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    • 4. 发明授权
    • Probe needle
    • 探针
    • US5532613A
    • 1996-07-02
    • US227638
    • 1994-04-14
    • Yasushi NagasawaSatoru YamashitaMasahiko Matsudo
    • Yasushi NagasawaSatoru YamashitaMasahiko Matsudo
    • G01R1/067G01R1/073G01R3/00
    • G01R1/07357G01R1/06711G01R1/06761G01R1/06772G01R3/00G01R1/0675Y10T137/5762
    • The present invention relates to a probe needle wherein a conductive film is formed over a first insulating film formed around the outer periphery of a rod-like member through which a signal current flows, a second insulating film is formed over the outer periphery of the conductive film, and the conductive film is grounded. Since the rod-like member through which a signal current flows is thereby shielded, it is not affected by noise, and mutual crosstalk between signal currents is also prevented. Moreover, since ill effects caused by mutual contact with other probe needles is prevented by the second insulating film, reliable and stable measurement is possible. The coating of the probe needle is implemented by covering non-coating portions of the probe needle by a melted thermally liquefiable wax, hardening the thermally liquefiable wax covering the non-coating portions at room temperature, applying a coating to the probe needle by vacuum deposition, heating the thermally liquefiable wax once again, and then removing the thermally liquefiable wax from the probe needle. As a result, a probe needle is obtained wherein a non-coating portion is reliably delimited from a coating portion by a masking boundary. When the coating process is completed, the probe needle could be subjected to washing to completely remove any remaining wax.
    • 本发明涉及一种探针,其中导电膜形成在围绕信号电流流动的杆状构件的外周围形成的第一绝缘膜上,第二绝缘膜形成在导电的外周上 膜,导电膜接地。 由于信号电流流过的杆状构件被屏蔽,所以不受噪声的影响,并且也防止了信号电流之间的相互串扰。 此外,由于通过第二绝缘膜防止与其他探针的相互接触引起的不良影响,因此可靠且稳定的测量是可能的。 探针的涂层通过用熔融的可热化的液体蜡覆盖探针的未涂覆部分来实现,在室温下固化覆盖非涂覆部分的热可液化蜡,通过真空沉积将涂层施加到探针上 再次加热可热化的蜡,然后从探针取出热可液化的蜡。 结果,获得探针,其中非涂覆部分通过掩蔽边界与涂布部分可靠地界定。 当涂布过程完成时,可以对探针进行洗涤以完全除去任何剩余的蜡。
    • 5. 发明授权
    • Optical information recording medium
    • 光信息记录介质
    • US07096479B2
    • 2006-08-22
    • US10777034
    • 2004-02-13
    • Osamu AkutsuMasaru HatakeyamaSatoru Yamashita
    • Osamu AkutsuMasaru HatakeyamaSatoru Yamashita
    • G11B7/24
    • G11B7/268G11B7/00454G11B7/00456G11B7/243G11B7/259
    • An optical information recording medium 10 is composed of at least a reflective layer 2, a first protective layer 3, a phase-change type optical recording layer 4 and a second protective layer 5 being sequentially laminated on a substrate 1. The optical information recording medium 10 is conducted to record information by changing a phase of the phase-change type optical recording layer 4 by irradiating light from the second protective layer 5 side. The phase-change type optical recording layer 4 further contains at least Ti, In, Ge, Sb and Te. When each content amount of the Ti, In, Ge, Sb and Te is defined as v, w, x, y and z in atomic percent respectively, each content amount of v, w, x, y and z in atomic percent satisfies following relations: 0.3≦v≦4, 0.3≦w≦3, 3.4≦x≦14.5, 2.1≦y/z≦4 and 98.8≦v+w+x+y+z≦100.≦.
    • 光信息记录介质10至少由反射层2,第一保护层3,相变型光记录层4和第二保护层5构成,顺序层叠在基板1上。光信息记录介质 通过照射来自第二保护层5侧的光来改变相变型光学记录层4的相位来进行记录信息。 相变型光学记录层4至少还含有Ti,In,Ge,Sb和Te。 当Ti,In,Ge,Sb和Te的每个含量分别以原子百分比定义为v,w,x,y和z时,原子百分数的v,w,x,y和z的每个含量满足以下 关系:0.3 <= v <= 4,0.3 <= w <= 3,3.4 <= x <= 14.5,2.1 <= y / z <= 4和98.8 <= v + w + x + y + z < 100。
    • 7. 发明授权
    • Method of coating a conductive probe needle
    • 涂敷导电探针的方法
    • US5690998A
    • 1997-11-25
    • US622854
    • 1996-03-29
    • Yasushi NagasawaSatoru YamashitaMasahiko Matsudo
    • Yasushi NagasawaSatoru YamashitaMasahiko Matsudo
    • G01R1/067G01R1/073G01R3/00B05D1/32B05D1/36
    • G01R1/07357G01R1/06711G01R1/06761G01R1/06772G01R3/00G01R1/0675Y10T137/5762
    • The present invention relates to a probe needle wherein a conductive film is formed over a first insulating film formed around the outer periphery of a rod-like member through which a signal current flows, a second insulating film is formed over the outer periphery of the conductive film, and the conductive film is grounded. Since the rod-like member through which a signal current flows is thereby shielded, it is not affected by noise, and mutual crosstalk between signal currents is also prevented. Moreover, since ill effects caused by mutual contact with other probe needles is prevented by the second insulating film, reliable and stable measurement is possible. The coating of the probe needle is implemented by covering non-coating portions of the probe needle by a melted thermally liquefiable wax, hardening the thermally liquefiable wax covering the non-coating portions at room temperature, applying a coating to the probe needle by vacuum deposition, heating the thermally liquefiable wax once again, and then removing the thermally liquefiable wax from the probe needle. As a result, a probe needle is obtained wherein a non-coating portion is reliably delimited from a coating portion by a masking boundary. When the coating process is completed, the probe needle could be subjected to washing to completely remove any remaining wax.
