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    • 1. 发明授权
    • SOI lens structure for medical probe
    • 医用探头的SOI透镜结构
    • US08675293B2
    • 2014-03-18
    • US12693186
    • 2010-01-25
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • G02B7/02
    • B29D11/0073G02B6/32G02B23/2423
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for a forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. The refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并且沿着复合晶片材料的背面通过复合晶片材料的背面形成光学端口 折射透镜的光轴。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 2. 发明申请
    • SOI Lens Structure for Medical Probe
    • 医疗探针的SOI透镜结构
    • US20110181966A1
    • 2011-07-28
    • US12693186
    • 2010-01-25
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • Dale C. FlandersJames W. GetzPeter S. WhitneyMark E. KuznetsovChristopher C. Cook
    • G02B1/02G02B1/00B29D11/00
    • B29D11/0073G02B6/32G02B23/2423
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 3. 发明授权
    • Silicon optical bench OCT probe for medical imaging
    • 硅光学台用于医学成像的OCT探针
    • US08515221B2
    • 2013-08-20
    • US12693181
    • 2010-01-25
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • G02B6/26
    • G01Q60/22A61B5/0066A61B5/0084A61B5/02007A61B2562/12G02B23/2469
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤端接和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并且沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 4. 发明申请
    • Silicon Optical Bench OCT Probe for Medical Imaging
    • 硅光学台面OCT医用成像探头
    • US20110182550A1
    • 2011-07-28
    • US12693181
    • 2010-01-25
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • G02B6/26B29C65/72B29D11/00
    • G01Q60/22A61B5/0066A61B5/0084A61B5/02007A61B2562/12G02B23/2469
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 5. 发明授权
    • Mechanically balanced optical membrane device for orientation insensitivity
    • 用于取向不敏感的机械平衡光学膜装置
    • US09036235B2
    • 2015-05-19
    • US13467787
    • 2012-05-09
    • Vaibhav MathurDale C. FlandersPeter S. WhitneyJames W. Getz
    • Vaibhav MathurDale C. FlandersPeter S. WhitneyJames W. Getz
    • G02B26/08G02B26/00
    • G02B26/001G02B26/0825
    • An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.
    • 光学膜装置包括基底,在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中,光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中,光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡,以最小化对重力场中的取向的敏感性。
    • 8. 发明申请
    • Mechanically Balanced Optical Membrane Device for Orientation Insensitivity
    • 用于定向不敏感的机械平衡光学膜装置
    • US20130301098A1
    • 2013-11-14
    • US13467787
    • 2012-05-09
    • Vaibhav MathurDale C. FlandersPeter S. WhitneyJames W. Getz
    • Vaibhav MathurDale C. FlandersPeter S. WhitneyJames W. Getz
    • G02B26/08
    • G02B26/001G02B26/0825
    • An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.
    • 光学膜装置包括基底,在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中,光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中,光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡,以最小化对重力场中的取向的敏感性。