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1. 发明申请

US20070296936A1 Exposure Apparatus, Exposure Method, and Producing Method of Microdevice 有权
标题翻译：曝光装置，曝光方法和微型装置的制作方法
公开(公告)号：US20070296936A1
公开(公告)日：2007-12-27
申请号：US11661297
申请日：2006-01-24
申请人： Masaki Kato , Kenji Shimizu , Manabu Toguchi , Tomoyuki Watanabe
发明人： Masaki Kato , Kenji Shimizu , Manabu Toguchi , Tomoyuki Watanabe
IPC分类号： G03B27/42
CPC分类号： G03F7/70791 , G03F7/70275 , G03F7/70308
摘要： An exposure apparatus for exposure-transferring an image of a pattern projected through an optical system having a plurality of optical units L1 to L13 onto an object P, comprises a correcting device which corrects a position of at least one of a plurality of images to be projected onto the object P by the plurality of optical units L1 to L13 so that displacements of the optical units L1 to L13 are compensated.
摘要翻译：用于将通过具有多个光学单元L 1至L 13的光学系统投影的图案的图像曝光转印到对象P上的曝光装置包括：校正装置，其校正多个图像中的至少一个图像的位置通过多个光学单元L 1至L 13投射到物体P上，从而补偿光学单元L 1至L 13的位移。

2. 发明授权

US07864293B2 Exposure apparatus, exposure method, and producing method of microdevice 有权
标题翻译：曝光装置，曝光方法及微型装置的制作方法
公开(公告)号：US07864293B2
公开(公告)日：2011-01-04
申请号：US11661297
申请日：2006-01-24
申请人： Masaki Kato , Kenji Shimizu , Manabu Toguchi , Tomoyuki Watanabe
发明人： Masaki Kato , Kenji Shimizu , Manabu Toguchi , Tomoyuki Watanabe
IPC分类号： G03B27/42
CPC分类号： G03F7/70791 , G03F7/70275 , G03F7/70308
摘要： An exposure apparatus for exposure-transferring an image of a pattern projected through an optical system having a plurality of optical units L1 to L13 onto an object P, comprises a correcting device which corrects a position of at least one of a plurality of images to be projected onto the object P by the plurality of optical units L1 to L13 so that displacements of the optical units L1 to L13 are compensated.
摘要翻译：用于将通过具有多个光学单元L1至L13的光学系统投射的图案的图像曝光转印到对象P上的曝光装置包括校正装置，其将多个图像中的至少一个的位置校正为通过多个光学单元L1至L13投影到物体P上，从而补偿光学单元L1至L13的位移。

3. 发明授权

US06873400B2 Scanning exposure method and system 有权
标题翻译：扫描曝光方法和系统
公开(公告)号：US06873400B2
公开(公告)日：2005-03-29
申请号：US09772907
申请日：2001-01-31
申请人： Masaichi Murakami , Masaki Kato , Katsuya Machino , Manabu Toguchi
发明人： Masaichi Murakami , Masaki Kato , Katsuya Machino , Manabu Toguchi
IPC分类号： H01L21/027 , G03F7/20 , G03B27/42 , G03B27/54 , G03B27/72
CPC分类号： G03F7/70066 , G03F7/70275 , G03F7/70358 , G03F7/70475 , G03F7/70791
摘要： It is an object of the present invention to smoothly join divided patterns adjacent to each other in a synchronous moving direction when a mask and a substrate are moved in synchronization, and the divided patterns are joined and picture-synthesized on the substrate. According to the invention, when the mask and the substrate are moved in synchronization with respect to irradiation with an exposing light, the divided patterns of the mask are projected on the substrate, and a plurality of divided patterns adjacent on the substrate are joined and exposed, the divided patterns adjacent to each other in the synchronous moving direction partially overlap each other.
摘要翻译：本发明的一个目的是在掩模和衬底同步移动的同时沿同步移动方向平滑地连接彼此相邻的分割图案，并且分割的图案在衬底上被接合和图像合成。根据本发明，当掩模和衬底相对于曝光光的照射同步地移动时，掩模的划分图案被投射在衬底上，并且在衬底上相邻的多个分割图案被接合并暴露在同步移动方向上彼此相邻的分割图案部分地重叠。

