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1. 发明授权

US06531697B1 Method and apparatus for scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜的方法和装置
公开(公告)号：US06531697B1
公开(公告)日：2003-03-11
申请号：US09259334
申请日：1999-03-01
申请人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
发明人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
IPC分类号： H01J3700
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.
摘要翻译：扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

2. 发明授权

US06822233B2 Method and apparatus for scanning transmission electron microscopy 失效
标题翻译：扫描透射电子显微镜的方法和装置
公开(公告)号：US06822233B2
公开(公告)日：2004-11-23
申请号：US10346138
申请日：2003-01-17
申请人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
发明人： Kuniyasu Nakamura , Hiroshi Kakibayashi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato , Takahito Hashimoto
IPC分类号： H01J3704
CPC分类号： H01J37/1471 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.
摘要翻译：扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

3. 发明授权

US5866905A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5866905A
公开(公告)日：1999-02-02
申请号：US686740
申请日：1996-07-26
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , G01N23/046 , G01R31/305 , G01N2223/419 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.
摘要翻译：一种扫描透射电子显微镜，包括具有散射角限制孔径（内角）的电子检测系统和检体与电子检测器（包括闪烁体和光导体）之间的散射角限制孔径（外角）并且仅安装一个电子检测器。

4. 发明授权

US6051834A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US6051834A
公开(公告)日：2000-04-18
申请号：US126432
申请日：1998-07-30
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.
摘要翻译：通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

5. 发明授权

US5552602A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5552602A
公开(公告)日：1996-09-03
申请号：US398684
申请日：1995-03-06
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Tadokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Tadokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa
IPC分类号： G01N23/04 , G01R31/305 , H01J37/26
CPC分类号： G01R31/305 , G01N23/046 , G01N2223/419 , H01J2237/226
摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen as well as conventional electron microscope observations is carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. For that purpose, the present invention provides a scanning transmission electron microscope having an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons (i.d. avalanche multiplication), an electron gun emitting an electron beam toward the photoconductive-film to detect the holes generated therein, and electron deflector electrodes deflecting the electron beam on the photoconductive-film. Avalanche multiplication in the photoconductive-film amplifies the signal of these photons at so high signal-to-noise ratio that the electron microscope in this invention can detect such weak electrons as emitted at high angle from the specimen at high sensitivity and resolution. Therefore this invention enables a scanning transmission electron microscope to obtain for example 3-dimensional image of point defects and impurity elements existing in joint interfaces and contacts in a ULSI device rapidly and accurately.
摘要翻译：通过电子显微镜以高速和准确的方式对薄膜样品中的原子排列和原子种类进行3维观察，以及常规的电子显微镜观察，测量从样品以高角度发射的电子。为此目的，本发明提供了一种具有电子检测装置的扫描透射电子显微镜，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 与这些光子（i.d.雪崩乘法）一样多的电子 - 空穴对的1000倍，向光电导膜发射电子束以检测其中产生的空穴的电子枪以及偏转电子束在光电导膜上的电子偏转器电极。光电导膜中的雪崩乘法以如此高的信噪比放大了这些光子的信号，使得本发明的电子显微镜能够以高灵敏度和分辨率从样品中以高角度检测出这样的弱电子。因此，本发明能够使扫描透射电子显微镜能够快速，准确地获得例如存在于ULSI装置的接合界面和触点中的点缺陷和杂质元素的3维图像。

