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1. 发明申请

US20090239384A1 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开
标题翻译：基板处理装置和基板处理方法
公开(公告)号：US20090239384A1
公开(公告)日：2009-09-24
申请号：US12369874
申请日：2009-02-12
申请人： Kunio Fujiwara , Akihiro Hosokawa , Kozo Terashima , Atsushi Osawa
发明人： Kunio Fujiwara , Akihiro Hosokawa , Kozo Terashima , Atsushi Osawa
IPC分类号： H01L21/306
CPC分类号： H01L21/67057
摘要： A discharge hole of a lower nozzle is directed at an angle of 5 degrees to 40 degrees slanting inward with respect to a normal to the upper surface of a bottom plate. Thus, the flow pressure of a processing solution discharged through the discharge hole is not excessively reduced. Further, a circulation area of the processing solution does not expand widely in an inner bath. As a result, the processing solution in the inner bath is effectively displaced while the processing solution smoothly flows into gaps between substrates.
摘要翻译：下喷嘴的排出孔相对于底板的上表面的法线向内倾斜5度至40度的角度。因此，通过排出孔排出的处理液的流量压力不会过度降低。此外，处理液的循环区域在内槽中不会广泛扩大。结果，内浴中的处理液有效地移位，同时处理溶液顺利地流入基板之间的间隙。

2. 发明授权

US08206548B2 Substrate processing apparatus and substrate processing method 有权
标题翻译：基板加工装置及基板处理方法
公开(公告)号：US08206548B2
公开(公告)日：2012-06-26
申请号：US12030494
申请日：2008-02-13
申请人： Itsuki Kajino , Akihiro Hosokawa , Kozo Terashima
发明人： Itsuki Kajino , Akihiro Hosokawa , Kozo Terashima
IPC分类号： C23F1/00 , C23F1/08
CPC分类号： B08B3/04 , H01L21/67057 , H01L21/67086
摘要： Mutually different plural kinds of processing liquid are sequentially supplied to a gap space in which a substrate is arranged to perform a wet processing to the substrate with respect to each processing liquid. Further, the processing liquid used in the wet processing is sequentially released from the communicating portion upon execution of each wet processing. The liquid retrieval tanks are selectively positioned at a retrieval position corresponding to the kind of processing liquid released from the communicating portion by relatively moving the processing unit and the liquid retrieval unit. The liquid retrieval unit is separated from the processing unit and is arranged below the processing unit. The processing liquid is released from the communicating portion of the processing unit to below the gap space downwards vertically.
摘要翻译：相互不同的多种处理液依次供给到其中布置有基板以对每个处理液体进行对基板的湿加工的间隙空间。此外，在湿式处理中使用的处理液在执行每个湿法处理时从通信部分顺序地释放。液体回收槽通过相对移动处理单元和液体回收单元而选择性地定位在与从连通部分释放的处理液的种类相对应的回收位置。液体检索单元与处理单元分离，并且布置在处理单元的下方。处理液从处理单元的连通部分向下垂直向下排列到间隙空间的下方。

3. 发明申请

US20080237188A1 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 有权
标题翻译：基板处理装置和基板处理方法
公开(公告)号：US20080237188A1
公开(公告)日：2008-10-02
申请号：US12030494
申请日：2008-02-13
申请人： Itsuki Kajino , Akihiro Hosokawa , Kozo Terashima
发明人： Itsuki Kajino , Akihiro Hosokawa , Kozo Terashima
IPC分类号： C23F1/00 , C23F1/08 , B08B13/00 , B08B3/08
CPC分类号： B08B3/04 , H01L21/67057 , H01L21/67086
摘要： Mutually different plural kinds of processing liquid are sequentially supplied to a gap space in which a substrate is arranged to perform a wet processing to the substrate with respect to each processing liquid. Further, the processing liquid used in the wet processing is sequentially released from the communicating portion upon execution of each wet processing. The liquid retrieval tanks are selectively positioned at a retrieval position corresponding to the kind of processing liquid released from the communicating portion by relatively moving the processing unit and the liquid retrieval unit. The liquid retrieval unit is separated from the processing unit and is arranged below the processing unit. The processing liquid is released from the communicating portion of the processing unit to below the gap space downwards vertically.
摘要翻译：相互不同的多种处理液依次供给到其中布置有基板以对每个处理液体进行对基板的湿加工的间隙空间。此外，在湿式处理中使用的处理液在执行每个湿法处理时从通信部分顺序地释放。液体回收槽通过相对移动处理单元和液体回收单元而被选择性地定位在与从连通部分释放的处理液的种类相对应的回收位置。液体检索单元与处理单元分离，并且布置在处理单元的下方。处理液从处理单元的连通部分向下垂直向下排列到间隙空间的下方。