4. 发明申请

US20220397388A1 TEMPERATURE INSENSITIVE DISTRIBUTED STRAIN MONITORING APPARATUS AND METHOD 有权
公开(公告)号：US20220397388A1
公开(公告)日：2022-12-15
申请号：US17343077
申请日：2021-06-09
申请人： Chunshu Zhang , Jie Lin , Masaki Kato
发明人： Chunshu Zhang , Jie Lin , Masaki Kato
IPC分类号： G01B11/16 , H04B10/079 , G02B6/12
摘要： An apparatus for monitoring strain in an optical chip in silicon photonics platform. The apparatus includes a silicon photonics substrate shared with the optical chip. Additionally, the apparatus includes an optical input configured in the silicon photonics substrate to supply an input signal of a single wavelength. The apparatus further includes a first waveguide arm and a second waveguide arm embedded in the silicon photonics substrate to form an on-chip interferometer. The second waveguide arm forms a delay line being disposed at a region in or adjacent to the optical chip. The on-chip interferometer is configured to generate an interference pattern serving as an indicator of strain distributed at the region in or adjacent to the optical chip. The interference pattern is caused by a temperature-independent phase shift at the single wavelength of the interferometer between the first waveguide arm and the second waveguide arm.

5. 发明授权

US10751998B2 Liquid discharge head, liquid discharge device, liquid discharge apparatus, and head module 有权
公开(公告)号：US10751998B2
公开(公告)日：2020-08-25
申请号：US16285428
申请日：2019-02-26
申请人： Masaki Kato
发明人： Masaki Kato
IPC分类号： B41J2/175 , B41J2/145 , B41J2/18 , B41J2/14
摘要： A liquid discharge head includes a plurality of nozzles to discharge a liquid; a plurality of pressure chambers communicating with the plurality of nozzles; a plurality of individual supply channels communicating with the plurality of pressure chambers; a plurality of supply ports communicating with the plurality of individual supply channels; a plurality of common-supply branch channels communicating with two or more of the plurality of individual supply channels through the plurality of supply ports; a common-supply main channel communicating with the plurality of common-supply branch channels; and a plurality of supply-side dampers, each of the plurality of supply-side dampers forming a part of a wall of each of the plurality of common-supply branch channels.

6. 发明授权

US09812929B2 Electric rotating machine 有权
公开(公告)号：US09812929B2
公开(公告)日：2017-11-07
申请号：US14372493
申请日：2012-04-16
申请人： Yuji Shirakata , Dai Nakajima , Masahiko Fujita , Masaki Kato
发明人： Yuji Shirakata , Dai Nakajima , Masahiko Fujita , Masaki Kato
IPC分类号： H02K9/00 , H02K11/04 , H02P27/06 , H02K11/05 , H02K5/08 , H02K5/14 , H02K5/22 , H02K15/12 , H02K11/33
CPC分类号： H02K9/00 , H02K5/08 , H02K5/141 , H02K5/225 , H02K11/046 , H02K11/048 , H02K11/05 , H02K11/33 , H02K15/12 , H02P27/06
摘要： Two or more switching devices (36) and two or more lead frames (41, 42, 43, and 44) are integrally molded by use of a molding resin (37) so that a power module (30) is formed; the power module (30) is made to adhere to a heat sink (32) via an insulating material (31); the power module (30) and the heat sink (32) are fixed to a housing (33) of the power module composite (23); the power module composite (23) is fixed to a case (6) of an electric rotating machine (1) via the housing (33).

