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1. 发明授权

US07473301B2 Adhesive particle shielding 有权
标题翻译：粘合剂颗粒屏蔽
公开(公告)号：US07473301B2
公开(公告)日：2009-01-06
申请号：US10245218
申请日：2002-09-17
申请人： Leonard Elliott Klebanoff , Daniel John Rader , Christopher Walton , James Folta
发明人： Leonard Elliott Klebanoff , Daniel John Rader , Christopher Walton , James Folta
IPC分类号： B01D45/08
CPC分类号： H01L21/67017 , H01L21/67132 , Y10S55/14
摘要： An efficient device for capturing fast moving particles has an adhesive particle shield that includes (i) a mounting panel and (ii) a film that is attached to the mounting panel wherein the outer surface of the film has an adhesive coating disposed thereon to capture particles contacting the outer surface. The shield can be employed to maintain a substantially particle free environment such as in photolithographic systems having critical surfaces, such as wafers, masks, and optics and in the tools used to make these components, that are sensitive to particle contamination. The shield can be portable to be positioned in hard-to-reach areas of a photolithography machine. The adhesive particle shield can incorporate cooling means to attract particles via the thermophoresis effect.
摘要翻译：用于捕获快速移动颗粒的有效装置具有粘合剂颗粒屏蔽，其包括（i）安装板和（ii）附接到安装板的膜，其中膜的外表面具有设置在其上的粘合剂涂层以捕获颗粒接触外表面。可以使用屏蔽来保持基本上无颗粒的环境，例如具有关键表面的光刻系统，例如晶片，掩模和光学器件，以及用于制造对颗粒污染敏感的这些部件的工具。屏蔽件可以便携式地定位在光刻机的难以到达的区域中。粘合剂颗粒屏蔽可以包含冷却装置以通过热泳效应吸引颗粒。

2. 发明授权

US06072157A Thermophoretic vacuum wand 有权
标题翻译：热ic真空棒
公开(公告)号：US06072157A
公开(公告)日：2000-06-06
申请号：US210348
申请日：1998-12-11
申请人： Leonard Elliott Klebanoff , Daniel John Rader
发明人： Leonard Elliott Klebanoff , Daniel John Rader
IPC分类号： B65G47/91 , H01L21/00 , H01L21/683 , B25J15/06 , B66C1/02 , H01L21/68
CPC分类号： H01L21/67109 , B65G47/91 , H01L21/6838 , Y10T279/11
摘要： A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.
摘要翻译：一种特别适用于在洁净室环境中运送物品的热解吸真空棒，以便空气中潜在的颗粒污染物不会附着在制品的表面上。所述棒包括具有压板的壳体，所述压板具有通过压板的带有吸入口的前表面; 用于向所述吸入口施加负压的真空源; 和加热装置。当物品被真空棒保持时加热物品可提供有效防止空气中的颗粒沉积在物品上的热解保护。

3. 发明授权

US06232578B1 Thermophoretic vacuum wand 有权
标题翻译：热ic真空棒
公开(公告)号：US06232578B1
公开(公告)日：2001-05-15
申请号：US09533600
申请日：2000-03-23
申请人： Leonard Elliott Klebanoff , Daniel John Rader
发明人： Leonard Elliott Klebanoff , Daniel John Rader
IPC分类号： B25J1506
CPC分类号： H01L21/67109 , B65G47/91 , H01L21/6838 , Y10T279/11
摘要： A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.
摘要翻译：一种特别适用于在洁净室环境中运送物品的热解吸真空棒，以便空气中潜在的颗粒污染物不会附着在制品的表面上。所述棒包括具有压板的壳体，所述压板具有通过压板的带有吸入口的前表面; 用于向所述吸入口施加负压的真空源; 和加热装置。当物品被真空棒保持时加热物品可提供有效防止空气中的颗粒沉积在物品上的热解保护。

