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1. 发明授权

US06903171B2 Polymerized cycloolefins using transition metal catalyst and end products thereof 有权
标题翻译：使用过渡金属催化剂及其最终产物的聚合环烯烃
公开(公告)号：US06903171B2
公开(公告)日：2005-06-07
申请号：US10271393
申请日：2002-10-15
申请人： Larry Funderburk Rhodes , Andrew Bell , Ramakrishna Ravikiran , John C. Fondran , Saikumar Jayaraman , Brian Leslie Goodall , Richard A. Mimna , John-Henry Lipian
发明人： Larry Funderburk Rhodes , Andrew Bell , Ramakrishna Ravikiran , John C. Fondran , Saikumar Jayaraman , Brian Leslie Goodall , Richard A. Mimna , John-Henry Lipian
IPC分类号： C08F4/70 , C08F32/00 , C08F32/08 , C08G61/06 , G02B1/04 , C08F4/80
CPC分类号： C08G61/06 , C08F32/00 , C08F32/08 , G02B1/04 , C08L65/00
摘要： Methods for the addition polymerization of cycloolefins using a cationic Group 10 metal complex and a weakly coordinating anion of the formula: [(R′)zM(L′)x(L″)y]b[WCA]d wherein [(R′)zM(L′)x(L″)y] is a cation complex where M represents a Group 10 transition metal; R′ represents an anionic hydrocarbyl containing ligand; L′ represents a Group 15 neutral electron donor ligand; L″ represents a labile neutral electron donor ligand; x is 1 or 2; and y is 0, 1, 2, or 3; and z is 0 or 1, wherein the sum of x, y, and z is 4; and [WCA] represents a weakly coordinating counteranion complex; and b and d are numbers representing the number of times the cation complex and weakly coordinating counteranion complex are taken to balance the electronic charge on the overall catalyst complex.
摘要翻译：使用阳离子第10族金属络合物和下式的弱配位阴离子加成聚合环烯的方法：<？in-line-formula description =“In-line formula”end =“lead”？> [（R' M（L'）x（L“）Y'B <？in-line-formula description =“In-line Formulas”end =“tail”？>其中[（R'）Z M（L'）x < （L“）Y是阳离子络合物，其中M表示第10族过渡金属; R'表示含阴离子烃基的配体; L'表示15族中性电子给体配体; L“表示不稳定的中性电子给体配体; x为1或2; y为0,1,2或3; 且z为0或1，其中x，y和z之和为4; 和[WCA]代表弱协调的对抗综合体; b和d是表示阳离子络合物和弱配位抗衡阴离子络合物在总体催化剂络合物上平衡电荷的次数的数字。

2. 发明授权

US07910674B2 Polymerized cycloolefins using transition metal catalyst and end products thereof 有权
标题翻译：使用过渡金属催化剂及其最终产物的聚合环烯烃
公开(公告)号：US07910674B2
公开(公告)日：2011-03-22
申请号：US10464978
申请日：2003-06-18
申请人： Larry Funderburk Rhodes , Andrew Bell , Ramakrishna Ravikiran , John C. Fondran , Saikumar Jayaraman , Brian Leslie Goodall , Richard A. Mimna , John-Henry Lipian
发明人： Larry Funderburk Rhodes , Andrew Bell , Ramakrishna Ravikiran , John C. Fondran , Saikumar Jayaraman , Brian Leslie Goodall , Richard A. Mimna , John-Henry Lipian
IPC分类号： C08F32/00 , G01R31/26 , H01L21/00 , H01L21/82 , H01L23/58 , H01L23/02 , H01L23/14 , H01L23/29
CPC分类号： C08G61/06 , C08F32/00 , C08F32/08 , G02B1/04 , C08L65/00
摘要： Methods for the addition polymerization of cycloolefins using a cationic Group 10 metal complex and a weakly coordinating anion of the formula: [(R′)zM(L′)x(L″)y]b[WCA]d wherein [(R′)zM(L′)x(L″)y] is a cation complex where M represents a Group 10 transition metal; R′ represents an anionic hydrocarbyl containing ligand; L′ represents a Group 15 neutral electron donor ligand; L″ represents a labile neutral electron donor ligand; x is 1 or 2; and y is 0, 1, 2, or 3; and z is 0 or 1, wherein the sum of x, y, and z is 4; and [WCA] represents a weakly coordinating counteranion complex; and b and d are numbers representing the number of times the cation complex and weakly coordinating counteranion complex are taken to balance the electronic charge on the overall catalyst complex.
摘要翻译：使用阳离子第10族金属络合物和式（[（R'）z M（L'）x（L“）y] b [WCA] d的弱配位阴离子进行环烯加成聚合的方法，其中[（R' ）zM（L'）x（L“）y]是阳离子络合物，其中M表示第10族过渡金属; R'表示含阴离子烃基的配体; L'表示15族中性电子给体配体; L“表示不稳定的中性电子给体配体; x为1或2; y为0,1,2或3; 且z为0或1，其中x，y和z之和为4; 和[WCA]代表弱协调的对抗综合体; b和d是表示阳离子络合物和弱配位抗衡阴离子络合物在总体催化剂络合物上平衡电荷的次数的数字。