7. 发明授权

US09479032B2 Rotary electric machine having non-overlapping power interconnecting part 有权
标题翻译：旋转电机具有不重叠的电力互连部分
公开(公告)号：US09479032B2
公开(公告)日：2016-10-25
申请号：US13877401
申请日：2011-01-06
申请人： Masaki Kato , Masahiko Fujita , Kazuyasu Sakamoto
发明人： Masaki Kato , Masahiko Fujita , Kazuyasu Sakamoto
IPC分类号： H02K11/00 , H02K5/22 , H02K11/04
CPC分类号： H02K11/046 , H02K5/225 , H02K11/048
摘要： The rotary electric machine main body includes: a stator; a rotor that includes a rotating shaft and that is rotatable relative to the stator; and a supporting body that supports the stator and the rotor. The controlling apparatus includes a power circuit portion that is disposed around the rotating shaft, and that converts electric power that is received from the rotary electric machine main body or electric power that is supplied to the rotary electric machine main body between alternating current and direct current. The power circuit portion includes: a power module; and an electric power interconnecting part that includes a conductor that is connected to a terminal of the power module. The electric power interconnecting part is disposed so as to avoid overlapping with a region of the power module when the power circuit portion is viewed in an axial direction of the rotating shaft.
摘要翻译：旋转电机主体包括：定子; 转子，其包括旋转轴并且可相对于所述定子旋转; 以及支撑定子和转子的支撑体。控制装置包括：电源电路部，其设置在旋转轴的周围，并且将从旋转电机主体接收的电力或供给到旋转电机主体的电力转换为交流电和直流电。电源电路部分包括：电源模块; 以及电力互连部，其包括连接到所述电力模块的端子的导体。电力互连部被设置为当从旋转轴的轴向观察电力电路部时，避免与电力模块的区域重叠。

8. 发明授权

US09419742B2 Optical communication system having tunable sources 有权
标题翻译：具有可调谐源的光通信系统
公开(公告)号：US09419742B2
公开(公告)日：2016-08-16
申请号：US13340982
申请日：2011-12-30
申请人： Radhakrishnan L. Nagarajan , Masaki Kato , Michael Francis Van Leeuwen , Timothy Butrie
发明人： Radhakrishnan L. Nagarajan , Masaki Kato , Michael Francis Van Leeuwen , Timothy Butrie
IPC分类号： G02B6/12 , H04J14/02 , H04B10/50
CPC分类号： H04J14/0254 , G02B6/12019 , H04B10/506
摘要： Consistent with one example of the disclosed implementations, a photonic integrated circuit (PIC) may be provided that includes s group of lasers and an arrayed waveguide grating (AWG) disposed on a substrate. Each laser in the group may supply an optical signal, such that each optical signal has a different wavelength. Each laser may be tunable to at least two designated wavelengths, which are separated from one another by a free spectral range (FSR) of the AWG. As a result, the optical signals provided from each laser may be combined by the AWG, regardless of which designated wavelength the optical signals have. Accordingly, a PIC may be provided that has a relatively simple construction but can supply optical signals having tunable wavelengths.
摘要翻译：与所公开的实施例的一个示例一致，可以提供包括s组激光器和设置在衬底上的阵列波导光栅（AWG）的光子集成电路（PIC）。组中的每个激光器可以提供光信号，使得每个光信号具有不同的波长。每个激光器可以被调谐到至少两个指定的波长，它们通过AWG的自由光谱范围（FSR）彼此分开。结果，从每个激光器提供的光信号可以由AWG组合，而不管光信号具有哪个指定波长。因此，可以提供具有相对简单结构但可提供具有可调波长的光信号的PIC。