    • 本发明涉及一种探针,其中导电膜形成在围绕信号电流流动的杆状构件的外周围形成的第一绝缘膜上,第二绝缘膜形成在导电的外周上 膜,导电膜接地。 由于信号电流流过的杆状构件被屏蔽,所以不受噪声的影响,并且也防止了信号电流之间的相互串扰。 此外,由于通过第二绝缘膜防止与其他探针的相互接触引起的不良影响,因此可靠且稳定的测量是可能的。 探针的涂层通过用熔融的可热化的液体蜡覆盖探针的未涂覆部分来实现,在室温下固化覆盖非涂覆部分的热可液化蜡,通过真空沉积将涂层施加到探针上 再次加热可热化的蜡,然后从探针取出热可液化的蜡。 结果,获得探针,其中非涂覆部分通过掩蔽边界与涂布部分可靠地界定。 当涂布过程完成时,可以对探针进行洗涤以完全除去任何剩余的蜡。
    • 9. 发明授权
    • Vertical probe tester card with coaxial probes
    • 带同轴探头的垂直探头测试卡
    • US5525911A
    • 1996-06-11
    • US283900
    • 1994-08-04
    • Hiroshi MarumoSatoru YamashitaNobuyuki NegishiShoichi Kanai
    • Hiroshi MarumoSatoru YamashitaNobuyuki NegishiShoichi Kanai
    • G01R1/067G01R1/073G01R31/02
    • G01R1/06711G01R1/06772G01R1/07357
    • A probe card is electrically connected to a tester, electrically contacted and connected to circuits to be tested, and used to transmit test signals between the tester and the circuits. It includes a plate assembly having a printed board and an earth plate insulated from each other. Probe assemblies are supported by the plate assembly and are substantially vertically contacted at their foremost ends with pads of the circuits to be tested. Each probe assembly includes a center conductor having a sharpened tip contacted with the pad of the circuit to be tested. A holder conductor shrouds the center conductor while leaving the front end portion thereof not enclosed, and having electrical continuity with the center conductor. A dielectric shrouds the holder conductor, a peripheral conductor coaxially arranged around the holder conductor with the dielectric interposed between them, and a sheath enclosing the peripheral conductor. The upper end of the holder conductor is electrically connected to a circuit on the printed board while the upper end of the peripheral conductor is electrically connected to a circuit on the earth plate.
    • 探针卡电连接到测试仪,电接触并连接到要测试的电路,并用于在测试仪和电路之间传输测试信号。 它包括具有彼此绝缘的印刷板和接地板的板组件。 探针组件由板组件支撑,并且在其最前端处与被测试电路的焊盘基本垂直接触。 每个探针组件包括具有与待测试电路的焊盘接触的尖锐尖端的中心导体。 保持器导体围绕中心导体,同时使其前端部分不被封闭,并且与中心导体具有导电性。 电介质覆盖保持器导体,周边导体同轴地布置在保持器导体周围,电介质插入在它们之间,以及护套围绕外围导体。 保持器导体的上端电连接到印刷电路板上的电路,而外围导体的上端电连接到接地板上的电路。
    • 10. 发明授权
    • Probe apparatus
    • 探头设备
    • US5325052A
    • 1994-06-28
    • US943492
    • 1992-09-11
    • Satoru Yamashita
    • Satoru Yamashita
    • G01R1/067G01R1/073G01R31/02
    • G01R1/06738G01R1/06755G01R31/2874G01R1/07357
    • A probe apparatus comprises a vertically movable table for placing a semiconductor wafer having semiconductor devices, a heater for heating the wafer at a predetermined temperature, and a probe card located above the wafer and having support and positioning portions for probes. The probe has a vertical portion which extends downward substantially vertically, and is capable of buckling. Two positioning plates are supported by the support positioning portion through which the vertical portions of said probes are downwardly extended wherein a temperature controller heats the probes at the positioning plates at a predetermined temperature.
    • 探针装置包括用于放置具有半导体器件的半导体晶片的垂直移动台,用于将晶片加热到预定温度的加热器和位于晶片上方的探针卡,并具有用于探针的支撑和定位部分。 探针具有垂直向下延伸的垂直部分,并且能够弯曲。 两个定位板由支撑定位部分支撑,所述探针的垂直部分通过所述定位部向下延伸,其中温度控制器以预定温度加热定位板处的探针。