4. 发明授权

US08783390B2 Vehicle drive apparatus 有权
标题翻译：车辆驱动装置
公开(公告)号：US08783390B2
公开(公告)日：2014-07-22
申请号：US12295336
申请日：2007-06-21
申请人： Yoshinori Maeda , Akihiro Hosokawa , Yousuke Suzuki , Michitaka Tsuchida , Kazuya Okumura , Tadahiro Oshiumi , Kensuke Yoshizue , Koji Sugiyama
发明人： Yoshinori Maeda , Akihiro Hosokawa , Yousuke Suzuki , Michitaka Tsuchida , Kazuya Okumura , Tadahiro Oshiumi , Kensuke Yoshizue , Koji Sugiyama
IPC分类号： B60K17/356
CPC分类号： B60K17/356 , B60G7/008 , B60G17/0195 , B60G21/051 , B60G2200/142 , B60G2200/21 , B60G2200/422 , B60G2204/129 , B60G2204/148 , B60G2204/30 , B60G2206/20 , B60G2300/50 , B60G2800/952 , B60K23/0808 , B60W30/04 , B60W30/045 , B60W2720/14 , B60W2720/30 , Y02T10/7258
摘要： A vehicle drive apparatus independently controls drive forces for a front-right drive wheel, a front-left drive wheel, a rear-right drive wheel, and a rear-left drive wheel using a front-right electric motor, a front-left electric motor, a rear-right electric motor, and a rear-left electric motor, respectively. The drive forces for the drive wheels of a vehicle incorporating the vehicle drive apparatus are determined based on the target moments in the yaw and roll directions of the vehicle, the total drive for the drive wheels, and the drive reaction forces at the drive wheels. Thus, the performance desired by the driver can be achieved, and the drivability therefore improves accordingly.
摘要翻译：车辆驱动装置使用前右电动机独立地控制前右驱动轮，前左驱动轮，后右驱动轮和左后驱动轮的驱动力，左前电动电动机，右后电动机和左后电动机。基于车辆的偏航和滚动方向上的目标力矩，驱动轮的总驱动力和驱动轮的驱动反作用力来确定搭载有车辆驱动装置的车辆的驱动轮的驱动力。因此，可以实现驾驶员期望的性能，因此可以相应地提高驾驶性能。

5. 发明授权

US07641434B2 Dual substrate loadlock process equipment 有权
标题翻译：双基板负载锁定工艺设备
公开(公告)号：US07641434B2
公开(公告)日：2010-01-05
申请号：US10842079
申请日：2004-05-10
申请人： Shinichi Kurita , Wendell T. Blonigan , Akihiro Hosokawa
发明人： Shinichi Kurita , Wendell T. Blonigan , Akihiro Hosokawa
IPC分类号： C23C16/00 , H01L21/00
CPC分类号： H01L21/68742 , B65G49/068 , B65G2249/02 , B65G2249/04 , C23C14/566 , C23C14/568 , C23C16/54 , H01L21/67103 , H01L21/67109 , H01L21/67167 , H01L21/67201 , H01L21/67739 , H01L21/67745 , H01L21/67748
摘要： One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The first support structure is located above the second support structure. The loadlock includes an elevator to control the vertical position of the support structures. The loadlock also includes a first aperture to permit insertion of an unprocessed substrate into the loadlock and removal of a processed substrate from the loadlock, as well as a second aperture to permit removal of an unprocessed substrate from the loadlock and insertion of a processed substrate into the loadlock. A cooling plate is also located in the loadlock. The cooling plate includes a surface adapted to support a processed substrate thereon. A heating device may be located in the loadlock above the first support structure.
摘要翻译：一个实施例涉及一种其中具有第一支撑结构的负载锁，用于支撑一个未处理的基板和其中的第二支撑结构以支撑一个处理的基板。第一支撑结构位于第二支撑结构的上方。负载锁包括用于控制支撑结构的垂直位置的电梯。负载锁还包括第一孔，以允许将未处理的衬底插入到装载锁中并从加载锁中移除经处理的衬底，以及第二孔，以允许将未处理的衬底从负载锁上移除并将经处理的衬底插入负载锁。一个冷却板也位于负载锁中。冷却板包括适于在其上支撑经处理的基板的表面。加热装置可以位于第一支撑结构上方的装载锁中。