3. 发明授权

US6147177A Polycyclic resist compositions with increased etch resistance 有权
公开(公告)号：US6147177A
公开(公告)日：2000-11-14
申请号：US253497
申请日：1999-02-19
申请人： Saikumar Jayaraman , Brian Leslie Goodall , Larry Funderburk Rhodes , Robert Adam Shick , Richard Vicari , Robert David Allen , Juliann Opitz , Ratnam Sooriyakumaran , Thomas Wallow
发明人： Saikumar Jayaraman , Brian Leslie Goodall , Larry Funderburk Rhodes , Robert Adam Shick , Richard Vicari , Robert David Allen , Juliann Opitz , Ratnam Sooriyakumaran , Thomas Wallow
IPC分类号： C08F4/80 , C08F32/08 , C08F232/08 , C08G61/06 , C08G61/08 , G03F7/004 , G03F7/038 , G03F7/039 , C08F132/08
CPC分类号： C08F232/08 , C08G61/08 , G03F7/0045 , G03F7/0382 , G03F7/039 , Y10S430/115
摘要： Polycyclic polymers containing pendant aromatic moieties are disclosed. The polymers exhibit light transparency properties to deep UV wave lengths making them useful for high resolution photolithographic applications. These polymers are particularly useful in chemically amplified positive and negative tone resists.

4. 发明授权

US06451499B1 Polycyclic resist compositions with increased etch resistance 有权
标题翻译：具有增加的耐蚀性的多环抗蚀剂组合物
公开(公告)号：US06451499B1
公开(公告)日：2002-09-17
申请号：US09604749
申请日：2000-06-27
申请人： Saikumar Jayaraman , Brian Leslie Goodall , Larry Funderburk Rhodes , Robert Adam Shick , Richard Vicari , Robert David Allen , Juliann Opitz , Ratnam Sooriyakumaran , Thomas Wallow
发明人： Saikumar Jayaraman , Brian Leslie Goodall , Larry Funderburk Rhodes , Robert Adam Shick , Richard Vicari , Robert David Allen , Juliann Opitz , Ratnam Sooriyakumaran , Thomas Wallow
IPC分类号： G03F7004
CPC分类号： C08F232/08 , C08G61/08 , G03F7/0045 , G03F7/0382 , G03F7/039 , Y10S430/115
摘要： Polycyclic polymers containing pendant aromatic moieties are disclosed. The polymers exhibit light transparency properties to deep UV wave lengths making them useful for high resolution photolithographic applications. These polymers are particularly useful in chemically amplified positive and negative tone resists.
摘要翻译：公开了含有侧芳基部分的多环聚合物。聚合物对深UV波长显示出透光性，使其可用于高分辨率光刻应用。这些聚合物特别适用于化学放大的正和负色调抗蚀剂。

