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    • 7. 发明申请
    • METHOD OF FABRICATING SOLAR CELL
    • 制造太阳能电池的方法
    • US20100240170A1
    • 2010-09-23
    • US12508563
    • 2009-07-24
    • Wen-Ching Sun
    • Wen-Ching Sun
    • H01L31/0232
    • H01L31/068H01L31/1804Y02E10/547Y02P70/521
    • A method of fabricating a solar cell is provided. A dopant material layer is deposited on a front surface of a semiconductor substrate and an over-depositing dopant layer is also formed on a back surface of the semiconductor substrate, wherein dopants of the dopant material layer diffuse into the front surface of the semiconductor substrate to form a doping layer and dopants of the over-depositing dopant layer diffuse into the back surface of the semiconductor substrate to form a doping residual layer during said depositing process. The dopant material layer and the over-depositing dopant layer are removed. An anti-reflective layer is formed on the doping layer. After the doping residual layer on the semiconductor substrate is removed to expose the back surface of the semiconductor substrate, a passivation layer is formed on the exposed back surface of the semiconductor substrate. Then, a first electrode and a second electrode are formed.
    • 提供一种制造太阳能电池的方法。 掺杂剂材料层沉积在半导体衬底的前表面上,并且在半导体衬底的后表面上也形成过沉积掺杂剂层,其中掺杂剂材料层的掺杂剂扩散到半导体衬底的前表面,以 形成掺杂层,并且过沉积掺杂剂层的掺杂剂扩散到半导体衬底的背表面中,以在所述沉积工艺期间形成掺杂残余层。 去除掺杂剂材料层和过度沉积掺杂剂层。 在掺杂层上形成抗反射层。 在去除半导体衬底上的掺杂残余层以露出半导体衬底的背面之后,在半导体衬底的暴露的背面上形成钝化层。 然后,形成第一电极和第二电极。