6. 发明申请

US20090108671A1 VEHICLE DRIVE APPARATUS 有权
标题翻译：车辆驱动装置
公开(公告)号：US20090108671A1
公开(公告)日：2009-04-30
申请号：US12295336
申请日：2007-06-21
申请人： Yoshinori Maeda , Akihiro Hosokawa , Yousuke Suzuki , Michitaka Tsuchida , Kazuya Okumura , Tadahiro Oshiumi , Kensuke Yoshizue , Koji Sugiyama
发明人： Yoshinori Maeda , Akihiro Hosokawa , Yousuke Suzuki , Michitaka Tsuchida , Kazuya Okumura , Tadahiro Oshiumi , Kensuke Yoshizue , Koji Sugiyama
IPC分类号： B60K7/00
CPC分类号： B60K17/356 , B60G7/008 , B60G17/0195 , B60G21/051 , B60G2200/142 , B60G2200/21 , B60G2200/422 , B60G2204/129 , B60G2204/148 , B60G2204/30 , B60G2206/20 , B60G2300/50 , B60G2800/952 , B60K23/0808 , B60W30/04 , B60W30/045 , B60W2720/14 , B60W2720/30 , Y02T10/7258
摘要： A vehicle drive apparatus independently controls drive forces for a front-right drive wheel, a front-left drive wheel, a rear-right drive wheel, and a rear-left drive wheel using a front-right electric motor, a front-left electric motor, a rear-right electric motor, and a rear-left electric motor, respectively. The drive forces for the drive wheels of a vehicle incorporating the vehicle drive apparatus are determined based on the target moments in the yaw and roll directions of the vehicle, the total drive for the drive wheels, and the drive reaction forces at the drive wheels. Thus, the performance desired by the driver can be achieved, and the drivability therefore improves accordingly.
摘要翻译：车辆驱动装置使用前右电动机独立地控制前右驱动轮，前左驱动轮，后右驱动轮和左后驱动轮的驱动力，左前电动电动机，右后电动机和左后电动机。基于车辆的偏航和滚动方向上的目标力矩，驱动轮的总驱动力和驱动轮的驱动反作用力来确定车辆驱动装置的车辆的驱动轮的驱动力。因此，可以实现驾驶员期望的性能，因此可以相应地提高驾驶性能。

7. 发明授权

US07442900B2 Chamber for uniform heating of large area substrates 失效
标题翻译：用于均匀加热大面积基材的室
公开(公告)号：US07442900B2
公开(公告)日：2008-10-28
申请号：US11396477
申请日：2006-04-03
申请人： Makoto Inagawa , Akihiro Hosokawa
发明人： Makoto Inagawa , Akihiro Hosokawa
IPC分类号： F27B5/14 , C23C16/00 , C23C16/54 , H01L21/324
CPC分类号： H01L21/67109 , C23C16/54 , F27B17/0025
摘要： Embodiments of the present invention generally provide an apparatus for providing a uniform thermal profile to a plurality of large area substrates during thermal processing. In one embodiment, an apparatus for thermal processing large area substrates includes a chamber having a plurality of processing zones disposed therein that are coupled to a lift mechanism. The lift mechanism is adapted to vertically position the plurality of processing zones within the chamber. Each processing zone further includes an upper heated plate, a lower heated plate adapted to support a first substrate thereon and an unheated plate adapted to support a second substrate thereon, wherein the unheated plate is disposed between the upper and lower heated plates.
摘要翻译：本发明的实施例通常提供一种用于在热处理期间向多个大面积基板提供均匀热分布的装置。在一个实施例中，用于热处理大面积基板的装置包括具有设置在其中的多个处理区域的室，其联接到升降机构。提升机构适于将多个处理区域垂直地定位在室内。每个处理区还包括上加热板，适于在其上支撑第一基板的下加热板和适于在其上支撑第二基板的未加热板，其中未加热板设置在上加热板和下加热板之间。

8. 发明申请

US20080006523A1 COOLED PVD SHIELD 审中-公开
标题翻译：冷却PVD膜
公开(公告)号：US20080006523A1
公开(公告)日：2008-01-10
申请号：US11764217
申请日：2007-06-17
申请人： Akihiro Hosokawa , Bradley O. Stimson , Hienminh Huu Le , Makoto Inagawa
发明人： Akihiro Hosokawa , Bradley O. Stimson , Hienminh Huu Le , Makoto Inagawa
IPC分类号： C23C16/00 , C23C14/32
CPC分类号： C23C14/042 , C23C14/50 , C23C14/564 , H01J37/32458 , H01J37/32623 , H01J37/32651 , H01J37/32715
摘要： The present invention generally comprises a top shield for shielding a shadow frame within a PVD chamber. The top shield may remain in a stationary position and at least partially shield the shadow frame to reduce the amount of material that may deposit on the shadow frame during processing. The top shield may be cooled to reduce the amount of fluxuation in temperature of the top shield and shadow frame during processing and/or during down time.
摘要翻译：本发明通常包括用于屏蔽PVD室内的阴影框架的顶部屏蔽件。顶部屏蔽可以保持在静止位置，并且至少部分地遮蔽阴影框架以减少在处理期间可能沉积在阴影框架上的材料的量。顶部屏蔽可以被冷却以减少处理期间和/或在停机期间顶部屏蔽和阴影框架的温度的变化量。