6. 发明授权

US5783830A Sample evaluation/process observation system and method 失效
标题翻译：样本评估/过程观察系统和方法
公开(公告)号：US5783830A
公开(公告)日：1998-07-21
申请号：US873788
申请日：1997-06-12
申请人： Hiroshi Hirose , Hidemi Koike , Shigeto Isakozawa , Yuji Sato , Mikio Ichihashi , Motohide Ukiana
发明人： Hiroshi Hirose , Hidemi Koike , Shigeto Isakozawa , Yuji Sato , Mikio Ichihashi , Motohide Ukiana
IPC分类号： H01J37/305 , H01J37/20
CPC分类号： H01J37/3056 , H01J37/265 , H01J2237/20 , H01J2237/26
摘要： A sample evaluation/process observation system includes a common sample stage which accommodates a plurality of samples to be processed. The common sample stage is provided with a processing/observing notch and also with a movement mechanism. The movement mechanism functions to sequentially move the plurality of samples to the notch to cause the samples to be exposed to a predetermined processing beam and observing beam. The system further includes a beam processing device in which the common sample stage can be mounted and which functions to irradiate the predetermined processing beam on the plurality of samples through the notch to thereby sequentially perform beam processing operation over the samples. The system further includes a beam observation device in which the common sample stage can be mounted and which functions to irradiate the predetermined observing beam on the plurality of samples through the notch to sequentially observe and evaluate shapes of the plurality of samples. A mark is formed on one sample by a focused ion beam device so that positioning of the mark realizes automatic processing of a part of the sample to be processed. Further, the common sample stage is used in a high-acceleration transmission electron microscope and a high-acceleration scanning electron microscope and focused ion beam device.
摘要翻译：样本评估/过程观察系统包括容纳多个待处理样本的公共样本阶段。公共样品台具有处理/观察凹口，并且还具有移动机构。移动机构用于将多个样本顺序地移动到凹口，以使样本暴露于预定的处理束和观察波束。该系统还包括其中可以安装公共样本台的束处理装置，并且其功能是通过凹口对多个采样上的预定处理光束照射，从而顺序地对采样进行光束处理操作。该系统还包括其中可以安装公共样品台的束观察装置，并且其功能是通过凹口将多个样品上的预定观察光束照射，以依次观察和评估多个样品的形状。通过聚焦离子束装置在一个样品上形成标记，使得标记的定位实现待处理样品的一部分的自动处理。此外，普通样品台用于高加速度透射电子显微镜和高加速度扫描电子显微镜和聚焦离子束装置。

7. 发明授权

US5134289A Field emission electron device which produces a constant beam current 失效
标题翻译：产生恒流束电流的场发射电子器件
公开(公告)号：US5134289A
公开(公告)日：1992-07-28
申请号：US627976
申请日：1990-12-17
申请人： Hisaya Murakoshi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato
发明人： Hisaya Murakoshi , Mikio Ichihashi , Shigeto Isakozawa , Yuji Sato
IPC分类号： H01J37/285 , H01J37/073 , H01J37/24
CPC分类号： H01J37/243 , H01J37/073
摘要： A field emission electron microscope in which a controller is provided to make an electron beam current fixed due to variations in an accelerating voltage or an extracting voltage to thereby make fixed the brightness of an electron beam with which a specimen is illuminated.

8. 发明授权

US5717207A Transmission electron microscope with camera system 失效
标题翻译：带相机系统的透射电子显微镜
公开(公告)号：US5717207A
公开(公告)日：1998-02-10
申请号：US685105
申请日：1996-07-22
申请人： Masanari Koguchi , Hiroshi Kakibayashi , Hiroyuki Tanaka , Shigeto Isakozawa , Keiichi Kanehori , Tatsuo Makishima , Kazutaka Tsuji
发明人： Masanari Koguchi , Hiroshi Kakibayashi , Hiroyuki Tanaka , Shigeto Isakozawa , Keiichi Kanehori , Tatsuo Makishima , Kazutaka Tsuji
IPC分类号： H01J37/22 , H01J37/26
CPC分类号： H01J37/265 , H01J37/224 , H01J2237/2445 , H01J2237/2802
摘要： A transmission electron microscope has a camera system that is linked to the optical lens system of the electron microscope by linking the number of electron beam scanning lines of the camera system with the zoom function of the optical lens system. Thus, the number of scanning lines increases as the magnification of the transferred image decreases. Further, the specimen under observation is photographed with a constant number of pixels at all times regardless of the magnification of the transferred image by the optical lens system, thus preventing a reduction in the amount of specimen information.
摘要翻译：透射电子显微镜具有通过将相机系统的电子束扫描线的数量与光学透镜系统的变焦功能相关联而连接到电子显微镜的光学透镜系统的照相机系统。因此，扫描线的数量随着传送图像的放大倍数的减小而增加。此外，无论光学透镜系统的转印图像的放大率如何，始终以恒定数量的像素拍摄观察的样本，从而防止样本信息量的减少。

