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    • 2. 发明授权
    • High-density dual-cell flash memory structure
    • 高密度双单元闪存结构
    • US06541815B1
    • 2003-04-01
    • US09974968
    • 2001-10-11
    • Jack A. MandelmanLouis L. HsuChung H. LamCarl J. Radens
    • Jack A. MandelmanLouis L. HsuChung H. LamCarl J. Radens
    • H01L29788
    • H01L29/66825H01L21/28273H01L27/115H01L27/11556H01L29/7885
    • A 2F2 flash memory cell structure and a method of fabricating the same are provided. The 2F2 flash memory cell structure includes a Si-containing substrate having a plurality of trenches formed therein. Each trench has sidewalls that extend to a bottom wall, a length and individual segments that include two memory cell elements per segment. Each memory cell element comprises (i) a floating gate region having L-shaped gates formed on a portion of each trench sidewall; (ii) a program line overlapping one side of the L-shaped gates present at the bottom wall of each trench and extending along the entire length of the plurality of trenches; and (iii) a control gate region overlying the floating gate region. The control gate region includes gates formed on portions of the sidewalls of the trenches that are coupled to the floating gate regions. The memory cell structure further includes bitline diffusion regions formed in the Si-containing semiconductor substrate abutting each trench segment; and wordlines that lay orthogonal to the trenches. The wordlines are in contact with a top surface of each control gate region.
    • 提供了一种2F2闪存单元结构及其制造方法。 2F2闪存单元结构包括其中形成有多个沟槽的含Si衬底。 每个沟槽具有延伸到底壁,长度和包括每个段的两个存储单元元件的单独段的侧壁。 每个存储单元元件包括(i)具有形成在每个沟槽侧壁的一部分上的L形栅极的浮栅区域; (ii)重叠在每个沟槽的底壁处的L形门的一侧并沿多个沟槽的整个长度延伸的程序线; 和(iii)覆盖浮栅区域的控制栅极区域。 控制栅极区域包括形成在沟槽的侧壁的与浮动栅极区域耦合的部分上的栅极。 所述存储单元结构还包括形成在所述含Si半导体衬底中的位线邻接每个沟槽段的位线扩散区; 和与沟槽正交的字线。 字线与每个控制栅极区域的顶表面接触。
    • 4. 发明授权
    • Local interconnect junction on insulator (JOI) structure
    • 局部互连绝缘体结(JOI)结构
    • US06534807B2
    • 2003-03-18
    • US09928738
    • 2001-08-13
    • Jack A. MandelmanDong GanChung H. Lam
    • Jack A. MandelmanDong GanChung H. Lam
    • H01L2980
    • H01L27/11H01L21/76895H01L21/823475H01L27/1104
    • A JOI structure and cell layout including at least one patterned gate stack region present atop a semiconductor substrate, said semiconductor substrate having source/drain diffusion regions of opposite dopant polarity abutting each other present therein, said source/drain diffusion regions are present atop an insulating layer, said insulating layer not being present beneath said at least one patterned gate stack region. An alternative JOI structure and cell layout of the present invention includes at least one patterned gate stack region present atop a semiconductor substrate, said semiconductor substrate containing at least a conductive region other than source/drain diffusion regions present atop an insulating layer embedded therein, said insulating layer not being present beneath said at least one patterned gate stack region, wherein said conductive region is in contact with vertical sidewalls of source/drain extension regions present in said semiconductor substrate, beneath said at least one patterned gate stack region.
    • JOI结构和电池布局包括存在于半导体衬底顶部的至少一个图案化栅极叠层区域,所述半导体衬底具有彼此相邻的相反掺杂极性的源/漏扩散区域,所述源极/漏极扩散区域位于绝缘体顶部 所述绝缘层不存在于所述至少一个图案化的栅堆叠区域之下。 本发明的替代的JOI结构和电池布局包括存在于半导体衬底顶部的至少一个图案化栅堆叠区域,所述半导体衬底至少包含存在于嵌入其中的绝缘层顶部的源极/漏极扩散区域以外的导电区域, 绝缘层不存在于所述至少一个图案化的栅堆叠区域之下,其中所述导电区域与存在于所述半导体衬底中的源极/漏极延伸区域的垂直侧壁接触,位于所述至少一个图案化栅极堆叠区域之下。
    • 10. 发明授权
    • Sub-lithographic printing method
    • 亚平版印刷法
    • US08421194B2
    • 2013-04-16
    • US13006403
    • 2011-01-13
    • Chung H. LamHemantha K. Wickramasinghe
    • Chung H. LamHemantha K. Wickramasinghe
    • H01L29/06
    • H01L21/0337
    • A trench structure and an integrated circuit comprising sub-lithographic trench structures in a substrate. In one embodiment the trench structure is created by forming sets of trenches with a lithographic mask and filling the sets of trenches with sets of step spacer blocks comprising two alternating spacer materials which are separately removable from each other. In one embodiment, the trench structures formed are one-nth the thickness of the lithographic mask's feature size. The size of the trench structures being dependent on the thickness and number of spacer material layers used to form the set of step spacer blocks. The number of spacer material layers being n/2 and the thickness of each spacer material layer being one-nth of the lithographic mask's feature size.
    • 沟槽结构和集成电路,其包括衬底中的次光刻沟槽结构。 在一个实施例中,沟槽结构是通过用光刻掩膜形成一组沟槽而形成的,并且用一组间隔块块填充该组沟槽,该组间隔块包括彼此分离地可拆卸的两个交替间隔物材料。 在一个实施例中,形成的沟槽结构是光刻掩模的特征尺寸的厚度的十分之一。 沟槽结构的尺寸取决于用于形成一组步进间隔块的间隔材料层的厚度和数量。 间隔材料层的数量为n / 2,每个间隔材料层的厚度为光刻掩模的特征尺寸的十分之一。