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    • 4. 发明授权
    • Adhesive particle shielding
    • 粘合剂颗粒屏蔽
    • US07473301B2
    • 2009-01-06
    • US10245218
    • 2002-09-17
    • Leonard Elliott KlebanoffDaniel John RaderChristopher WaltonJames Folta
    • Leonard Elliott KlebanoffDaniel John RaderChristopher WaltonJames Folta
    • B01D45/08
    • H01L21/67017H01L21/67132Y10S55/14
    • An efficient device for capturing fast moving particles has an adhesive particle shield that includes (i) a mounting panel and (ii) a film that is attached to the mounting panel wherein the outer surface of the film has an adhesive coating disposed thereon to capture particles contacting the outer surface. The shield can be employed to maintain a substantially particle free environment such as in photolithographic systems having critical surfaces, such as wafers, masks, and optics and in the tools used to make these components, that are sensitive to particle contamination. The shield can be portable to be positioned in hard-to-reach areas of a photolithography machine. The adhesive particle shield can incorporate cooling means to attract particles via the thermophoresis effect.
    • 用于捕获快速移动颗粒的有效装置具有粘合剂颗粒屏蔽,其包括(i)安装板和(ii)附接到安装板的膜,其中膜的外表面具有设置在其上的粘合剂涂层以捕获颗粒 接触外表面。 可以使用屏蔽来保持基本上无颗粒的环境,例如具有关键表面的光刻系统,例如晶片,掩模和光学器件,以及用于制造对颗粒污染敏感的这些部件的工具。 屏蔽件可以便携式地定位在光刻机的难以到达的区域中。 粘合剂颗粒屏蔽可以包含冷却装置以通过热泳效应吸引颗粒。
    • 5. 发明授权
    • Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients
    • 用于制造具有亚埃厚度均匀性或定制厚度梯度的溅射薄膜的方法和系统
    • US06524449B1
    • 2003-02-25
    • US09454673
    • 1999-12-03
    • James A. FoltaClaude MontcalmChristopher Walton
    • James A. FoltaClaude MontcalmChristopher Walton
    • C23C1600
    • C23C14/54C23C14/543C23C14/545G02B1/10
    • A method and system for producing a thin film with highly uniform (or highly accurate custom graded) thickness on a flat or graded substrate (such as concave or convex optics), by sweeping the substrate across a vapor deposition source with controlled (and generally, time-varying) velocity. In preferred embodiments, the method includes the steps of measuring the source flux distribution (using a test piece that is held stationary while exposed to the source), calculating a set of predicted film thickness profiles, each film thickness profile assuming the measured flux distribution and a different one of a set of sweep velocity modulation recipes, and determining from the predicted film thickness profiles a sweep velocity modulation recipe which is adequate to achieve a predetermined thickness profile. Aspects of the invention include a practical method of accurately measuring source flux distribution, and a computer-implemented method employing a graphical user interface to facilitate convenient selection of an optimal or nearly optimal sweep velocity modulation recipe to achieve a desired thickness profile on a substrate. Preferably, the computer implements an algorithm in which many sweep velocity function parameters (for example, the speed at which each substrate spins about its center as it sweeps across the source) can be varied or set to zero.
    • 通过将衬底穿过气相沉积源(通常在其上,通常用于生产具有高度均匀(或高度准确的定制分级)厚度的薄膜的方法和系统,该平板或渐变衬底(例如凹形或凸形光学器件) 时变)速度。 在优选实施例中,该方法包括以下步骤:测量源通量分布(使用在暴露于源时保持静止的测试件),计算一组预测的膜厚度分布,每个薄膜厚度分布假设测量的磁通分布;以及 一组扫描速度调制配方中的不同的一个,并且从预测的膜厚度分布确定足以实现预定厚度分布的扫描速度调制配方。 本发明的方面包括精确测量源通量分布的实用方法,以及采用图形用户界面的计算机实现的方法,以促进方便地选择最佳或近似最佳的扫描速度调制配方以在衬底上实现期望的厚度分布。 优选地,计算机实现了一种算法,其中许多扫描速度函数参数(例如,每个基板绕其中心旋转,当其扫过源时的速度)可以被改变或设置为零。
    • 8. 发明授权
    • Method and apparatus for filtering the display of vectors in a vector image
    • 用于过滤向量图像中的向量的显示的方法和装置
    • US07710428B2
    • 2010-05-04
    • US11261169
    • 2005-10-27
    • Andrew Christopher WaltonBryan J. Jacquot
    • Andrew Christopher WaltonBryan J. Jacquot
    • G09G5/22G09G5/30
    • G06F17/30271
    • In one embodiment, a computer-implemented method retrieves a vector image from a device. The vector image illustrates the device and comprises a number of embedded handles, each handle of which is associated with a set of vectors in the vector image. The method proceeds with parsing the vector image in accord with a filter key to identify a set of handles that correspond to the filter key. The method then causes one or more sets of vectors, associated with the set of handles corresponding to the filter key, to be displayed differently than one or more sets of vectors that are not associated with the set of handles corresponding to the filter key. Other embodiments are also disclosed.
    • 在一个实施例中,计算机实现的方法从设备检索向量图像。 矢量图像示出了该设备并且包括多个嵌入式句柄,每个句柄的每个句柄与向量图像中的一组向量相关联。 该方法继续根据滤波器键解析矢量图像以识别与滤波器键对应的一组句柄。 该方法然后使与与该过滤器键相对应的一组处理相关联的一组或多组向量与不与与该过滤器密钥相对应的一组句柄相关联的一组或多组矢量不同地显示。 还公开了其他实施例。