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1. 发明授权

US07307137B2 Low dielectric constant materials and methods of preparation thereof 有权
标题翻译：低介电常数材料及其制备方法
公开(公告)号：US07307137B2
公开(公告)日：2007-12-11
申请号：US10466651
申请日：2001-10-18
申请人： Kreisler Lau , Feng Quan Liu , Paul Apen , Boris Korolev , Emma Brouk , Ruslan Zherebin , David Nalewajek , Roger Leung
发明人： Kreisler Lau , Feng Quan Liu , Paul Apen , Boris Korolev , Emma Brouk , Ruslan Zherebin , David Nalewajek , Roger Leung
IPC分类号： C08G63/78
CPC分类号： C08G61/12 , C07C13/615 , C07C13/64 , C07C15/54 , C07C17/10 , C07C17/269 , C07C2603/74 , C07C2603/90 , C07F7/0805 , C08F238/00 , C08G61/02 , H01L2924/0002 , C07C23/46 , C07C25/22 , H01L2924/00
摘要： The present invention is directed to low dielectric polymers and to methods of producing these low dielectric constant polymers, dielectric materials and layers, and electronic components. In one aspect of the present invention, an isomeric mixture of thermosetting monomers, wherein the monomers have a core structure and a plurality of arms, is provided, and the isomeric mixture of thermosetting monomers is polymerized, wherein polymerization comprises a reaction of an ethynyl group that is located in at least one arm of a monomer. In yet another aspect of the inventive subject matter, spin-on low dielectric constant materials are formed having a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbone are crosslinked via the first and second reactive groups in a crosslinking reaction preferably without an additional crosslinker, and wherein a cage structure having at least eight (8) atoms is covalently bound to at least one of the first and second backbone.
摘要翻译：本发明涉及低介电聚合物以及生产这些低介电常数聚合物，介电材料和层以及电子元件的方法。在本发明的一个方面，提供其中单体具有核心结构和多个臂的热固性单体的异构体混合物，并且热固性单体的异构体混合物聚合，其中聚合包括乙炔基其位于单体的至少一个臂中。在本发明主题的另一方面，形成旋涂低介电常数材料，其具有具有芳族部分和第一反应性基团的第一主链和具有芳族部分和第二反应性基团的第二主链，其中第一并且第二主链在交联反应中通过第一和第二反应性基团交联，优选不含另外的交联剂，并且其中具有至少八个（8）原子的笼结构共价结合至第一和第二主链中的至少一个。

2. 发明授权

US06797777B2 Low dielectric constant organic dielectrics based on cage-like structures 失效
标题翻译：基于笼状结构的低介电常数有机电介质
公开(公告)号：US06797777B2
公开(公告)日：2004-09-28
申请号：US09902924
申请日：2001-07-10
申请人： Kreisler Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Rusian Zherebin , Roger Leung
发明人： Kreisler Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Rusian Zherebin , Roger Leung
IPC分类号： C08F28100
CPC分类号： C08F257/02 , C08F8/00 , C08G61/02 , C08G61/12 , C08G81/00 , C08L51/003 , H01B3/307 , H01B3/427 , C08L2666/02
摘要： A low dielectric constant material has a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbones are crosslinked via the first and second reactive groups in a crosslinking reaction without an additional crosslinker, and wherein a cage structure having at least 10 atoms is covalently bound to at least one of the first and second backbone.
摘要翻译：低介电常数材料具有具有芳族部分和第一反应性基团的第一主链和具有芳族部分和第二反应性基团的第二主链，其中第一和第二主链通过第一和第二反应性基团在交联反应而没有额外的交联剂，并且其中具有至少10个原子的笼状结构与第一和第二主链中的至少一个共价结合。

