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    • 1. 发明申请
    • GRAPHENE CIRCUIT BOARD HAVING IMPROVED ELECTRICAL CONTACT BETWEEN GRAPHENE AND METAL ELECTRODE, AND DEVICE INCLUDING SAME
    • 具有改善的石墨和金属电极之间的电气接触的石墨电路板和包括其的装置
    • US20110198558A1
    • 2011-08-18
    • US13013984
    • 2011-01-26
    • Makoto OkaiMotoyuki HirookaYasuo Wada
    • Makoto OkaiMotoyuki HirookaYasuo Wada
    • H01L29/06
    • H01L29/1606G02B6/4246H01L21/2855H01L29/41H01L29/45H01L29/7781H01L29/78603H01L29/78684
    • A circuit board having a graphene circuit according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2-xO3+x (where x is 0 or more), the patterned aluminum oxide film having a recessed region whose surface has one or more cone-shaped recesses therein; a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film having a contact region that covers the recessed region, the graphene film growing parallel to a flat surface of the recessed region and parallel to an inner wall surface of each cone-shaped recess of the recessed region; and a patterned metal film, a part of the patterned metal film covering and having electrical contact with the contact region, the patterned metal film filling each recess covered by the graphene film.
    • 根据本发明的具有石墨烯电路的电路板包括:基底; 形成在基底基板上的图案化氧化铝膜,图案化的氧化铝膜具有平均组成为Al 2-x O 3 + x(其中x为0或更大)的图案化氧化铝膜,图案化的氧化铝膜具有凹陷区域,其表面具有一个或多个 锥形凹槽; 优选仅在图案化的氧化铝膜上生长的石墨烯膜,所述石墨烯膜具有一个或多个石墨烯原子层,所述石墨烯膜具有覆盖所述凹陷区域的接触区域,所述石墨烯膜平行于所述凹陷区域的平坦表面生长 并且平行于凹陷区域的每个锥形凹部的内壁表面; 以及图案化的金属膜,所述图案化的金属膜的一部分覆盖并与所述接触区域电接触,所述图案化金属膜填充由所述石墨烯膜覆盖的每个凹部。
    • 6. 发明申请
    • MEASURING APPARATUS HAVING NANOTUBE PROBE
    • 具有纳米管探针的测量装置
    • US20090243637A1
    • 2009-10-01
    • US12412113
    • 2009-03-26
    • Makoto OKAIMotoyuki Hirooka
    • Makoto OKAIMotoyuki Hirooka
    • G01R27/00
    • G01R1/06761
    • An object of the present invention is to provide a measuring apparatus such as a conduction characteristics evaluation apparatus, a probe microscope, etc. having a nanotube probe, wherein the measuring apparatus is succeeded in reducing the electrical resistance of the carbon nanotube as well as the electrical resistance between the carbon nanotube and a metal substrate to improve electrical conduction characteristics of the nanotube probe and attain a uniform diameter, thus improving the measurement accuracy.In order to solve the above-mentioned problem, there is provided a conduction characteristics evaluation apparatus having a nanotube probe made of a nanotube coated by tiny fragments of graphene sheets to improve the wettability with respect to metal materials and then coated by a metal layer, or a conduction characteristics evaluation apparatus having a nanotube probe made of a metal-coated amorphous nanotube composed of tiny fragments of graphene sheets.
    • 本发明的目的是提供一种具有纳米管探针的导电特性评价装置,探针显微镜等测量装置,其中测量装置成功地降低了碳纳米管的电阻以及 碳纳米管和金属基板之间的电阻,以改善纳米管探针的导电特性并获得均匀的直径,从而提高测量精度。 为了解决上述问题,提供了一种具有纳米管探针的导电特性评价装置,该纳米管探针由石墨烯片的微小碎片涂覆的纳米管构成,以提高相对于金属材料的润湿性,然后用金属层涂覆, 或具有由石墨烯片的微小碎片构成的金属涂覆的无定形纳米管制成的纳米管探针的导电特性评价装置。