9. 发明授权

US5008536A Electron microscope having electrical and mechanical position controls for specimen and positioning method 失效
标题翻译：电子显微镜具有用于样品和定位方法的电气和机械位置控制
公开(公告)号：US5008536A
公开(公告)日：1991-04-16
申请号：US446283
申请日：1989-12-05
申请人： Shigeto Isakozawa , Takahito Hashimoto
发明人： Shigeto Isakozawa , Takahito Hashimoto
IPC分类号： H01J37/20 , H01J37/147 , H01J37/26
CPC分类号： H01J37/265 , H01J37/147
摘要： An electron microscope and positioning method comprises a stage, an objective lens, a magnifying lens, a magnification setting the magnifying lens, a stage mover for mechanically moving the stage in two directions defining a two dimensional space so as to move a visual field of the speciment and a electrical shifting device which is disposed on opposite sides of an axis of rotation about which the image is rotated through an angle in the two dimensional directions so as to move the visual field in fine increments. The objective lens rotates the electron beam through the angle. A control panel sets the moving distance and moving direction of the stage mover and the electrical shifting device, and a computer selects the stage mover or the electrical shifting device according to the magnification setting and controls the stage mover or the electrical shifting device according to the moving distance and the moving direction. The stage mover and the electrical shifting device are automatically and selectively controlled by the control panel according to the magnification setting without changing the moving direction of the specimen image displayed in an image observing device.
摘要翻译：一种电子显微镜和定位方法，包括：台，物镜，放大镜，放大镜的放大倍数;用于在限定二维空间的两个方向上机械地移动台的移动台，以移动形状和电动换档装置，其设置在旋转轴的相对侧上，图像在该旋转轴周围以两维方向旋转角度，以便以微小的增量移动视野。物镜使电子束旋转角度。控制面板设置载物台移动装置和电动换档装置的移动距离和移动方向，计算机根据放大倍率设定选择载物台移动装置或电动换挡装置，并根据移动距离和移动方向。根据放大率设定，通过控制面板自动地和选择性地控制舞台动子和电动换档装置，而不改变在图像观察装置中显示的标本图像的移动方向。

10. 发明申请

US20090242794A1 Charged particle beam equipment 有权
标题翻译：带电粒子束设备
公开(公告)号：US20090242794A1
公开(公告)日：2009-10-01
申请号：US12081969
申请日：2008-04-24
申请人： Hiromi Inada , Hiroyuki Tanaka , Shun-ichi Watanabe , Shigeto Isakozawa , Mitsugu Sato , Atsushi Takane , Satoshi Yamaguchi
发明人： Hiromi Inada , Hiroyuki Tanaka , Shun-ichi Watanabe , Shigeto Isakozawa , Mitsugu Sato , Atsushi Takane , Satoshi Yamaguchi
IPC分类号： G21K5/10 , G01K1/08
CPC分类号： H01J37/28 , H01J37/222 , H01J37/265 , H01J2237/15 , H01J2237/2487 , H01J2237/2826
摘要： Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.
摘要翻译：带电粒子束设备具有用于校准放大的标本图像的尺寸值的处理单元和用于改变扫描带电粒子束的量的装置。此外，试样架具有用于保持具有周期性结构的试样或同时具有周期性结构和非周期性结构的试样的机构，以及用于自动改变放大的试样图像的倍率并存储测量值的存储装置在所有放大倍率。

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