4. 发明授权

US06169652A Electrostatically screened, voltage-controlled electrostatic chuck 有权
标题翻译：静电放电，电压控制静电吸盘
公开(公告)号：US06169652A
公开(公告)日：2001-01-02
申请号：US09268166
申请日：1999-03-12
申请人： Leonard Elliott Klebanoff
发明人： Leonard Elliott Klebanoff
IPC分类号： H02N1300
CPC分类号： G03F7/70708 , G03F7/707 , G03F7/70916 , H01L21/6833 , H02N13/00
摘要： Employing an electrostatically screened, voltage-controlled electrostatic chuck particularly suited for holding wafers and masks in sub-atmospheric operations will significantly reduce the likelihood of contaminant deposition on the substrates. The electrostatic chuck includes (1) an insulator block having a outer perimeter and a planar surface adapted to support the substrate and comprising at least one electrode (typically a pair of electrodes that are embedded in the insulator block), (2) a source of voltage that is connected to the at least one electrode, (3) a support base to which the insulator block is attached, and (4) a primary electrostatic shield ring member that is positioned around the outer perimeter of the insulator block. The electrostatic chuck permits control of the voltage of the lithographic substrate; in addition, it provides electrostatic shielding of the stray electric fields issuing from the sides of the electrostatic chuck. The shielding effectively prevents electric fields from wrapping around to the upper or front surface of the substrate, thereby eliminating electrostatic particle deposition.
摘要翻译：采用静电屏蔽的电压控制静电卡盘，特别适用于在低于大气压的操作中保持晶圆和掩模将显着降低污染物沉积在基板上的可能性。静电卡盘包括（1）绝缘体块，其具有外周边和平坦表面，该平坦表面适于支撑基底并且包括至少一个电极（通常为嵌入绝缘体块中的一对电极），（2）连接到所述至少一个电极的电压，（3）安装所述绝缘体块的支撑基座，以及（4）围绕所述绝缘体块的外周定位的主静电屏蔽环构件。静电卡盘可以控制平版印刷基板的电压; 此外，它提供从静电卡盘的侧面发出的杂散电场的静电屏蔽。屏蔽有效地防止电场缠绕到基板的上表面或前表面，从而消除静电颗粒沉积。

5. 发明授权

US08439534B1 Mobile lighting apparatus 有权
标题翻译：移动照明装置
公开(公告)号：US08439534B1
公开(公告)日：2013-05-14
申请号：US12775085
申请日：2010-05-06
申请人： George Michael Roe , Leonard Elliott Klebanoff , Gerald W. Rea , Robert A. Drake , Terry A. Johnson , Steven John Wingert , Thomas A. Damberger , Thomas J. Skradski , Christopher James Radley , James M. Oros , Paul G. Schuttinger , David J. Grupp , Stephen Carl Prey
发明人： George Michael Roe , Leonard Elliott Klebanoff , Gerald W. Rea , Robert A. Drake , Terry A. Johnson , Steven John Wingert , Thomas A. Damberger , Thomas J. Skradski , Christopher James Radley , James M. Oros , Paul G. Schuttinger , David J. Grupp , Stephen Carl Prey
IPC分类号： B60Q1/00 , B60Q3/00
CPC分类号： H01J61/523 , F21S2/00 , F21S2/005 , F21V7/00 , F21V7/041 , F21V11/183 , F21V21/06 , F21V21/30 , F21V23/007 , F21V23/008 , F21V23/026 , F21V29/15 , F21V29/507 , F21V29/74 , F21V29/763 , F21V29/773 , F21W2131/1005 , F21W2131/105 , F21Y2101/00 , F21Y2115/10 , H01J61/025 , H01J65/042
摘要： A mobile lighting apparatus includes a portable frame such as a moveable trailer or skid having a light tower thereon. The light tower is moveable from a stowed position to a deployed position. A hydrogen-powered fuel cell is located on the portable frame to provide electrical power to an array of the energy efficient lights located on the light tower.
摘要翻译：移动照明装置包括便携式框架，诸如可移动的拖车或在其上具有光塔的滑行板。灯塔可以从收起位置移动到展开位置。氢动力燃料电池位于便携式框架上，以为位于光塔上的能量效率灯的阵列提供电力。

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