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    • 1. 发明授权
    • Semiconductor laser device with a rounded base mesa structure
    • 具有圆形底座台面结构的半导体激光器件
    • US07894499B2
    • 2011-02-22
    • US10823653
    • 2004-04-14
    • Kwang-ki ChoiJoon-seop Kwak
    • Kwang-ki ChoiJoon-seop Kwak
    • H01S3/16H01S5/00
    • H01S5/227H01S5/32341
    • A semiconductor laser device having a smooth cleavage plane is provided. The provided laser device includes a current injection ridge and force distribution ridges formed adjacent to the current injection ridge, which protrudes from an upper surface of a mesa structure. The mesa structure is formed of multi-semiconductor material layers including a laser resonance layer and cladding layers disposed above and below the resonance layer. The current injection ridge and the force distribution ridges distribute a scribing force when cleaving the laser device so that the smooth cleavage planes are obtained. Defects are prevented in the current injection ridge due to the distribution of force when bonding flip chips.
    • 提供具有平滑解理面的半导体激光器件。 提供的激光装置包括从台面结构的上表面突出的电流注入脊和与当前注入脊相邻形成的力分布脊。 台面结构由包括激光共振层和设置在共振层上方和下方的包覆层的多半导体材料层形成。 当切割激光器件时,当前的注入脊和力分布脊分布划线力,从而获得平滑的解理面。 由于在接合倒装芯片时的力分布,在当前的注入脊中防止了缺陷。
    • 2. 发明申请
    • Semiconductor laser diode and method of fabricating the same
    • 半导体激光二极管及其制造方法
    • US20060109881A1
    • 2006-05-25
    • US11221872
    • 2005-09-09
    • Joon-seop KwakKwang-ki ChoiKyoung-ho HaYeon-hee KimJong-in Shim
    • Joon-seop KwakKwang-ki ChoiKyoung-ho HaYeon-hee KimJong-in Shim
    • H01S5/00
    • H01S5/22H01S5/2202
    • A semiconductor laser diode and a method of fabricating the same are provided. The semiconductor laser diode includes: a substrate; a predetermined compound semiconductor layer formed on the substrate; a lower cladding layer formed on the compound semiconductor layer; an active layer formed on the lower cladding layer; an upper cladding layer formed on the active layer and having a ridge formed in the middle thereof; trenches formed to a predetermined depth on at least one side of the ridge to penetrate the active layer from the upper cladding layer; a current blocking layer formed on surfaces of the upper cladding layer, except a top surface of the ridge, and inner walls of the trenches; a contact layer formed on the top surface of the ridge; and a first electrode formed on top surfaces of the contact layer and the current blocking layer.
    • 提供半导体激光二极管及其制造方法。 半导体激光二极管包括:基板; 形成在所述基板上的预定化合物半导体层; 形成在所述化合物半导体层上的下包层; 形成在下包层上的有源层; 在所述有源层上形成有在其中间形成有脊的上包层; 沟槽形成在脊的至少一侧上的预定深度,以从上包层穿透有源层; 形成在上包层的表面以外的电流阻挡层,除了脊的上表面和沟槽的内壁之外; 形成在所述脊的顶表面上的接触层; 以及形成在接触层和电流阻挡层的顶表面上的第一电极。
    • 5. 发明授权
    • Semiconductor laser diode with current restricting layer and fabrication method thereof
    • 具有限流层的半导体激光二极管及其制造方法
    • US07785911B2
    • 2010-08-31
    • US11580093
    • 2006-10-13
    • Joon-seop KwakKyoung-ho HaYoon-joon Sung
    • Joon-seop KwakKyoung-ho HaYoon-joon Sung
    • H01L21/86
    • H01S5/22H01S5/2063H01S5/32341
    • Provided are a semiconductor laser diode having a current confining layer and a method of fabricating the same. The semiconductor laser diode includes a substrate, a first material layer deposited on the substrate, an active layer which is deposited on the first material layer and emits a laser beam, and a second material layer which is deposited on the active layer and includes a ridge portion protruding from the active layer and a current confining layer formed by injection of ions into peripheral portions of the ridge portion so as to confine a current injected into the active layer. Therefore, it is possible to fabricate an improved semiconductor laser diode having a low-resonance critical current value that can remove a loss in an optical profile and reduce the profile width of a current injected into the active layer while maintaining the width of the ridge portion.
    • 提供一种具有电流限制层的半导体激光二极管及其制造方法。 半导体激光二极管包括衬底,沉积在衬底上的第一材料层,沉积在第一材料层上并发射激光束的有源层和沉积在有源层上并包括脊的第二材料层 从活性层突出的部分和通过将离子注入脊部的周边部分形成的电流限制层,以便限制注入有源层的电流。 因此,可以制造具有低共振临界电流值的改进的半导体激光二极管,其可以消除光学轮廓的损失并且减小注入有源层的电流的轮廓宽度,同时保持脊部的宽度 。