5. 发明授权

US5668234A Reaction injection molding (RIM) of methyl (meth)acrylate and related monomers using group-4 catalysts 失效
标题翻译：使用4族催化剂的（甲基）丙烯酸甲酯和相关单体的反应注射成型（RIM）
公开(公告)号：US5668234A
公开(公告)日：1997-09-16
申请号：US304720
申请日：1994-09-12
申请人： Larry Funderburk Rhodes , Brian Leslie Goodall , Scott Collins
发明人： Larry Funderburk Rhodes , Brian Leslie Goodall , Scott Collins
IPC分类号： C08F4/64 , C08F4/643 , C08F20/12 , C08G63/08 , C08G63/82 , C08F20/14
CPC分类号： C08G63/823 , C08F20/12 , C08F4/64 , C08G63/08 , Y10S526/943
摘要： Acrylate monomers such as methyl methacrylate, or other suitable monomers such as lactams, lactones, or acrylamides, are polymerized by reaction injection molding (RIM) utilizing a combination of organo group-4 catalysts, e.g., a neutral organo catalyst and a cationic organo catalyst. Preferably a Lewis acid is utilized which reacts with the neutral organo catalyst and forms in situ the cationic organo catalyst. Significant exotherms are rapidly generated and result in short cure times and typically in high conversions of at least 95 percent by weight of the monomer. The catalysts of the present invention give good control of tacticity and thus high Tg polymers such as syndiotactic methyl methacrylate can be produced. The use of the combination organo group-4 catalysts are well suited for reaction injection molding of finished articles wherein the neutral catalyst is fed to a mixing device in at least one stream and the cationic organo catalysts or the Lewis acid is fed in at least one or more different streams.
摘要翻译：丙烯酸酯单体如甲基丙烯酸甲酯或其它合适的单体如内酰胺，内酯或丙烯酰胺通过使用有机基团-4催化剂（例如中性有机催化剂和阳离子有机催化剂）的组合的反应注射成型（RIM）聚合。优选使用路易斯酸，其与中性有机催化剂反应并原位形成阳离子有机催化剂。快速产生显着的放热，并导致短的固化时间，并且通常以至少95重量％的单体的高转化率。本发明的催化剂可以很好地控制立构规整度，因此可以生产高Tg聚合物，如间同立构甲基丙烯酸甲酯。使用组合有机基团4的催化剂非常适用于最终制品的反应注射成型，其中中性催化剂在至少一种料流中进料到混合装置中，阳离子有机催化剂或路易斯酸进料至少一种或更多不同的流。

6. 发明授权

US5741869A Addition polymers derived from norbornene-functional monomers and process therefor 失效
公开(公告)号：US5741869A
公开(公告)日：1998-04-21
申请号：US481027
申请日：1995-06-07
申请人： Brian Leslie Goodall , George Martin Benedikt , Lester Howard McIntosh, III , Dennis Allen Barnes , Larry Funderburk Rhodes
发明人： Brian Leslie Goodall , George Martin Benedikt , Lester Howard McIntosh, III , Dennis Allen Barnes , Larry Funderburk Rhodes
IPC分类号： C08F4/70 , C08F4/30 , C08F4/42 , C08F4/80 , C08F32/00 , C08F32/08 , C08F36/04 , C08F36/20 , C08F210/14 , C08F232/08 , C08F236/20 , C08F4/76 , C08F4/78 , C08F10/00
CPC分类号： C08F232/08 , C08F32/08
摘要： Addition polymers derived from norbornene-functional monomers are terminated with an olefinic moiety derived from a chain transfer agent selected from a compound having a terminal olefinic double bond between adjacent carbon atoms, excluding styrenes, vinyl ethers, and conjugated dienes and at least one of said carbon atoms has two hydrogen atoms attached thereto. The addition polymers of this invention are prepared from a single or multicomponent catalyst system including a Group VIII metal ion source. The catalyst systems are unique in that they catalyze the insertion of the chain transfer agent exclusively at a terminal end of the polymer chain.