3. 发明授权

US06849696B2 Low dielectric constant organic dielectrics based on cage-like structures 失效
标题翻译：基于笼状结构的低介电常数有机电介质
公开(公告)号：US06849696B2
公开(公告)日：2005-02-01
申请号：US10293024
申请日：2002-11-12
申请人： Kreisler Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Roger Leung
发明人： Kreisler Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Roger Leung
IPC分类号： C08G65/40 , C08F8/00 , C08F257/02 , C08F277/00 , C08F281/00 , C08G61/12 , C08G81/00 , C08J3/24 , C08L1/00 , C08L51/00 , C08L67/00 , C08L67/06 , C08L71/12 , H01L20060101 , H01L21/312
CPC分类号： C08J3/246 , C08F257/02 , C08G61/12 , C08L51/003 , Y10S977/902 , Y10S977/963 , C08L2666/02
摘要： A low dielectric constant material has a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbones are crosslinked via the first and second reactive groups in a crosslinking reaction without an additional crosslinker, and wherein a cage structure having at least 10 atoms is covalently bound to at least one of the first and second backbone.
摘要翻译：低介电常数材料具有具有芳族部分和第一反应性基团的第一主链和具有芳族部分和第二反应性基团的第二主链，其中第一和第二主链通过第一和第二反应性基团在交联反应而没有额外的交联剂，并且其中具有至少10个原子的笼状结构与第一和第二主链中的至少一个共价结合。

4. 发明授权

US06509415B1 Low dielectric constant organic dielectrics based on cage-like structures 失效
公开(公告)号：US06509415B1
公开(公告)日：2003-01-21
申请号：US09545058
申请日：2000-04-07
申请人： Kreisler Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Rusian Zherebin , Roger Leung
发明人： Kreisler Lau , Feng Quan Liu , Boris Korolev , Emma Brouk , Rusian Zherebin , Roger Leung
IPC分类号： C08F28100
CPC分类号： C08J3/246 , C08F257/02 , C08G61/12 , C08L51/003 , Y10S977/902 , Y10S977/963 , C08L2666/02
摘要： A low dielectric constant material has a first backbone with an aromatic moiety and a first reactive group, and a second backbone with an aromatic moiety and a second reactive group, wherein the first and second backbones are crosslinked via the first and second reactive groups in a crosslinking reaction without an additional crosslinker, and wherein a cage structure having at least 10 atoms is covalently bound to at least one of the first and second backbone.

5. 发明授权

US06172128B2 Nanoporous polymers crosslinked via cyclic structures 失效
标题翻译：通过环状结构交联的纳米多孔聚合物
公开(公告)号：US06172128B2
公开(公告)日：2001-01-09
申请号：US09544722
申请日：2000-04-06
申请人： Kreisler Lau , Tian-An Chen , Roger Leung
发明人： Kreisler Lau , Tian-An Chen , Roger Leung
IPC分类号： C08J902
CPC分类号： C08J3/246 , C08J9/26 , C08J2201/046
摘要： Nanoporous polymeric materials are fabricated in which polymeric strands are crosslinked via ring structures. Preferred ring structures are formed de novo during crosslinking, and at least some of the ring structures are preferably included in the backbones of the strands. At least one of the ring structures may advantageously comprise an aromatic structure, and may more advantageously comprise a benzyl moiety. Especially preferred polymers comprise a poly(arylene ether) synthesized from a difluoroaromatic portion and an aromatic bisphenolic portion. In another preferred aspect, the difluoroaromatic portions of the poly(arylene ether) carry at least two different crosslinking functionalities. In an even more preferred aspect, the crosslinking functionalities comprise an ethynyl and a tetracyclone. Nanoporosity is preferably introduced by thermolyzing one or more thermolabile portions in the crosslinked polymer. An especially preferred thermolabile portion comprises ethylene glycol-poly(caprolactone).
摘要翻译：制造纳米多孔聚合材料，其中聚合物链通过环结构交联。优选的环结构在交联期间从头形成，并且至少一些环结构优选包含在该链的主链中。至少一个环结构可以有利地包含芳族结构，并且可以更有利地包含苄基部分。特别优选的聚合物包括由二氟芳族部分和芳族双酚部分合成的聚（亚芳基醚）。在另一个优选的方面，聚（亚芳基醚）的二氟芳香族部分携带至少两种不同的交联官能团。在更优选的方面，交联官能团包括乙炔基和四环。优选通过热交换聚合物中的一个或多个热不稳定部分来引入纳米孔。特别优选的耐热不稳定部分包括乙二醇 - 聚（己内酯）。

