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    • 1. 发明授权
    • Silicon optical bench OCT probe for medical imaging
    • 硅光学台用于医学成像的OCT探针
    • US08515221B2
    • 2013-08-20
    • US12693181
    • 2010-01-25
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • G02B6/26
    • G01Q60/22A61B5/0066A61B5/0084A61B5/02007A61B2562/12G02B23/2469
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤端接和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并且沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 2. 发明申请
    • Silicon Optical Bench OCT Probe for Medical Imaging
    • 硅光学台面OCT医用成像探头
    • US20110182550A1
    • 2011-07-28
    • US12693181
    • 2010-01-25
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • G02B6/26B29C65/72B29D11/00
    • G01Q60/22A61B5/0066A61B5/0084A61B5/02007A61B2562/12G02B23/2469
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 3. 发明授权
    • SOI lens structure for medical probe
    • 医用探头的SOI透镜结构
    • US08675293B2
    • 2014-03-18
    • US12693186
    • 2010-01-25
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • G02B7/02
    • B29D11/0073G02B6/32G02B23/2423
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for a forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并且沿着复合晶片材料的背面通过复合晶片材料的背面形成光学端口 折射透镜的光轴。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 4. 发明申请
    • SOI Lens Structure for Medical Probe
    • 医疗探针的SOI透镜结构
    • US20110181966A1
    • 2011-07-28
    • US12693186
    • 2010-01-25
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • G02B1/02G02B1/00B29D11/00
    • B29D11/0073G02B6/32G02B23/2423
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 9. 发明授权
    • Integrated spectroscopy system
    • 综合光谱系统
    • US07292344B2
    • 2007-11-06
    • US11380684
    • 2006-04-28
    • Walid A. AtiaDale C. FlandersPetros KotidisMark E. Kuznetsov
    • Walid A. AtiaDale C. FlandersPetros KotidisMark E. Kuznetsov
    • G01B9/02G01J3/45
    • G01J3/36G01J3/0256G01J3/10G01J3/26G01N21/255
    • Integrated spectroscopy systems are disclosed. In some examples, integrated tunable detectors, using one or multiple Fabry-Perot tunable filters, are provided. Other examples use integrated tunable sources. The tunable source combines one or multiple diodes, such as superluminescent light emitting diodes (SLED), and a Fabry Perot tunable filter or etalon. The advantages associated with the use of the tunable etalon are that it can be small, relatively low power consumption device. For example, newer microelectrical mechanical system (MEMS) implementations of these devices make them the size of a chip. This increases their robustness and also their performance. In some examples, an isolator, amplifier, and/or reference system is further provided integrated.
    • 公开了集成光谱系统。 在一些示例中,提供使用一个或多个法布里 - 珀罗可调滤波器的集成可调谐检测器。 其他示例使用集成的可调源。 可调谐源组合了一个或多个二极管,例如超发光发光二极管(SLED)和法布里珀罗可调滤波器或标准具。 与可调谐标准具的使用相关的优点是它可以是小的,相对较低的功率消耗装置。 例如,这些器件的较新的微电机械系统(MEMS)实现使其成为芯片的尺寸。 这增加了它们的稳健性和性能。 在一些示例中,还集成了隔离器,放大器和/或参考系统。