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    • 6. 发明授权
    • Digital non-contact blade position detection apparatus
    • 数字非接触刀片位置检测装置
    • US06348943B1
    • 2002-02-19
    • US09182629
    • 1998-10-30
    • Chien-Rong HuangChih-Yi LaiChien-Hsing LinChun-Hung Liu
    • Chien-Rong HuangChih-Yi LaiChien-Hsing LinChun-Hung Liu
    • H04N718
    • B23D59/002G01D5/342
    • A digital non-contact blade position detection apparatus is provided for use on a wafer dicing machine for blade position detection so as to correct the position of the cutting blade. The apparatus includes a light source for generating a light beam; a light converging optical unit for converting the light beam from the light source to a preset converging point; light diverting means for diverting the beam light from the light converging optical unit to a preset optical path in which the blade is interdisposed; a light diverging optical unit for diverging the diverted light beam from the light diverting means; a CCD position detector, disposed at a third predetermined distance from the light diverging optical unit, for detecting a displacament of a diffractive part of the light beam passing through the optical path between the first and second that is partly blocked out by the blade; an analog-to-digital converter for converting the analog displacement signal from the CCD position detector into digital data; and computer means for processing the digital data to thereby determine the required correction in the position of the blade due to wear to the blade. This apparatus has the benefits of performing the blade position detection in a non-contact manner, enhancing the resolving power to submicron level; allowing the detection to be unaffected by alien particles; and performing the blade position detection with quick response and high precision.
    • 提供了一种用于刀片位置检测的晶片切割机上的数字非接触刀片位置检测装置,以便校正切割刀片的位置。 该装置包括用于产生光束的光源; 用于将来自光源的光束转换为预设会聚点的聚光光学单元; 光转向装置,用于将来自聚光光学单元的光束转向预定的光路,其中叶片被插入其中; 光发散光学单元,用于使所述转向光束从所述光转向装置发散; CCD位置检测器,设置在距发光光学单元第三预定距离处,用于检测通过第一和第二光路之间的光束的衍射部分的位置,该光路部分被叶片阻挡; 用于将来自CCD位置检测器的模拟位移信号转换成数字数据的模拟 - 数字转换器; 以及用于处理数字数据的计算机装置,从而由​​于刀片的磨损而确定刀片位置所需的校正。 该装置具有以非接触方式执行叶片位置检测的优点,将分辨能力提高到亚微米级; 允许检测不受外来颗粒的影响; 并具有快速响应和高精度执行刀片位置检测。