9. 发明申请

US20070261951A1 REACTIVE SPUTTERING ZINC OXIDE TRANSPARENT CONDUCTIVE OXIDES ONTO LARGE AREA SUBSTRATES 审中-公开
标题翻译：氧化锌氧化物透明导电氧化物在大面积基材上的反应性溅射
公开(公告)号：US20070261951A1
公开(公告)日：2007-11-15
申请号：US11697476
申请日：2007-04-06
申请人： Yan Ye , Ankur Kadam , Yanping Li , Allen Lau , Makoto Inagawa , Bradley Stimson , Akihiro Hosokawa
发明人： Yan Ye , Ankur Kadam , Yanping Li , Allen Lau , Makoto Inagawa , Bradley Stimson , Akihiro Hosokawa
IPC分类号： C23C14/00
CPC分类号： C23C14/564 , C23C14/0063 , C23C14/35 , H01J37/3244 , H01J37/34 , H01J37/3438
摘要： The present invention generally comprises one or more cooled anodes shadowing one or more gas introduction tubes where both the cooled anodes and the gas introduction tubes span a processing space defined between one or more sputtering targets and one or more substrates within a sputtering chamber. The gas introduction tubes may have gas outlets that direct the gas introduced away from the one or more substrates. The gas introduction tubes may introduce reactive gas, such as oxygen, into the sputtering chamber for depositing TCO films by reactive sputtering. During a multiple step sputtering process, the gas flows (i.e., the amount of gas and the type of gas), the spacing between the target and the substrate, and the DC power may be changed to achieve a desired result.
摘要翻译：本发明通常包括一个或多个冷却的阳极，其遮蔽一个或多个气体导入管，其中冷却的阳极和气体引入管都跨越在溅射室内的一个或多个溅射靶和一个或多个衬底之间限定的处理空间。气体导入管可以具有引导从一个或多个基底引入的气体的气体出口。气体引入管可以将诸如氧的反应性气体引入到用于通过反应溅射沉积TCO膜的溅射室中。在多步骤溅射处理中，可以改变气体流动（即，气体的量和气体的类型），靶和基板之间的间隔以及DC功率以实现期望的结果。

10. 发明申请

US20070193881A1 Partially suspended rolling magnetron 有权
标题翻译：部分悬浮磁控管
公开(公告)号：US20070193881A1
公开(公告)日：2007-08-23
申请号：US11347667
申请日：2006-02-03
申请人： Makoto Inagawa , Akihiro Hosokawa , John White
发明人： Makoto Inagawa , Akihiro Hosokawa , John White
IPC分类号： C23C14/00
CPC分类号： H01J37/3408 , H01J37/3435 , H01J37/3455
摘要： A magnetron scanning and support mechanism in which the magnetron is partially supported from an overhead scanning mechanism through multiple springs coupled to different horizontal locations on the magnetron and partially supported from below at multiple locations on the target, on which it slides or rolls. In one embodiment, the yoke plate is continuous and uniform. In another embodiment, the magnetron's magnetic yoke is divided into two flexible yokes, for example, of complementary serpentine shape and each supporting magnets of respective polarity. The yokes separated by a gap sufficiently small that the two yokes are magnetically coupled. Each yoke has its own set of spring supports from above and rolling/sliding supports from below to allow the magnetron shape to conform to that of the target. Alternatively, narrow slots are formed in a unitary yoke.
摘要翻译：一种磁控管扫描和支撑机构，其中磁控管通过耦合到磁控管上的不同水平位置的多个弹簧部分地从顶部扫描机构支撑，并且在其上滑动或滚动的靶上的多个位置处从下方部分支撑。在一个实施例中，轭板是连续且均匀的。在另一个实施例中，磁控管的磁轭被分成两个柔性轭，例如互补的蛇形形状和各个极性的每个支撑磁体。磁轭分开足够小的间隙，使得两个磁轭磁耦合。每个轭具有其自己的一组弹簧支撑件，从上方起滚动/滑动支撑件，从而允许磁控管形状与靶材的形状一致。或者，窄槽形成为单一轭。

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