6. 发明授权

US06444715B1 Low dielectric materials and methods of producing same 失效
公开(公告)号：US06444715B1
公开(公告)日：2002-09-03
申请号：US09587851
申请日：2000-06-06
申请人： Shyama Mukherjee , Roger Leung , Kreisler Lau
发明人： Shyama Mukherjee , Roger Leung , Kreisler Lau
IPC分类号： C08J928
CPC分类号： H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02343 , H01L21/31695 , Y10T428/259
摘要： In accordance with the present invention, compositions and methods are provided in which the mechanical strength and durability of a precursor material having a plurality of pores is increased by a) providing a precursor material; b) treating the precursor material to form a nanoporous aerogel, preferably by using a supercritical drying process; c) providing a blending material having a reinforcing component and a volatile component; d) combining the nanoporous aerogel and the blending material to form an amalgamation layer; and e) treating the amalgamation layer to increase the mechanical strength of the layer by a substantial amount, and to ultimately form a low dielectric material that can be utilized in various applications.

7. 发明授权

US06627669B2 Low dielectric materials and methods of producing same 失效
公开(公告)号：US06627669B2
公开(公告)日：2003-09-30
申请号：US10189318
申请日：2002-07-03
申请人： Shyama Mukherjee , Roger Leung , Kreisler Lau
发明人： Shyama Mukherjee , Roger Leung , Kreisler Lau
IPC分类号： C08J928
CPC分类号： H01L21/31695 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02343 , H05K1/162 , H05K2201/0116 , H05K2201/0209 , Y10T428/249978 , Y10T428/259
摘要： In accordance with the present invention, compositions and methods are provided in which the mechanical strength and durability of a precursor material having a plurality of pores is increased by a) providing a precursor material; b) treating the precursor material to form a nanoporous aerogel, preferably by using a supercritical drying process; c) providing a blending material having a reinforcing component and a volatile component; d) combining the nanoporous aerogel and the blending material to form an amalgamation layer; and e) treating the amalgamation layer to increase the mechanical strength of the layer by a substantial amount, and to ultimately form a low dielectric material that can be utilized in various applications.

8. 发明申请

US20060057837A1 Treating agent materials 有权
标题翻译：处理剂材料
公开(公告)号：US20060057837A1
公开(公告)日：2006-03-16
申请号：US11203558
申请日：2005-08-12
申请人： Anil Bhanap , Boris Korolev , Roger Leung , Beth Munoz
发明人： Anil Bhanap , Boris Korolev , Roger Leung , Beth Munoz
IPC分类号： H01L21/4763
CPC分类号： H01L21/02216 , H01L21/02126 , H01L21/316 , H01L21/31695 , H01L21/76814 , H01L21/76826
摘要： A treating agent composition for increasing the hydrophobicity of an organosilicate glass dielectric film when applied to said film. It includes a component capable of alkylating or arylating silanol moieties of the organosilicate glass dielectric film via silylation, and an activating agent which may be an acid, a base, an onium compound, a dehydrating agent, and combinations thereof, and a solvent or mixture of a main solvent and a co-solvent.
摘要翻译：一种用于在施加到所述膜上时增加有机硅酸盐玻璃介电膜的疏水性的处理剂组合物。它包括能够通过甲硅烷基化将有机硅酸盐玻璃介电膜的硅烷醇部分烷基化或芳基化的组分，以及可以是酸，碱，鎓化合物，脱水剂及其组合的活化剂，以及溶剂或混合物的主要溶剂和共溶剂。