9. 发明授权

US09158068B2 Wide passband AWG 有权
标题翻译：宽通带AWG
公开(公告)号：US09158068B2
公开(公告)日：2015-10-13
申请号：US13177363
申请日：2011-07-06
申请人： Masaki Kato , Radhakrishnan L. Nagarajan
发明人： Masaki Kato , Radhakrishnan L. Nagarajan
IPC分类号： G02B6/34 , G02B6/12
CPC分类号： G02B6/12011
摘要： Consistent with the present disclosure, an AWG is provided that has grating waveguide groupings that extend between a first free space region and a second free space region. The difference in length (ΔL) between successive grating waveguides differs for each grouping of grating waveguides, such that, for example, the ΔL associated with a given grating waveguide grouping is not an integer multiple of any of the other grating waveguide groupings. The grating waveguide groupings direct images having relatively small wavelength differences to a given output waveguide, and each grating waveguide grouping has an associated passband, which is similar to that of the conventional AWG. Unlike the conventional AWG, however, multiple grating waveguide groupings are included in the same AWG, such that the spectra associated with the grating waveguide groupings combine to provide a transmission characteristic having a passband that is greater than any individual passband. Accordingly, even if the optical signal wavelengths vary or are offset from the center wavelength of the passband, such wavelengths may still be transmitted with less loss.
摘要翻译：根据本公开，提供了AWG，其具有在第一自由空间区域和第二自由空间区域之间延伸的光栅波导分组。对于每组光栅波导，连续光栅波导之间的长度差（＆Dgr; L）不同，例如，与给定光栅波导组合相关联的＆Dgr; L不是任何其他光栅波导的整数倍分组。光栅波导分组将具有相对小的波长差的图像分配给给定的输出波导，并且每个光栅波导组具有相关的通带，其类似于常规的AWG。然而，与传统AWG不同，多个光栅波导分组被包括在相同的AWG中，使得与光栅波导分组相关联的光谱组合以提供具有大于任何单个通带的通带的传输特性。因此，即使光信号波长变化或偏离通带的中心波长，这样的波长仍然可以以较少的损耗传输。

10. 发明授权

US09129949B2 Power semiconductor module 有权
标题翻译：功率半导体模块
公开(公告)号：US09129949B2
公开(公告)日：2015-09-08
申请号：US13881654
申请日：2011-02-09
申请人： Shinsuke Asada , Kenjiro Nagao , Dai Nakajima , Yuetsu Watanabe , Yoshihito Asao , Takuya Oga , Masaki Kato
发明人： Shinsuke Asada , Kenjiro Nagao , Dai Nakajima , Yuetsu Watanabe , Yoshihito Asao , Takuya Oga , Masaki Kato
IPC分类号： H01L23/495 , H01L23/12 , H01L23/00 , H01L23/36 , H01L23/31
CPC分类号： H01L23/49568 , H01L23/3107 , H01L23/36 , H01L23/49524 , H01L23/49562 , H01L23/49575 , H01L24/05 , H01L24/06 , H01L24/29 , H01L24/40 , H01L24/41 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/83 , H01L24/84 , H01L2224/04026 , H01L2224/04034 , H01L2224/04042 , H01L2224/0603 , H01L2224/06051 , H01L2224/06181 , H01L2224/291 , H01L2224/2919 , H01L2224/40137 , H01L2224/40139 , H01L2224/40247 , H01L2224/4103 , H01L2224/41051 , H01L2224/45015 , H01L2224/45124 , H01L2224/48139 , H01L2224/48247 , H01L2224/73221 , H01L2224/73263 , H01L2224/73265 , H01L2224/83411 , H01L2224/83455 , H01L2224/83801 , H01L2224/8385 , H01L2224/84801 , H01L2924/00014 , H01L2924/01029 , H01L2924/07802 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13091 , H01L2924/181 , H01L2924/014 , H01L2924/00 , H01L2924/00012 , H01L2224/37099
摘要： A power semiconductor module (100) includes: an electrode plate (2) in which a body portion (2a) and an external connection terminal portion (2b) are integrally formed, and the body portion (2a) is arranged on the same flat surface; a semiconductor chip (1) mounted on one surface (mounting surface) (2c) of the body portion (2a); and a resin package (3) in which the other surface (heat dissipation surface) (2d) of the body portion (2a) is exposed, and the body portion (2a) of the electrode plate (2) and the semiconductor chip (1) are sealed with resin. The heat dissipation surface (2d) is the same surface as the bottom (3a) of the resin package (3); and consequently, heat dissipation properties and reliability are improved and a reduction in size can be achieved.
摘要翻译：功率半导体模块（100）包括：一体形成有主体部分（2a）和外部连接端子部分（2b）的电极板（2），并且主体部分（2a）布置在同一平面 ; 安装在主体部分（2a）的一个表面（安装表面）（2c）上的半导体芯片（1）; 和主体部（2a）的另一面（散热面）（2d）露出的树脂封装体（3）和电极板（2）的主体部分（2a）和半导体芯片（1））用树脂密封。散热面（2d）与树脂封装（3）的底部（3a）相同。因此，散热性和可靠性得到改善，并且可以实现尺寸的减小。

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