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    • 5. 发明授权
    • Programmable non-volatile memory cell
    • 可编程非易失性存储单元
    • US5747846A
    • 1998-05-05
    • US346287
    • 1994-11-23
    • Makio IidaTetsuo FujiiYoshihiko Isobe
    • Makio IidaTetsuo FujiiYoshihiko Isobe
    • H01L21/8247H01L27/105H01L27/115H01L29/788H01L29/792H01L27/10
    • H01L27/11526H01L27/105H01L27/11531
    • A non-volatile memory cell having a structure having improved integration and simplified electrode wiring structure. The programmable non-volatile memory cell of the present invention adopts a mono-layer gate scheme to simplify the electrode wiring structure and to eliminate a current leakage problem of an insulating film between electrodes. A side and bottom of a semiconductor region, which is disposed directly below a capacity electrode section with a gate insulating film interposed therebetween that compose a control electrode, are isolated from another semiconductor region and semiconductor substrate by insulating films. Thus, a high programming control voltage which is not limited by a junction yield voltage between the semiconductor regions and semiconductor substrate may be applied. Due to that, an area of the capacity electrode section of a floating electrode may be considerably reduced.
    • 具有改进的集成和简化的电极布线结构的结构的非易失性存储单元。 本发明的可编程非易失性存储单元采用单层栅极方案来简化电极布线结构,并消除电极之间绝缘膜的漏电问题。 通过绝缘膜将另一个半导体区域的半导体区域和半导体区域的半导体区域和半导体衬底的另一个半导体区域和半导体衬底隔离,其中,半导体区域的一侧和底部直接配置在其间具有构成控制电极的栅极绝缘膜 因此,可以应用不受半导体区域和半导体衬底之间的接合屈服电压限制的高编程控制电压。 因此,浮动电极的电容电极部分的面积可以大大减小。
    • 8. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US06908857B2
    • 2005-06-21
    • US10657081
    • 2003-09-09
    • Kazuo AkamatsuYoshihiko IsobeHiroyuki Yamane
    • Kazuo AkamatsuYoshihiko IsobeHiroyuki Yamane
    • H01L23/52H01L21/28H01L21/285H01L21/3205H01L21/768H01L23/485H01L23/522H01L23/532H01L21/44H01L21/4763
    • H01L21/7685H01L21/28518H01L21/2855H01L21/32051H01L21/76886H01L23/485H01L23/5226H01L23/53223H01L2924/0002H01L2924/00
    • A method for manufacturing a semiconductor device having on a silicon substrate semiconductor elements and aluminum (Al) alloy wiring leads as electrically connected thereto is disclosed. The method includes the steps of forming on the silicon substrate an Al alloy layer containing therein copper (Cu), and forming on the Al alloy layer a titanium nitride (TiN) film with enhanced chemical reactivity by using sputtering techniques while applying thereto a DC power of 5.5 W/cm2 or less. Fabrication of such reactivity-rich TiN film on the Al alloy layer results in a reaction layer of Al and Ti being subdivided into several spaced-apart segments. In this case, the reaction layer hardly serves as any diffusion path; thus, it becomes possible to prevent Cu as contained in the Al alloy layer from attempting to outdiffuse with the reaction layer being as its diffusion path. This makes it possible to suppress or minimize unwanted fabrication of AlN on or above the surface of an Al containing lead pattern, thereby enabling increase in electromigration (EM) lifetime of electrical interconnect leads used.
    • 公开了一种制造半导体器件的方法,该半导体器件具有硅衬底半导体元件和与其电连接的铝(Al)合金布线引线。 该方法包括以下步骤:在硅衬底上形成含有铜(Cu)的Al合金层,并且通过使用溅射技术在Al合金层上形成具有增强的化学反应性的氮化钛(TiN)膜,同时施加直流电力 为5.5W / cm 2以下。 在Al合金层上制备这种富含反应性的TiN膜导致Al和Ti的反应层被细分成几个间隔开的段。 在这种情况下,反应层几乎不作为任何扩散路径; 因此,可以防止Al合金层中所含的Cu作为其扩散路径而反向扩散。 这使得可以抑制或最小化在含铝的引线图案的表面上或上方的AlN的不希望的制造,从而能够增加使用的电互连引线的电迁移(EM)寿命。
    • 9. 发明授权
    • Closed battery and closing member
    • 闭合电池和关闭件
    • US06423440B1
    • 2002-07-23
    • US09436488
    • 1999-11-09
    • Akiyoshi TakadaKinji SaijoKazuo YoshidaNobuyuki YoshimotoYoshihiko Isobe
    • Akiyoshi TakadaKinji SaijoKazuo YoshidaNobuyuki YoshimotoYoshihiko Isobe
    • H01M212
    • H01M2/345H01M2/1241H01M2/34
    • The object of the present invention is to provide a closed battery capable of rapidly releasing the internal pressure thereof and at the same time disconnecting the current to effectively prevent itself from temperature rising and exploding so that in such a completely closed battery it may assure the safety and reliability thereof, when the internal pressure is elevated due to short circuit, overcharge, reverse charge, or the like. A valve element 5 is provided with a slit 3 between the circumference thereof and a metal substrate 1. When the internal pressure of a battery is elevated, the valve element 5 is smoothly raised up together with a metal foil 2 from a bending fulcrum portion 4 to thereby cut a lead wire 6 or permit a braze portion 8 to detach from the lead wire 6, thus disconnecting the current reliably. Then, the metal foil which usually closes the slit formed around the circumference of the valve element 5 is allowed to burst stably and accurately at a prescribed pressure to thereby form a valve opening portion 7 so that the internal gas of the battery can be discharged.
    • 本发明的目的是提供一种能够快速释放其内部压力并且同时断开电流以有效防止其升高和爆炸的封闭电池,使得在这种完全闭合的电池中可确保安全性 当内部压力由于短路,过充电,反向充电等而升高时的可靠性。 阀元件5在其周边和金属基板1之间设置有狭缝3。当电池的内部压力升高时,阀元件5与金属箔2一起从弯曲支点部分4平滑地升起 从而切断引线6,或者使钎焊部8与引线6分离,从而可靠地断开电流。 然后,通过闭合形成在阀体5的周围的狭缝的金属箔,能够在规定的压力下稳定而准确地突出,从而形成阀开口部7,从而能够排出电池的内部气体。