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    • 8. 发明授权
    • Capacitor and method for fabricating the same, and semiconductor device and method for fabricating the same
    • 电容器及其制造方法,半导体器件及其制造方法
    • US06974985B2
    • 2005-12-13
    • US09960398
    • 2001-09-24
    • Masaki KurasawaKazuaki KuriharaKenji Maruyama
    • Masaki KurasawaKazuaki KuriharaKenji Maruyama
    • H01L27/105H01L21/02H01L21/8246H01L27/108
    • H01L28/55H01L28/91
    • The semiconductor device comprises: a memory cell transistor formed on a semiconductor substrate 10; insulation films 22, 30 covering the memory cell transistor; a buffer structure 40 formed on the insulation film; and a capacitor including a lower electrode 42 formed on the buffer structure 40 and electrically connected to the source/drain diffused layer 20; a capacitor dielectric film 44 formed on the lower electrode 42, and formed of a perovskite ferroelectric material having a smaller thermal expansion coefficient than that of the buffer structure 40 and having a crystal oriented substantially perpendicular to a surface of the lower electrode 42. The buffer structure for mitigating the influence of the stress from the substrate is formed below the lower electrode, whereby a polarization direction of the capacitor dielectric film can be made parallel with a direction of an electric field applied between the upper electrode and the lower electrode. An intrinsic polarization of the ferroelectric film can be utilized as it is.
    • 半导体器件包括:形成在半导体衬底10上的存储单元晶体管; 覆盖存储单元晶体管的绝缘膜22,30; 形成在绝缘膜上的缓冲结构40; 以及电容器,包括形成在缓冲结构40上并电连接到源/漏扩散层20的下电极42; 形成在下部电极42上的电容电介质膜44,由与缓冲结构体40的热膨胀系数相比具有较小的热膨胀系数的钙钛矿型铁电体材料形成,并具有大致垂直于下部电极42的表面取向的晶体。 用于减轻来自基板的应力的影响的缓冲结构形成在下电极的下方,由此可以使电容器电介质膜的极化方向与施加在上电极和下电极之间的电场的方向平行。 可以直接利用铁电体膜的固有极化。
    • 9. 发明授权
    • Authentication circuit, semiconductor device, process for operating the same, IC card, and process for operating the same
    • 认证电路,半导体器件,操作过程,IC卡及其操作过程
    • US06688520B2
    • 2004-02-10
    • US10294711
    • 2002-11-15
    • Kenji Maruyama
    • Kenji Maruyama
    • G06K708
    • G06K19/07372G06K19/073
    • An authentication circuit containing at least two types of ferroelectrics having different Curie temperatures and properties of retaining charges by residual polarization. An authentication signal stored in one of the ferroelectrics is erased when the ferroelectrics are held in a Curie temperature or more of the one of the ferroelectrics and below a Curie temperature of the ferroelectrics 2. In an authentication circuit, preferably one of the ferroelectrics outputs a primary authentication signal and, when the ferroelectric 2 receives the primary authentication signal, the ferroelectric 2 outputs a secondary authentication signal, and a plurality of ferroelectrics are formed of two or more types of elements and have different element compositions, the two or more elements are selected from Na, K, Ba, Cd, Hf, O, Pb, Zr, Ti, La, Ca, Sr, Tl, Bi, a rare earth element, Nb, Ta, W, Mo, Fe, Co, and Cr.
    • 包含至少两种具有不同居里温度的铁电体和通过残余极化保持电荷的性质的认证电路。 当铁电体保持在一个铁电体的居里温度以上且低于铁电体2的居​​里温度时,存储在铁电体之一中的认证信号被擦除。在认证电路中,优选地,铁电体中的一个输出 初级认证信号,当铁电体2接收到初始认证信号时,铁电体2输出二次认证信号,多个铁电体由两种以上的元件形成,具有不同的元件组成, 选自Na,K,Ba,Cd,Hf,O,Pb,Zr,Ti,La,Ca,Sr,Tl,Bi,稀土元素,Nb,Ta,W,Mo,Fe,Co和Cr。