7. 发明授权

US5929181A Method for preparation of copolymers of ethylene/norbornene-type monomers with nickel catalysts 失效
标题翻译：制备乙烯/降冰片烯型单体与镍催化剂的共聚物的方法
公开(公告)号：US5929181A
公开(公告)日：1999-07-27
申请号：US871245
申请日：1997-06-09
申请人： Kiryll Lvovich Makovetsky , Eugeny Shmerovich Finkelshtein , Viktor Ivanovich Bykov , Andrey Khristoforovich Bagdasaryan , Brian Leslie Goodall , Larry Funderburk Rhodes
发明人： Kiryll Lvovich Makovetsky , Eugeny Shmerovich Finkelshtein , Viktor Ivanovich Bykov , Andrey Khristoforovich Bagdasaryan , Brian Leslie Goodall , Larry Funderburk Rhodes
IPC分类号： C07F9/50 , C07F15/04 , C08F4/80 , C08F210/02 , C08F232/00 , C08F232/08
CPC分类号： C08F232/08 , C07F15/04 , C07F15/045 , C08F10/00 , C08F210/02 , C08F2410/03
摘要： A method of preparing amorphous copolymers of ethylene and at least one norbornene (NB)-type comonomer is disclosed. These polymers may be random or alternating depending on the choice of catalyst and/or the relative ratio of the monomers used. This method comprises polymerizing said monomers in a diluent or in bulk in the presence of a neutral nickel catalyst which may be represented by the formula ##STR1## wherein Y may be a saturated or unsaturated hydrocarbyl chain, X may be oxygen or sulfur, E may be phosphorus, arsenic, antimony, oxygen or nitrogen, R and R' independently each is hydrogen or a hydrocarbyl group, L is a ligand containing a heteroatom P, N or O or L and R together with L may form part of a chelating structure in which case L is an ethylenic double bond.
摘要翻译：公开了制备乙烯和至少一种降冰片烯（NB）型共聚单体的无定形共聚物的方法。这些聚合物可以是随机的或交替的，这取决于催化剂的选择和/或所用单体的相对比例。该方法包括在中性镍催化剂存在下在稀释剂或本体中聚合所述单体，其可以由下式表示：其中Y可以是饱和或不饱和烃基链，X可以是氧或硫，E可以是磷，砷，锑，氧或氮，R和R'各自独立地为氢或烃基，L为含有杂原子P，N或O或L的配体，R与L一起形成螯合结构的一部分，在这种情况下 L是烯属双键。

8. 发明授权

US06794459B2 Modified polycyclic polymers 有权
标题翻译：改性多环聚合物
公开(公告)号：US06794459B2
公开(公告)日：2004-09-21
申请号：US10224994
申请日：2002-08-21
申请人： Saikumar Jayaraman , George Martin Benedikt , Larry Funderburk Rhodes , Richard Vicari , Robert David Allen , Richard Anthony DiPietro , Ratnam Sooriyakumaran , Thomas Wallow
发明人： Saikumar Jayaraman , George Martin Benedikt , Larry Funderburk Rhodes , Richard Vicari , Robert David Allen , Richard Anthony DiPietro , Ratnam Sooriyakumaran , Thomas Wallow
IPC分类号： C08F3200
CPC分类号： G03F7/039 , C08G61/02 , C08G61/08 , G03F7/0045 , G03F7/0395 , G03F7/0397
摘要： The present invention relates to cyclic polymers and their use in photolithographic applications. The cyclic polymers contain a pendant acid labile functional group and a functional group containing a protected hydroxyl moiety. The polymers are post modified by deprotecting the pendant hydroxyl moiety and reacting the deprotected hydroxyl containing moiety with a coreactant. The post-functionalized polymers find application in chemically amplified photoresist compositions.
摘要翻译：本发明涉及环状聚合物及其在光刻应用中的应用。环状聚合物含有侧链酸不稳定官能团和含有被保护的羟基部分的官能团。通过使侧基羟基部分脱保护并使去保护的含羟基的部分与共反应物反应来对聚合物进行后修饰。后官能化聚合物可用于化学扩增的光致抗蚀剂组合物中。

