一个基本上固定在舞台上，另一个基本上可以随着舞台的移动而被第一驱动机构移动。

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