9. 发明授权

US06890641B1 Low dielectric materials and methods of producing same 失效
标题翻译：低介电材料及其制造方法
公开(公告)号：US06890641B1
公开(公告)日：2005-05-10
申请号：US10615812
申请日：2003-07-08
申请人： Shyama Mukherjee , Roger Leung , Kreisler Lau
发明人： Shyama Mukherjee , Roger Leung , Kreisler Lau
IPC分类号： B32B5/16 , C08J9/28 , H01L20060101 , H01L21/316 , H05K1/16
CPC分类号： H01L21/31695 , H01L21/02118 , H01L21/02126 , H01L21/02203 , H01L21/02216 , H01L21/02282 , H01L21/02343 , H05K1/162 , H05K2201/0116 , H05K2201/0209 , Y10T428/249978 , Y10T428/259
摘要： In accordance with the present invention, compositions and methods are provided in which the mechanical strength and durability of a precursor material having a plurality of pores is increased by a) providing a precursor material; b) treating the precursor material to form a nanoporous aerogel, preferably by using a supercritical drying process; c) providing a blending material having a reinforcing component and a volatile component; d) combining the nanoporous aerogel and the blending material to form an amalgamation layer; and e) treating the amalgamation layer to increase the mechanical strength of the layer by a substantial amount and to ultimately form a low dielectric material that can be utilized in various applications.
摘要翻译：根据本发明，提供了组合物和方法，其中通过以下方式提高具有多个孔的前体材料的机械强度和耐久性：a）提供前体材料; b）优选通过使用超临界干燥方法处理前体材料以形成纳米多孔气凝胶; c）提供具有增强组分和挥发性组分的共混材料; d）结合纳米多孔气凝胶和共混材料以形成合并层; 和e）处理合并层以增加层的机械强度大量并最终形成可用于各种应用的低介电材料。

10. 发明授权

US06313185B1 Polymers having backbones with reactive groups employed in crosslinking as precursors to nanoporous thin film structures 失效
标题翻译：具有反应性基团的骨架的聚合物用作交联作为纳米多孔薄膜结构的前体
公开(公告)号：US06313185B1
公开(公告)日：2001-11-06
申请号：US09538276
申请日：1998-09-24
申请人： Kreisler Lau , Tian-An Chen , Roger Leung
发明人： Kreisler Lau , Tian-An Chen , Roger Leung
IPC分类号： C08J902
CPC分类号： C08J9/26 , C08J2201/046 , H05K1/0313
摘要： Nanoporous materials are fabricated from polymers having backbones with reactive groups used in crosslinking. In one aspect of preferred methods and compositions, the reactive groups in the backbone comprise a diene and a dienophile. The diene may advantageously comprise a tetracyclone, and the dienophile may advantageously comprise an ethynyl. In another aspect of preferred methods and compositions, the reactive groups in the backbone are included in a conjugated system. Especially preferred polymeric strands comprise a poly(arylene ether) synthesized from a difluoroaromatic portion and an aromatic bisphenolic portion. It is still more preferred that the difluoroaromatic portions of the poly(arylene ether) are modified in such a way that some difluoroaromatic portions carry a thermolabile portion. In still other aspects crosslinking may advantageously occur without reliance on an exogenous crosslinker.
摘要翻译：纳米多孔材料由具有用于交联的反应性基团的主链的聚合物制成。在优选的方法和组合物的一个方面，主链中的反应性基团包含二烯和亲二烯体。二烯可有利地包含四环，并且亲二烯体可有利地包含乙炔基。在优选方法和组合物的另一方面，骨架中的反应性基团包括在共轭体系中。特别优选的聚合物链包含由二氟芳族部分和芳族双酚部分合成的聚（亚芳基醚）。更优选的是，聚（亚芳基醚）的二氟芳香族部分以使得一些二氟芳香族部分携带不可热热部分的方式被改性。在其它方面，交联可有利地发生，而不依赖于外源交联剂。

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