9. 发明授权

US06451945B1 Modified polycyclic polymers 有权
标题翻译：改性多环聚合物
公开(公告)号：US06451945B1
公开(公告)日：2002-09-17
申请号：US09253499
申请日：1999-02-19
申请人： Saikumar Jayaraman , George Martin Benedikt , Larry Funderburk Rhodes , Richard Vicari , Robert David Allen , Richard Anthony DiPietro , Ratnam Sooriyakumaran , Thomas Wallow
发明人： Saikumar Jayaraman , George Martin Benedikt , Larry Funderburk Rhodes , Richard Vicari , Robert David Allen , Richard Anthony DiPietro , Ratnam Sooriyakumaran , Thomas Wallow
IPC分类号： C08F13208
CPC分类号： G03F7/039 , C08G61/02 , C08G61/08 , G03F7/0045 , G03F7/0395 , G03F7/0397
摘要： The present invention relates to cyclic polymers and their use in photolithographic applications. The cyclic polymers contain a pendant acid labile functional group and a functional group containing a protected hydroxyl moiety. The polymers are post modified by deprotecting the pendant hydroxyl moiety and reacting the deprotected hydroxyl containing moiety with a coreactant. The post-functionalized polymers find application in chemically amplified photoresist compositions.
摘要翻译：本发明涉及环状聚合物及其在光刻应用中的应用。环状聚合物含有侧链酸不稳定官能团和含有被保护的羟基部分的官能团。通过使侧基羟基部分脱保护并使去保护的含羟基的部分与共反应物反应来对聚合物进行后修饰。后官能化聚合物可用于化学扩增的光致抗蚀剂组合物中。

10. 发明授权

US06197984B1 Method for the preparation of copolymers of ethylene/norbornene-type monomers with nickel catalysts 有权
标题翻译：乙烯/降冰片烯型单体与镍催化剂的共聚物的制备方法
公开(公告)号：US06197984B1
公开(公告)日：2001-03-06
申请号：US09305942
申请日：1999-05-06
申请人： Kiryll Lvovich Makovetsky , Eugeny Shmerovich Finkelshtein , Viktor Ivanovich Bykov , Andrey Khristoforovich Bagdasaryan , Larry Funderburk Rhodes
发明人： Kiryll Lvovich Makovetsky , Eugeny Shmerovich Finkelshtein , Viktor Ivanovich Bykov , Andrey Khristoforovich Bagdasaryan , Larry Funderburk Rhodes
IPC分类号： C07F1504
CPC分类号： C08F232/08 , C07F15/04 , C07F15/045 , C08F10/00 , C08F210/02 , C08F2410/03 , C08F4/80 , C08F4/26 , C08F232/00 , C08F2500/03 , C08F4/7081 , C08F4/7014
摘要： A method of preparing amorphous copolymers of ethylene and at least one norbornene (NB)-type comonomer is disclosed. These polymers may be random or alternating depending on the choice of catalyst and/or the relative ratio of the monomers used. This method comprises polymerizing said monomers in a diluent or in bulk in the presence of a neutral nickel catalyst which may be represented by the formula wherein Y may be a saturated or unsaturated hydrocarbyl chain, X may be oxygen or sulfur, E may be phosphorus, arsenic, antimony, oxygen or nitrogen, R and R′ independently each is hydrogen or a hydrocarbyl group, L is a ligand containing a heteroatom P, N or O or L and R together with L may form part of a chelating structure in which case L is an ethylenic double bond.
摘要翻译：公开了制备乙烯和至少一种降冰片烯（NB）型共聚单体的无定形共聚物的方法。这些聚合物可以是随机的或交替的，这取决于催化剂的选择和/或所用单体的相对比例。该方法包括在中性镍催化剂的存在下在稀释剂或本体中聚合所述单体，所述中性镍催化剂可以由式（Ⅳ）代表，Y可以是饱和或不饱和的烃基链，X可以是氧或硫，E可以是磷，砷，锑，氧或氮，R和R'各自独立地是氢或烃基，L是含有杂原子P，N或O或L的配体，R和L一起可以形成螯合结构的一部分，其中L 是乙烯双键。

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